阐述了基于微型涡轮发动机实现超高能量密度 Power MEMS的构想及其重要意义。分析了围绕证实基于微型涡轮发动机的超高能量密度Power MEMS成立性所进行的相关理论和实验研究。着眼于实现微型涡轮发动机的样机试制 ,提出了基于微型涡轮...阐述了基于微型涡轮发动机实现超高能量密度 Power MEMS的构想及其重要意义。分析了围绕证实基于微型涡轮发动机的超高能量密度Power MEMS成立性所进行的相关理论和实验研究。着眼于实现微型涡轮发动机的样机试制 ,提出了基于微型涡轮发动机实现超高能量密度展开更多
A novel fabrication process for micro patterns with curvature was introduced. The curved structures were made by compensating rectangular micro structures with liquid photoresist layer. Because of the surface tension ...A novel fabrication process for micro patterns with curvature was introduced. The curved structures were made by compensating rectangular micro structures with liquid photoresist layer. Because of the surface tension of the liquid in micro scale, various shapes of meniscus can he made on the micro channels. The micro channels were made on the silicon suhstrate in advance, and then the liquid layer was coated on the micro channels. From the nature of liquid behavior, the curved patterns with smooth surface are obtained, which cannot be made easily with the conventional mechanical machining, as well as with the microfabrication processes, such as wet and dry etching. With this principle, it is expected that the smooth and curved surfaces can be made by simple processes and the results can be applied widely, such as optical patterns.展开更多
基金the support of Ministry of Knowledge and Economy through Strategic Technology Development ProjectConversing Research Center Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology
文摘A novel fabrication process for micro patterns with curvature was introduced. The curved structures were made by compensating rectangular micro structures with liquid photoresist layer. Because of the surface tension of the liquid in micro scale, various shapes of meniscus can he made on the micro channels. The micro channels were made on the silicon suhstrate in advance, and then the liquid layer was coated on the micro channels. From the nature of liquid behavior, the curved patterns with smooth surface are obtained, which cannot be made easily with the conventional mechanical machining, as well as with the microfabrication processes, such as wet and dry etching. With this principle, it is expected that the smooth and curved surfaces can be made by simple processes and the results can be applied widely, such as optical patterns.
