With in situ optical emission spectroscopy （OES） diagnosis on VHF-generated H2 ＋ SiH4 plasmas,and with the measurements of deposition rate and structure of μc-Si. H thin films fabricated with VHFPECVD technique at...With in situ optical emission spectroscopy （OES） diagnosis on VHF-generated H2 ＋ SiH4 plasmas,and with the measurements of deposition rate and structure of μc-Si. H thin films fabricated with VHFPECVD technique at different substracte temperature, influence of substrate temperature on the deposition of μc-Si.H thin film and on its structural properties have been investigated. The results show that with the increase of substrate temperature,the crystalline volume fraction Xc and average grain size d are enhanced monotonously, but the deposition rate increases firstly and then decreases. The optimized substrate temperature for μc-Si：H thin films deposition under our current growth system is about 210 ℃ ,at which deposition rate O. 8 nm/s of pc-Si;H thin film with Xc-60% and d-9 nm can be obtained.展开更多
The incubation layer with amorphous structure between the substrate and crystalline layer may obviously affect the performance for a microcrystalline Si thin film transistor (μc-Si TFT),especially for the bottom gate...The incubation layer with amorphous structure between the substrate and crystalline layer may obviously affect the performance for a microcrystalline Si thin film transistor (μc-Si TFT),especially for the bottom gate TFT(BG-TFT).It is found that decreasing the ratio of SiH 4/(H 2+SiH 4) is an effective way to decrease the incubation layer thickness of μc-Si directly deposited by VHF PECVD without any further thermal or laser treatment.Based on the μc-Si with a thin incubation layer,the BG-TFT with Al/SiN x/μc-Si/n+-μc-Si/Al structure is fabricated.The ratio of on-state current to off-state current is up to 106,the mobility is around 0.7cm2/(V·s),and the threshold voltage is about 5V.展开更多
采用RF PECVD方法,在P a SiC:H薄膜沉积技术基础上,通过逐步减小碳、硼的掺杂浓度,增大氢稀释率,使材料从非晶态向微晶态转变,在获得本征微晶材料之后,再逐步增大硼掺杂浓度,得到P型微晶硅薄膜材料(暗电导率为5.22×10-3S/cm,光学...采用RF PECVD方法,在P a SiC:H薄膜沉积技术基础上,通过逐步减小碳、硼的掺杂浓度,增大氢稀释率,使材料从非晶态向微晶态转变,在获得本征微晶材料之后,再逐步增大硼掺杂浓度,得到P型微晶硅薄膜材料(暗电导率为5.22×10-3S/cm,光学带隙大于2.0eV)。在这个过程中可以明显观察到碳、硼抑制材料晶化的作用。展开更多
This paper reports that a double N layer （a-Si：H/μc-Si：H） is used to substitute the single microcrystalline silicon n layer （n-μc-Si：H） in n/p tunnel recombination junction between subcells in a-Si：H/μc-Si...This paper reports that a double N layer （a-Si：H/μc-Si：H） is used to substitute the single microcrystalline silicon n layer （n-μc-Si：H） in n/p tunnel recombination junction between subcells in a-Si：H/μc-Si：H tandem solar cells. The electrical transport and optical properties of these tunnel recombination junctions are investigated by current voltage measurement and transmission measurement. The new n/p tunnel recombination junction shows a better ohmic contact. In addition, the n/p interface is exposed to the air to examine the effect of oxidation on the tunnel recombination junction performance. The open circuit voltage and FF of a-Si：H/μc-Si：H tandem solar cell are all improved and the current leakage of the subcells can be effectively prevented efficiently when the new n/p junction is implemented as tunnel recombination junction.展开更多
文摘With in situ optical emission spectroscopy （OES） diagnosis on VHF-generated H2 ＋ SiH4 plasmas,and with the measurements of deposition rate and structure of μc-Si. H thin films fabricated with VHFPECVD technique at different substracte temperature, influence of substrate temperature on the deposition of μc-Si.H thin film and on its structural properties have been investigated. The results show that with the increase of substrate temperature,the crystalline volume fraction Xc and average grain size d are enhanced monotonously, but the deposition rate increases firstly and then decreases. The optimized substrate temperature for μc-Si：H thin films deposition under our current growth system is about 210 ℃ ,at which deposition rate O. 8 nm/s of pc-Si;H thin film with Xc-60% and d-9 nm can be obtained.
文摘The incubation layer with amorphous structure between the substrate and crystalline layer may obviously affect the performance for a microcrystalline Si thin film transistor (μc-Si TFT),especially for the bottom gate TFT(BG-TFT).It is found that decreasing the ratio of SiH 4/(H 2+SiH 4) is an effective way to decrease the incubation layer thickness of μc-Si directly deposited by VHF PECVD without any further thermal or laser treatment.Based on the μc-Si with a thin incubation layer,the BG-TFT with Al/SiN x/μc-Si/n+-μc-Si/Al structure is fabricated.The ratio of on-state current to off-state current is up to 106,the mobility is around 0.7cm2/(V·s),and the threshold voltage is about 5V.
文摘采用RF PECVD方法,在P a SiC:H薄膜沉积技术基础上,通过逐步减小碳、硼的掺杂浓度,增大氢稀释率,使材料从非晶态向微晶态转变,在获得本征微晶材料之后,再逐步增大硼掺杂浓度,得到P型微晶硅薄膜材料(暗电导率为5.22×10-3S/cm,光学带隙大于2.0eV)。在这个过程中可以明显观察到碳、硼抑制材料晶化的作用。
基金Project supported by the State Key Development Program for Basic Research of China (Grant Nos 2006CB202602 and2006CB202603)the National Natural Science Foundation of China (Grant No 60506003)
文摘This paper reports that a double N layer （a-Si：H/μc-Si：H） is used to substitute the single microcrystalline silicon n layer （n-μc-Si：H） in n/p tunnel recombination junction between subcells in a-Si：H/μc-Si：H tandem solar cells. The electrical transport and optical properties of these tunnel recombination junctions are investigated by current voltage measurement and transmission measurement. The new n/p tunnel recombination junction shows a better ohmic contact. In addition, the n/p interface is exposed to the air to examine the effect of oxidation on the tunnel recombination junction performance. The open circuit voltage and FF of a-Si：H/μc-Si：H tandem solar cell are all improved and the current leakage of the subcells can be effectively prevented efficiently when the new n/p junction is implemented as tunnel recombination junction.
