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Internal Defect Measurement of Scattering Media by Optical Coherence Microscopy
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作者 ZHUYong-kai ZHAOHong +1 位作者 WANGZhao WANGJun-li 《Semiconductor Photonics and Technology》 CAS 2005年第2期142-144,共3页
Optical coherence microscopy is applied to measure scattering media'sinternal defect, which based on low coherence interferometry and confocal microscopy. Opticalcoherence microscopy is more effective in the rejec... Optical coherence microscopy is applied to measure scattering media'sinternal defect, which based on low coherence interferometry and confocal microscopy. Opticalcoherence microscopy is more effective in the rejection of out of focus and multiple scatteredphotons originating further away of the focal plane. With the three-dimension scanning, the internaldefect is detected by measuring the thickness of different points on the sample. The axialresolution is 6 μm and lateral resolution is 1. 2 μm. This method is possessed of the advantagesover the other measurement method of scattering media, such as non-destruction and high-resolution. 展开更多
关键词 optical coherence microscopy scattering media internal defect
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