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Automated Phase-measuring Profilometry of 3-D Diffuse Objects Using a Single Phase Step Method 被引量:2
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作者 ZHAO Hong,SONG Yuanhe,CHEN Wenyi,TAN Yushan (Research Institute for Laser & Infrared Application, Xi’an Jiaotong University,Xi’an 710049,CHN) 《Semiconductor Photonics and Technology》 CAS 1998年第1期25-30,35,共7页
The technique of phase measuring profilometry using a single phase step method is proposed.This method can automatically obtain phase value at each pixel by using a discret cosine transform algorithm.The method is abl... The technique of phase measuring profilometry using a single phase step method is proposed.This method can automatically obtain phase value at each pixel by using a discret cosine transform algorithm.The method is able to automatically recognize any position between depression and elevation on an object surface.Theoretical analysis and experimental verification are presented. 展开更多
关键词 Discret Cosine Transform Noncontact Optical Measurement One Step Phase-shifting Phase-measuring 3-D Profilometry
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