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KDP晶体潮解抛光中抛光行程的研究
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作者 刘佳航 郭少龙 +2 位作者 潘丽莉 白浩辰 张庆怀 《哈尔滨商业大学学报(自然科学版)》 CAS 2023年第1期67-71,共5页
对KDP晶体潮解抛光过程进行了运动学分析,得到了KDP晶体表面上一点相对于抛光垫的抛光行程的表达式.分别计算了KDP晶体表面上一点到载样盘圆心的水平距离、抛光垫转数、摆动周期取不同值时KDP晶体表面上一点相对于抛光垫的抛光行程,并... 对KDP晶体潮解抛光过程进行了运动学分析,得到了KDP晶体表面上一点相对于抛光垫的抛光行程的表达式.分别计算了KDP晶体表面上一点到载样盘圆心的水平距离、抛光垫转数、摆动周期取不同值时KDP晶体表面上一点相对于抛光垫的抛光行程,并绘制了抛光行程曲线,得到了这些参数对抛光行程的影响规律. 展开更多
关键词 晶体 KDP 抛光 潮解作用 抛光行程 材料去除率
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KDP晶体潮解抛光中运动轨迹的仿真与优化
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作者 郭少龙 刘佳航 潘丽莉 《哈尔滨商业大学学报(自然科学版)》 CAS 2023年第5期558-563,575,共7页
在对KDP晶体潮解抛光原理进行描述的基础之上,对KDP晶体潮解抛光过程进行了运动学分析,得到了KDP晶体表面上一点相对于抛光垫的运动轨迹表达式.根据运动轨迹表达式和仿真条件,应用Matlab软件分别绘制了KDP晶体表面上一点到载样盘圆心的... 在对KDP晶体潮解抛光原理进行描述的基础之上,对KDP晶体潮解抛光过程进行了运动学分析,得到了KDP晶体表面上一点相对于抛光垫的运动轨迹表达式.根据运动轨迹表达式和仿真条件,应用Matlab软件分别绘制了KDP晶体表面上一点到载样盘圆心的水平距离、抛光垫转数、摆动周期取不同值时KDP晶体表面上一点相对于抛光垫的运动轨迹仿真图形,得到了这些参数对KDP晶体表面质量的影响规律,并据此确定了这些参数的优化方向. 展开更多
关键词 晶体 KDP 抛光 潮解作用 运动轨迹 表面质量
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FTIR-ATR chamber for observation of efflorescence and deliquescence processes of NaClO_(4) aerosol particles on ZnSe substrate 被引量:3
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作者 ZHANG Yunhong HU Yong'an DING Fei ZHAO Lijun 《Chinese Science Bulletin》 SCIE EI CAS 2005年第19期2149-2152,共4页
NaClO4 aerosol particles with diameter of 5―20 microns are deposited on the ZnSe substrate. An FTIR-ATR chamber on the ZnSe substrate is set up to ob-serve the structural changes of NaClO4 aerosol particles at crysta... NaClO4 aerosol particles with diameter of 5―20 microns are deposited on the ZnSe substrate. An FTIR-ATR chamber on the ZnSe substrate is set up to ob-serve the structural changes of NaClO4 aerosol particles at crystallization relative humidity (CRH) and deliquescence relative humidity (DRH). With the decrease of RH (relative humidity) from 96% to 24% in the efflorescence process, the absorbance of O-H stretching band of the aerosol solutions continuously decreases. A sudden decrease of the water peak is observed at RH20%, where solid particles form. Very small amount of residual interfacial water, with two weak peaks at 3602 and 3533 cm-1, can still be resolved in the FTIR-ATR spectra of the solid particles. In the deliquescence process of the same sample, little spectral changes are ob-served when the value of RH varies from 5% to 29%. Before the abrupt increase of the O-H stretching band at the DRH of about RH46%, a pre-deliquescence process is observed, i.e. in the RH range between 33% and 46%, there is really a slow absorbance increase for the peak area of O-H stretching band. The O-H stretching band shows an arciform O-H en-velope, totally different from not only the FTIR-ATR spectra of ClO4? solutions either under supersaturated state or in diluted state, but also the characteristic of the residually in-terfacial water discussed in the efflorescence process. Such kind of water is considered as pure water, indicating that small amount of water aggregates in the microspaces of solid aerosol particles due to the capillary cohesion effect. When the RH arrives at RH44%, two weak shoulders at 3384 and 3260 cm?1 can be resolved, and the solid NaClO4 particles begin to be dissolved by increasing capillary cohesion water. The spectral characteristic of the ν3-ClO4? band also shows the transition from solid particles to mainly solvated ClO4? ions. 展开更多
关键词 FTIR-ATR 气溶胶 毛细管凝聚 NaClO4 风化作用 潮解作用
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