An initial structure design of MMI 1×8 optical power splitters is reported.The waveguide material is Si-based SiO2 Ge-doped and deposited by PECVD method.Embedded strip structure is implied in the section design....An initial structure design of MMI 1×8 optical power splitters is reported.The waveguide material is Si-based SiO2 Ge-doped and deposited by PECVD method.Embedded strip structure is implied in the section design.By using BPM-CAD,a favorable result is obtained that this device has a sound uniformity and fairly low loss.Meanwhile,simulations of designs with certain changed parameters is also implemented for a better design configuration.展开更多
文摘An initial structure design of MMI 1×8 optical power splitters is reported.The waveguide material is Si-based SiO2 Ge-doped and deposited by PECVD method.Embedded strip structure is implied in the section design.By using BPM-CAD,a favorable result is obtained that this device has a sound uniformity and fairly low loss.Meanwhile,simulations of designs with certain changed parameters is also implemented for a better design configuration.