With ongoing economic,scientific,and technological developments,the electronic devices used in daily lives are developing toward precision and miniaturization,and so the demand for high-precision manufacturing machine...With ongoing economic,scientific,and technological developments,the electronic devices used in daily lives are developing toward precision and miniaturization,and so the demand for high-precision manufacturing machinery is expanding.The most important piece of equipment in modern high-precision manufacturing is the macro-micro motion platform(M3P),which offers high speed,precision,and efficiency and has macro-micro motion coupling characteristics due to its mechanical design and composition of its driving components.Therefore,the design of the control system is crucial for the overall precision of the platform;conventional proportional–integral–derivative control cannot meet the system requirements,and so M3Ps are the subject of a growing range of modern control strategies.This paper begins by describing the development history of M3Ps,followed by their platform structure and motion control system components,and then in-depth assessments of the macro,micro,and macro-micro control systems.In addition to examining the advantages and disadvantages of current macro-micro motion control,recent technological breakthroughs are noted.Finally,based on existing problems,future directions for M3P control systems are given,and the present conclusions offer guidelines for future work on M3Ps.展开更多
Research on adaptive deformable mirror technology for voice coil actuators(VCAs)is an important trend in the development of large ground-based telescopes.A voice coil adaptive deformable mirror contains a large number...Research on adaptive deformable mirror technology for voice coil actuators(VCAs)is an important trend in the development of large ground-based telescopes.A voice coil adaptive deformable mirror contains a large number of actuators,and there are problems with structural coupling and large temperature increases in their internal coils.Additionally,parameters of the traditional proportional integral derivative(PID)control cannot be adjusted in real-time to adapt to system changes.These problems can be addressed by introducing fuzzy control methods.A table lookup method is adopted to replace real-time calculations of the regular fuzzy controller during the control process,and a prototype platform has been established to verify the effectiveness and robustness of this process.Experimental tests compare the control performance of traditional and fuzzy proportional integral derivative(Fuzzy-PID)controllers,showing that,in system step response tests,the fuzzy control system reduces rise time by 20.25%,decreases overshoot by 78.24%,and shortens settling time by 67.59%.In disturbance rejection experiments,fuzzy control achieves a 46.09%reduction in the maximum deviation,indicating stronger robustness.The Fuzzy-PID controller,based on table lookup,outperforms the standard controller significantly,showing excellent potential for enhancing the dynamic performance and disturbance rejection capability of the voice coil motor actuator system.展开更多
This paper presents a precision centimeter-range positioner based on a Lorentz force actuator using flexure guides.An additional digital-to-analog converter and an operational amplifier(op amp)circuit together with a ...This paper presents a precision centimeter-range positioner based on a Lorentz force actuator using flexure guides.An additional digital-to-analog converter and an operational amplifier(op amp)circuit together with a suitable controller are used to enhance the positioning accuracy to the nanometer level.First,a suitable coil is designed for the actuator based on the stiffness of the flexure guide model.The flexure mechanism and actuator performance are then verified with finite element analysis.Based on these,a means to enhance the positioning performance electronically is presented together with the control scheme.Finally,a prototype is fabricated,and the performance is evaluated.This positioner features a range of 10 mm with a resolution of 10 nm.The proposed scheme can be extended to other systems.展开更多
More and more linear servo systems have been used in servo applications. Direct drive technology can greatly increase the bandwidth and the tracking accuracy. A position servo-system based on linear voice-coil motor w...More and more linear servo systems have been used in servo applications. Direct drive technology can greatly increase the bandwidth and the tracking accuracy. A position servo-system based on linear voice-coil motor was designed for one linear oscillation movement application. Besides the conventional position, speed and current control loops, the speed and acceleration feed-forward control of command position signal were also used. The experimental test proved the correctness of the design, and the system can track the given periodic sinusoid position command signal of 15Hz with high accuracy. The linear voice-coil motor is very suitable for short stroke position tracking application with high dynamic response.展开更多
Voice coil motor(VCM) is a special direct drive linear motor, which can convert electric energy directly into mechanical energy without the use of transmission mechanism. VCM has the advantages of simple structure, go...Voice coil motor(VCM) is a special direct drive linear motor, which can convert electric energy directly into mechanical energy without the use of transmission mechanism. VCM has the advantages of simple structure, good rigidity, fast response, silence, high linearity, no cogging force, no pulsation et al. It is widely used in the field of high-precision control. This paper reviews and summarizes the results of VCM research conducted by scholars from various countries, and summarizes the general situation of VCM servo control technology. Firstly, a basic description of VCM’s mathematical model and common control mechanisms is provided. The benefits, drawbacks, and application of control techniques in the field of VCM are all explored in detail;At the same time, the methods to improve control strategy are proposed;Then, combined with the analysis and research of scholars in various countries on VCM, the problems of difficult to establish accurate model, friction disturbance and mechanical vibration of VCM and the solutions to the corresponding problems are summarized;Finally, a summary of VCM’s application fields is provided.展开更多
A novel 4 by 4 array of electromagnetic micro-actuators operating on the principle of voice-coil actuators is presented. The intended application of the array is dynamic tactile stimulation, where multiple actuators g...A novel 4 by 4 array of electromagnetic micro-actuators operating on the principle of voice-coil actuators is presented. The intended application of the array is dynamic tactile stimulation, where multiple actuators generate an illusion of touching a moving pattern. In comparison to earlier designs [1-3], the device has smaller dimensions of 2.28 mm in diameter and 7 mm in length, which allowed its use in an array capable of hosting up to a 5 by 5 set of actuators with a rectangular shape covering an area of 18 mm by 21 mm. Using finite element analysis of several conceptual designs of actuators [1,4,5], it was established that the voice-coil type device (where the coil is the moving part) has most beneficial characteristics for the envisioned application. These include sufficient force over a relatively large distance, allowing tactile stimulation of surfaces with irregular shape, fast response, and small foot-print that matches the density of the tactile sensory neurons in the human finger. Eexperimental evaluation of the operation of neighboring actuators spaced at 3.3 mm apart, indicates that there is no crosstalk between the actuators. The resulting density exceeds that of previously reported alternative designs based on moveable permanent magnets [4,6]. Static force measurement indicate that each micro-actuator can produce at least 26 mN of repulsive force over a stroke of 2100 μm with a peak force of 34 mN. The driving circuit operates at 13.5V and generates a vibration frequency of up to 265 Hz without significant change of the force-displacement characteristics. In the higher frequency range (above 100 Hz) the actuator provides at least 15 mN of force over a slightly reduced stroke of 2300 μm, and a peak force of 21 mN. All of the above parameters meet the required threshold values of tactile human perception known from [2] and [3].展开更多
A novel non-contact spacecraft architecture with the extended stochastic state observer for disturbance rejection control of the gravity satellite is proposed.First,the precise linear driving non-contact voice-coil ac...A novel non-contact spacecraft architecture with the extended stochastic state observer for disturbance rejection control of the gravity satellite is proposed.First,the precise linear driving non-contact voice-coil actuators are used to separate the whole spacecraft into the non-contact payload module and the service module,and to build an ideal loop with precise dynamics for disturbance rejection control of the payload module.Second,an extended stochastic state observer is enveloped to construct the overall nonlinear external terms and the internal coupled terms of the payload module,enabling the controller design of the payload module turned into the linear form with simple bandwidth-parameterization tuning in the frequency domain.As a result,the disturbance rejection control of the payload module can be explicitly achieved in a timely manner without complicated tuning in actual implementation.Finally,an extensive numerical simulation is conducted to validate the feasibility and effectiveness of the proposed approach.展开更多
基金This research was supported financially by the China Postdoctoral Science Foundation,the National Natural Science Foundation of China(Grant No.51705132)the Young Backbone Teacher Training Program in Henan University of Technology,the Education Department of Henan Province Natural Science Project(Grant No.21A460006)the Natural Science Project of Henan Provincial Department of Science and Technology(Grant No.222102220088).
文摘With ongoing economic,scientific,and technological developments,the electronic devices used in daily lives are developing toward precision and miniaturization,and so the demand for high-precision manufacturing machinery is expanding.The most important piece of equipment in modern high-precision manufacturing is the macro-micro motion platform(M3P),which offers high speed,precision,and efficiency and has macro-micro motion coupling characteristics due to its mechanical design and composition of its driving components.Therefore,the design of the control system is crucial for the overall precision of the platform;conventional proportional–integral–derivative control cannot meet the system requirements,and so M3Ps are the subject of a growing range of modern control strategies.This paper begins by describing the development history of M3Ps,followed by their platform structure and motion control system components,and then in-depth assessments of the macro,micro,and macro-micro control systems.In addition to examining the advantages and disadvantages of current macro-micro motion control,recent technological breakthroughs are noted.Finally,based on existing problems,future directions for M3P control systems are given,and the present conclusions offer guidelines for future work on M3Ps.
基金supported by the National Key R&D Program of China (2022YFA1603001,2021YFC2801402)the National Nature Science Foundation of China (12073053)the Science and Technology Plan of Inner Mongolia (2021GG0245).
文摘Research on adaptive deformable mirror technology for voice coil actuators(VCAs)is an important trend in the development of large ground-based telescopes.A voice coil adaptive deformable mirror contains a large number of actuators,and there are problems with structural coupling and large temperature increases in their internal coils.Additionally,parameters of the traditional proportional integral derivative(PID)control cannot be adjusted in real-time to adapt to system changes.These problems can be addressed by introducing fuzzy control methods.A table lookup method is adopted to replace real-time calculations of the regular fuzzy controller during the control process,and a prototype platform has been established to verify the effectiveness and robustness of this process.Experimental tests compare the control performance of traditional and fuzzy proportional integral derivative(Fuzzy-PID)controllers,showing that,in system step response tests,the fuzzy control system reduces rise time by 20.25%,decreases overshoot by 78.24%,and shortens settling time by 67.59%.In disturbance rejection experiments,fuzzy control achieves a 46.09%reduction in the maximum deviation,indicating stronger robustness.The Fuzzy-PID controller,based on table lookup,outperforms the standard controller significantly,showing excellent potential for enhancing the dynamic performance and disturbance rejection capability of the voice coil motor actuator system.
基金Project supported by the National Key Research and Development Plan of China(No.2017YFB1303101)。
文摘This paper presents a precision centimeter-range positioner based on a Lorentz force actuator using flexure guides.An additional digital-to-analog converter and an operational amplifier(op amp)circuit together with a suitable controller are used to enhance the positioning accuracy to the nanometer level.First,a suitable coil is designed for the actuator based on the stiffness of the flexure guide model.The flexure mechanism and actuator performance are then verified with finite element analysis.Based on these,a means to enhance the positioning performance electronically is presented together with the control scheme.Finally,a prototype is fabricated,and the performance is evaluated.This positioner features a range of 10 mm with a resolution of 10 nm.The proposed scheme can be extended to other systems.
文摘More and more linear servo systems have been used in servo applications. Direct drive technology can greatly increase the bandwidth and the tracking accuracy. A position servo-system based on linear voice-coil motor was designed for one linear oscillation movement application. Besides the conventional position, speed and current control loops, the speed and acceleration feed-forward control of command position signal were also used. The experimental test proved the correctness of the design, and the system can track the given periodic sinusoid position command signal of 15Hz with high accuracy. The linear voice-coil motor is very suitable for short stroke position tracking application with high dynamic response.
文摘Voice coil motor(VCM) is a special direct drive linear motor, which can convert electric energy directly into mechanical energy without the use of transmission mechanism. VCM has the advantages of simple structure, good rigidity, fast response, silence, high linearity, no cogging force, no pulsation et al. It is widely used in the field of high-precision control. This paper reviews and summarizes the results of VCM research conducted by scholars from various countries, and summarizes the general situation of VCM servo control technology. Firstly, a basic description of VCM’s mathematical model and common control mechanisms is provided. The benefits, drawbacks, and application of control techniques in the field of VCM are all explored in detail;At the same time, the methods to improve control strategy are proposed;Then, combined with the analysis and research of scholars in various countries on VCM, the problems of difficult to establish accurate model, friction disturbance and mechanical vibration of VCM and the solutions to the corresponding problems are summarized;Finally, a summary of VCM’s application fields is provided.
文摘A novel 4 by 4 array of electromagnetic micro-actuators operating on the principle of voice-coil actuators is presented. The intended application of the array is dynamic tactile stimulation, where multiple actuators generate an illusion of touching a moving pattern. In comparison to earlier designs [1-3], the device has smaller dimensions of 2.28 mm in diameter and 7 mm in length, which allowed its use in an array capable of hosting up to a 5 by 5 set of actuators with a rectangular shape covering an area of 18 mm by 21 mm. Using finite element analysis of several conceptual designs of actuators [1,4,5], it was established that the voice-coil type device (where the coil is the moving part) has most beneficial characteristics for the envisioned application. These include sufficient force over a relatively large distance, allowing tactile stimulation of surfaces with irregular shape, fast response, and small foot-print that matches the density of the tactile sensory neurons in the human finger. Eexperimental evaluation of the operation of neighboring actuators spaced at 3.3 mm apart, indicates that there is no crosstalk between the actuators. The resulting density exceeds that of previously reported alternative designs based on moveable permanent magnets [4,6]. Static force measurement indicate that each micro-actuator can produce at least 26 mN of repulsive force over a stroke of 2100 μm with a peak force of 34 mN. The driving circuit operates at 13.5V and generates a vibration frequency of up to 265 Hz without significant change of the force-displacement characteristics. In the higher frequency range (above 100 Hz) the actuator provides at least 15 mN of force over a slightly reduced stroke of 2300 μm, and a peak force of 21 mN. All of the above parameters meet the required threshold values of tactile human perception known from [2] and [3].
基金supported by the National Natural Science Foundation of China(5170532751805329)+1 种基金Fundamental Research Funds for the Central Universities of China(NS2020065)the Natural Science Foundation of Shanghai(19ZR1453300).
文摘A novel non-contact spacecraft architecture with the extended stochastic state observer for disturbance rejection control of the gravity satellite is proposed.First,the precise linear driving non-contact voice-coil actuators are used to separate the whole spacecraft into the non-contact payload module and the service module,and to build an ideal loop with precise dynamics for disturbance rejection control of the payload module.Second,an extended stochastic state observer is enveloped to construct the overall nonlinear external terms and the internal coupled terms of the payload module,enabling the controller design of the payload module turned into the linear form with simple bandwidth-parameterization tuning in the frequency domain.As a result,the disturbance rejection control of the payload module can be explicitly achieved in a timely manner without complicated tuning in actual implementation.Finally,an extensive numerical simulation is conducted to validate the feasibility and effectiveness of the proposed approach.
