通过研究金属钨化学机械研磨(W CMP)后清洗的一种水痕状的缺陷(Water mark like defect),经过一系列的实验,我们发现这种缺陷产生的原因是具有钨插塞(W Plug)结构的晶片在清洗中WO_3被溶解,并在随后的烘干环节中W析出并形成缺陷。在典型...通过研究金属钨化学机械研磨(W CMP)后清洗的一种水痕状的缺陷(Water mark like defect),经过一系列的实验,我们发现这种缺陷产生的原因是具有钨插塞(W Plug)结构的晶片在清洗中WO_3被溶解,并在随后的烘干环节中W析出并形成缺陷。在典型的W CMP之后增加一次DHF的清洗,能清除99.6%的该类型的缺陷,可应用到实际生产中,减少产品缺陷,提高产品良率。展开更多
This paper adopted an upstream FEM of 2-D unsteady flow to calculate the tidal flow in Zhoushan sea area. Based on the verification of the tidal current and environmental situation, the effects of the oily waste disch...This paper adopted an upstream FEM of 2-D unsteady flow to calculate the tidal flow in Zhoushan sea area. Based on the verification of the tidal current and environmental situation, the effects of the oily waste discharged from the oil berths on water quality have been calculated with a similar method. The isodilutions of oil pollutant are drawn from different sewage discharges. The moving loci of the slick centrepoint of oil spill have been calculated. The spreading area of the oil spill has also been forecasted. The results indicate that the set of models can predict the transport of oil spill in the sea area with reasonable accuracy.展开更多
通过对泥沙光学光谱特征和河口冲刷区水动力特征的研究和总结,分析了中巴地球资源卫星(China Brazil Earth Resource Satellite)CCD相机B1,B2和B3波段的太湖遥感图像,初步论证了入汇河流流速与冲刷区跨度的关系,以及遥感定量河口泥沙交...通过对泥沙光学光谱特征和河口冲刷区水动力特征的研究和总结,分析了中巴地球资源卫星(China Brazil Earth Resource Satellite)CCD相机B1,B2和B3波段的太湖遥感图像,初步论证了入汇河流流速与冲刷区跨度的关系,以及遥感定量河口泥沙交换强度和动态反映冲积扇发育方向及强度的可行性,并提出了河口泥沙交换强度的判别标志。展开更多
文摘通过研究金属钨化学机械研磨(W CMP)后清洗的一种水痕状的缺陷(Water mark like defect),经过一系列的实验,我们发现这种缺陷产生的原因是具有钨插塞(W Plug)结构的晶片在清洗中WO_3被溶解,并在随后的烘干环节中W析出并形成缺陷。在典型的W CMP之后增加一次DHF的清洗,能清除99.6%的该类型的缺陷,可应用到实际生产中,减少产品缺陷,提高产品良率。
文摘This paper adopted an upstream FEM of 2-D unsteady flow to calculate the tidal flow in Zhoushan sea area. Based on the verification of the tidal current and environmental situation, the effects of the oily waste discharged from the oil berths on water quality have been calculated with a similar method. The isodilutions of oil pollutant are drawn from different sewage discharges. The moving loci of the slick centrepoint of oil spill have been calculated. The spreading area of the oil spill has also been forecasted. The results indicate that the set of models can predict the transport of oil spill in the sea area with reasonable accuracy.
文摘通过对泥沙光学光谱特征和河口冲刷区水动力特征的研究和总结,分析了中巴地球资源卫星(China Brazil Earth Resource Satellite)CCD相机B1,B2和B3波段的太湖遥感图像,初步论证了入汇河流流速与冲刷区跨度的关系,以及遥感定量河口泥沙交换强度和动态反映冲积扇发育方向及强度的可行性,并提出了河口泥沙交换强度的判别标志。
