Photosensitive polyimide/titania hybrid was prepared successfully by sol gel process. This hybrid material posseses a good photolithographic property under UV exposure. The introduction of titania leads to the increas...Photosensitive polyimide/titania hybrid was prepared successfully by sol gel process. This hybrid material posseses a good photolithographic property under UV exposure. The introduction of titania leads to the increase in refractive index of the hybrid.展开更多
文摘Photosensitive polyimide/titania hybrid was prepared successfully by sol gel process. This hybrid material posseses a good photolithographic property under UV exposure. The introduction of titania leads to the increase in refractive index of the hybrid.