In this paper, different steps of work and experiments that are done in order to implant nitrogen ion in silicon with the energy of 25 keV, density of 24 μA/cm2 and doses of 5 × 1013 atom/cm2, 1?× 1014 atom...In this paper, different steps of work and experiments that are done in order to implant nitrogen ion in silicon with the energy of 25 keV, density of 24 μA/cm2 and doses of 5 × 1013 atom/cm2, 1?× 1014 atom/cm2 and 1?× 1015 atom/ cm2 (according to the calculation and applying time at planting) at room temperature (in the lack of heat phase) and without annealing will be presented. The XRD analysis is done before and after planting to observe changes in the lattice and the possibility of forming a crystalline phase of silicon nitride in this case. Also, the study of changes in the lattice arrangement and AFM analysis is done to observe the topography of the surface. Besides, the investigation on surface roughness and changes caused by ion implantation on the surface and spectrophotometry analysis before and after planting due to the study of changes in optical properties are done.展开更多
试验以正己烷为萃取剂,采用紫外分光光度法对磷泥中的黄磷进行了测定,探讨了萃取时间、萃取剂用量及磷泥取样方法等因素对磷含量测定结果的影响.结果表明:采用20 m L正己烷、振摇10 min萃取2 g磷泥,一次萃取率可达到99%;在泥饼平面上,...试验以正己烷为萃取剂,采用紫外分光光度法对磷泥中的黄磷进行了测定,探讨了萃取时间、萃取剂用量及磷泥取样方法等因素对磷含量测定结果的影响.结果表明:采用20 m L正己烷、振摇10 min萃取2 g磷泥,一次萃取率可达到99%;在泥饼平面上,磷含量最大值15.7%,最小值9.7%;在深度上,磷含量最大值15.7%,最小值10.2%;采取棋盘式全层取样可很好地解决黄磷在泥饼中二维空间上分布不均匀的问题,测定结果的相对标准偏差(RSD)为2.1%.采用"正己烷萃取+紫外分光光度法"测定磷泥中的黄磷含量方法操作简便、重现性好.展开更多
文摘In this paper, different steps of work and experiments that are done in order to implant nitrogen ion in silicon with the energy of 25 keV, density of 24 μA/cm2 and doses of 5 × 1013 atom/cm2, 1?× 1014 atom/cm2 and 1?× 1015 atom/ cm2 (according to the calculation and applying time at planting) at room temperature (in the lack of heat phase) and without annealing will be presented. The XRD analysis is done before and after planting to observe changes in the lattice and the possibility of forming a crystalline phase of silicon nitride in this case. Also, the study of changes in the lattice arrangement and AFM analysis is done to observe the topography of the surface. Besides, the investigation on surface roughness and changes caused by ion implantation on the surface and spectrophotometry analysis before and after planting due to the study of changes in optical properties are done.
文摘试验以正己烷为萃取剂,采用紫外分光光度法对磷泥中的黄磷进行了测定,探讨了萃取时间、萃取剂用量及磷泥取样方法等因素对磷含量测定结果的影响.结果表明:采用20 m L正己烷、振摇10 min萃取2 g磷泥,一次萃取率可达到99%;在泥饼平面上,磷含量最大值15.7%,最小值9.7%;在深度上,磷含量最大值15.7%,最小值10.2%;采取棋盘式全层取样可很好地解决黄磷在泥饼中二维空间上分布不均匀的问题,测定结果的相对标准偏差(RSD)为2.1%.采用"正己烷萃取+紫外分光光度法"测定磷泥中的黄磷含量方法操作简便、重现性好.