Besides serving as promising candidates for realizing quantum computing, superconducting quantum circuits are one of a few macroscopic physical systems in which fundamental quantum phenomena can be directly demonstrat...Besides serving as promising candidates for realizing quantum computing, superconducting quantum circuits are one of a few macroscopic physical systems in which fundamental quantum phenomena can be directly demonstrated and tested, giving rise to a vast field of intensive research work both theoretically and experimentally. In this paper we report our work on the fabrication of superconducting quantum circuits, starting from its building blocks： Al/AlOx/Al Josephson junctions. By using electron beam lithography patterning and shadow evaporation, we have fabricated aluminum Josephson junctions with a controllable critical current density （jc） and wide range of junction sizes from 0.01 μm2 up to 1 μm2. We have carried out systematical studies on the oxidation process in fabricating Al/AlOx/Al Josephson junctions suitable for superconducting flux qubits. Furthermore, we have also fabricated superconducting quantum circuits such as superconducting flux qubits and charge-flux qubits.展开更多
Nb/Al-AlOx/Nb tunnel junctions are often used in the studies of macroscopic quantum phenomena and superconducting qubit applications of the Josephson devices. In this work, we describe a convenient and reliable proces...Nb/Al-AlOx/Nb tunnel junctions are often used in the studies of macroscopic quantum phenomena and superconducting qubit applications of the Josephson devices. In this work, we describe a convenient and reliable process using electron beam lithography for the fabrication of high-quality, submicron-sized Nb/Al-AlOx/Nb Josephson junctions. The technique follows the well-known selective Nb etching process and produces high-quality junctions with Vm=100 mV at 2.3 K for the typical critical current density of 2.2 kA/cm^2, which can be adjusted by controlling the oxygen pressure and oxidation time during the formation of the tunnelling barrier. We present the results of the temperature dependence of the sub-gap current and in-plane magnetic-field dependence of the critical current, and compare them with the theoretical predictions.展开更多
We report a fabrication process and characterization of the Josephson parametric amplifier(JPA) for the single-shot quantum state measurement of superconducting multiqubit system. The device is prepared using Nb film ...We report a fabrication process and characterization of the Josephson parametric amplifier(JPA) for the single-shot quantum state measurement of superconducting multiqubit system. The device is prepared using Nb film as its base layer,which is convenient in the sample patterning process like e-beam lithography and film etching. Our results show that the JPA has a bandwidth up to 600 MHz with gain above 15 dB and noise temperature approaching the quantum limit. The qubit state differentiation measurements demonstrate the signal-to-noise ratio around 3 and the readout fidelity above 97%and 91% for the ground and first-excited states, respectively.展开更多
The superconductive Josephson junction is the key device for superconducting quantum computation. We have fabricated Al/Al2O3/Al tunnel junctions using a double angle evaporation method based on a suspended shadow mas...The superconductive Josephson junction is the key device for superconducting quantum computation. We have fabricated Al/Al2O3/Al tunnel junctions using a double angle evaporation method based on a suspended shadow mask. The Al2O3 junction barrier has been formed by introducing pure oxygen into the chamber during the fabrication process. We have adjusted exposure conditions by changing either the oxygen pressure or the oxidizing time during the formation of tunnel barriers to control the critical current density Jc and the junction specific resistance Rc. Measurements of the leakage in Al/Al2O3/Al tunnel junctions show that the devices are suitable for qubit applications.展开更多
One of the primary origins of the energy relaxation in superconducting qubits is the quasiparticle loss. The quasiparticles can be excited remarkably by infrared radiation. In order to minimize the density of quasipar...One of the primary origins of the energy relaxation in superconducting qubits is the quasiparticle loss. The quasiparticles can be excited remarkably by infrared radiation. In order to minimize the density of quasiparticle and increase the qubit relaxation time, we design and fabricate the infrared filter and shield for superconducting qubits. In comparison with previous filters and shields, a nonmagnetic dielectric is used as the infrared absorbing material, greatly suppressing the background magnetic fluctuations. The filters can be made to impedance-match with other microwave devices. Using the as-fabricated infrared filter and shield, we increased the relaxation time of a transmon qubit from 519 ns to 1125 ns.展开更多
Superconducting quantum bits （qubits） and circuits are the leading candidate for the implementation of solid-state quantum computation. They have also been widely used in a variety of studies of quantum physics, ato...Superconducting quantum bits （qubits） and circuits are the leading candidate for the implementation of solid-state quantum computation. They have also been widely used in a variety of studies of quantum physics, atomic physics, quantum optics, and quantum simulation. In this article, we will present an overview of the basic principles of the superconducting qubits, including the phase, flux, charge, and transmon （Xmon） qubits, and the progress achieved so far concerning the improvements of the device design and quantum coherence property. Experimental studies in various research fields using the superconducting qubits and circuits will be briefly reviewed.展开更多
基金supported by the Science Foundation of the Ministry of Science and Technology of China (Grant Nos. 2011CBA00106 and 2009CB929102)the National Natural Science Foundation of China (Grant Nos. 11104333,10974243,and 11161130519)the Knowledge Innovation Program of the Chinese Academy of Sciences
文摘Besides serving as promising candidates for realizing quantum computing, superconducting quantum circuits are one of a few macroscopic physical systems in which fundamental quantum phenomena can be directly demonstrated and tested, giving rise to a vast field of intensive research work both theoretically and experimentally. In this paper we report our work on the fabrication of superconducting quantum circuits, starting from its building blocks： Al/AlOx/Al Josephson junctions. By using electron beam lithography patterning and shadow evaporation, we have fabricated aluminum Josephson junctions with a controllable critical current density （jc） and wide range of junction sizes from 0.01 μm2 up to 1 μm2. We have carried out systematical studies on the oxidation process in fabricating Al/AlOx/Al Josephson junctions suitable for superconducting flux qubits. Furthermore, we have also fabricated superconducting quantum circuits such as superconducting flux qubits and charge-flux qubits.
基金Project supported by the National Natural Science Foundation of China (Grant Nos 10474129 and 10534060)the Ministry of Science and Technology of China (Grant Nos 2006CB601007 and 2006CB921107)
文摘Nb/Al-AlOx/Nb tunnel junctions are often used in the studies of macroscopic quantum phenomena and superconducting qubit applications of the Josephson devices. In this work, we describe a convenient and reliable process using electron beam lithography for the fabrication of high-quality, submicron-sized Nb/Al-AlOx/Nb Josephson junctions. The technique follows the well-known selective Nb etching process and produces high-quality junctions with Vm=100 mV at 2.3 K for the typical critical current density of 2.2 kA/cm^2, which can be adjusted by controlling the oxygen pressure and oxidation time during the formation of the tunnelling barrier. We present the results of the temperature dependence of the sub-gap current and in-plane magnetic-field dependence of the critical current, and compare them with the theoretical predictions.
基金Project supported by the Science Funds from the Ministry of Science and Technology of China(Grant Nos.2015CB921104 and 2016YFA0300601)the National Natural Science Foundation of China(Grant Nos.11674380 and 11874063)+1 种基金the Strategic Priority Research Program of the Chinese Academy of Sciences(Grant Nos.XDB07010300 and XDB28000000)the Key Research and Development Program of Guangdong Province,China(Grant No.2018B030326001)
文摘We report a fabrication process and characterization of the Josephson parametric amplifier(JPA) for the single-shot quantum state measurement of superconducting multiqubit system. The device is prepared using Nb film as its base layer,which is convenient in the sample patterning process like e-beam lithography and film etching. Our results show that the JPA has a bandwidth up to 600 MHz with gain above 15 dB and noise temperature approaching the quantum limit. The qubit state differentiation measurements demonstrate the signal-to-noise ratio around 3 and the readout fidelity above 97%and 91% for the ground and first-excited states, respectively.
文摘The superconductive Josephson junction is the key device for superconducting quantum computation. We have fabricated Al/Al2O3/Al tunnel junctions using a double angle evaporation method based on a suspended shadow mask. The Al2O3 junction barrier has been formed by introducing pure oxygen into the chamber during the fabrication process. We have adjusted exposure conditions by changing either the oxygen pressure or the oxidizing time during the formation of tunnel barriers to control the critical current density Jc and the junction specific resistance Rc. Measurements of the leakage in Al/Al2O3/Al tunnel junctions show that the devices are suitable for qubit applications.
基金Natural Science Foundation of China(60678022,10704001,10674001)Doctoral Fund of Ministry of Education of China(20060357008)+1 种基金Anhui Provincial Natural Science Foundation(070412060)Key Program of the Education Department of Anhui Province(KJ2008A28ZC,KJ2007B082,KJ2008B265)
基金Project supported by the National Natural Science Foundation of China(Grant Nos.91321310,11274156,11474152,11474153,61521001,and 11504165)the State Key Program for Basic Research of China(Grant Nos.2011CB922104 and 2011CBA00205)
文摘One of the primary origins of the energy relaxation in superconducting qubits is the quasiparticle loss. The quasiparticles can be excited remarkably by infrared radiation. In order to minimize the density of quasiparticle and increase the qubit relaxation time, we design and fabricate the infrared filter and shield for superconducting qubits. In comparison with previous filters and shields, a nonmagnetic dielectric is used as the infrared absorbing material, greatly suppressing the background magnetic fluctuations. The filters can be made to impedance-match with other microwave devices. Using the as-fabricated infrared filter and shield, we increased the relaxation time of a transmon qubit from 519 ns to 1125 ns.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.91321208 and 11674380)the National Key Basic Research Program of the Ministry of Science and Technology of China(Grant Nos.2014CB921202,2015CB921104,and 2016YFA0300601)
文摘Superconducting quantum bits （qubits） and circuits are the leading candidate for the implementation of solid-state quantum computation. They have also been widely used in a variety of studies of quantum physics, atomic physics, quantum optics, and quantum simulation. In this article, we will present an overview of the basic principles of the superconducting qubits, including the phase, flux, charge, and transmon （Xmon） qubits, and the progress achieved so far concerning the improvements of the device design and quantum coherence property. Experimental studies in various research fields using the superconducting qubits and circuits will be briefly reviewed.
