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大气压射频微等离子体放电结构演化的粒子模拟 被引量:6
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作者 张远涛 刘冰 葛蕾 《高电压技术》 EI CAS CSCD 北大核心 2014年第10期2997-3005,共9页
大气压射频微等离子体放电具有较大的潜在应用价值,但实验研究较困难。为此借助于粒子模拟的方法,在给定的放电间隙下,研究了电流密度及二次电子发射系数(SEEC)对射频微等离子体的放电结构的影响。模拟结果表明,随着输入电流密度的增大... 大气压射频微等离子体放电具有较大的潜在应用价值,但实验研究较困难。为此借助于粒子模拟的方法,在给定的放电间隙下,研究了电流密度及二次电子发射系数(SEEC)对射频微等离子体的放电结构的影响。模拟结果表明,随着输入电流密度的增大,放电空间逐渐由鞘层主导的结构转变为辉光放电结构,电子密度也会随之增大,鞘层电场逐渐增强,同时电子能量概率函数(EEPF)曲线会随之整体向上偏移;而在给定的电流密度下,随着SEEC的增大,放电结构也会逐渐由鞘层主导的结构转变为辉光放电的结构,电子密度会随之增大,同时鞘层电场会逐渐变小,高能电子(>20 eV)比例也随之减小。最后分析了在大间隙下出现鞘层主导结构的可能性。 展开更多
关键词 大气压气体放电 射频微等离子体 放电结构 粒子模拟 二次电子 电子能量概率函数
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大气压下氦/氮射频放电冷等离子体特性 被引量:3
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作者 王华博 孙文廷 +1 位作者 李和平 包成玉 《清华大学学报(自然科学版)》 EI CAS CSCD 北大核心 2007年第3期389-392,共4页
大气压射频辉光放电冷等离子体由于摆脱了真空腔的限制,在生物医学、电子工业、国防等领域有非常广阔的应用前景。为了拓展等离子体形成气体的种类,降低该技术的应用成本,对大气压下纯氮射频放电进行了研究。实验中采用13.56MHz射频电... 大气压射频辉光放电冷等离子体由于摆脱了真空腔的限制,在生物医学、电子工业、国防等领域有非常广阔的应用前景。为了拓展等离子体形成气体的种类,降低该技术的应用成本,对大气压下纯氮射频放电进行了研究。实验中采用13.56MHz射频电源和裸露的平板电极在大气压下实现了纯氮射频辉光放电,并比较了纯氦、纯氮和氦-氮混合气体条件下的放电特性。实验结果表明,大气压条件下,纯氦辉光放电具有两个稳定的放电模式(α模式和γ模式),而纯氮目前则只能稳定地工作在γ放电模式。 展开更多
关键词 等离子体物理 大气压辉光放电 射频 放电模式
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Numerical study on characteristics of radio-frequency discharge at atmospheric pressure in argon with small admixtures of oxygen 被引量:2
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作者 Yinan WANG Yue LIU 《Plasma Science and Technology》 SCIE EI CAS CSCD 2017年第7期50-56,共7页
In this paper, a 1D fluid model is developed to study the characteristics of a discharge in argon with small admixtures of oxygen at atmospheric pressure. This model consists of a series of equations, including contin... In this paper, a 1D fluid model is developed to study the characteristics of a discharge in argon with small admixtures of oxygen at atmospheric pressure. This model consists of a series of equations, including continuity equations for electrons, positive ions, negative ions and neutral particles, the energy equation, and the Poisson equation for electric potential. Special attention has been paid to the electron energy dissipation and the mechanisms of electron heating, while the admixture of oxygen is in the range of 0.1%-0.6%. It is found that when the oxygen-to-argon ratio grows, the discharge is obviously divided into three stages: electron growth, electron reduction and the electron remaining unchanged. Furthermore, the cycle-averaged electric field, electron temperature, electron Ohmic heating, electron collisionless heating, electron energy dissipation and the net electron production are also studied in detail, and when the oxygen-to- argon ratio is relatively larger (R = 0.6%), double value peaks of electron Ohmic heating appear in the sheath. According to the results of the numerical simulation, various oxygen-to-argon ratios result in different amounts of electron energy dissipation and electron heating. 展开更多
关键词 radio-frequency discharge numerical simulation small admixtures of oxygen
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射频辉光放电CH_4等离子体一维流体动力学模拟 被引量:3
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作者 吕少波 蔺增 +1 位作者 巴德纯 王庆 《计算物理》 EI CSCD 北大核心 2011年第3期329-340,共12页
完整建立一个关于射频辉光放电CH4等离子体的流体动力学模型.模型包括基于迁移-扩散近似的粒子平衡方程、电子能量平衡方程,共包含了20种粒子(环境气体粒子,激发态粒子,离子和电子)和49类化学反应(电子-中性环境粒子、离子-中性环境粒... 完整建立一个关于射频辉光放电CH4等离子体的流体动力学模型.模型包括基于迁移-扩散近似的粒子平衡方程、电子能量平衡方程,共包含了20种粒子(环境气体粒子,激发态粒子,离子和电子)和49类化学反应(电子-中性环境粒子、离子-中性环境粒子、激发态粒子-激发态粒子(中性环境粒子)).结果表明,在强电场区域有较高的电子反应率系数;等离子体中除源气体CH4外,H2,C2H6,C3H8,C2H4和C2H2也有较高的密度含量;激发态粒子中,CH3含量最高,密度约为1019m-3;在较低放电压力时(如18 Pa),CH5+在离子成分中密度含量最高,当放电压力较高时(如67Pa),C2H5+在离子成分中占主导地位;除C2H5+外,其它各离子和激发态粒子在极板上的粒子流量随功率的增大逐渐升高. 展开更多
关键词 甲烷等离子体 射频辉光放电 流体动力学模型 玻尔兹曼方程
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低气压射频空心阴极放电氩等离子体发射光谱分析 被引量:2
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作者 许建平 巩春志 田修波 《真空科学与技术学报》 EI CAS CSCD 北大核心 2013年第10期980-984,共5页
利用射频空心阴极作为放电结构,测试了放电结构在低气压下的发射光谱,并计算了电子温度,分析了不同放电条件对光谱强度及电子温度的影响。研究发现,随着气体流量的增加,氩原子谱线强度和等离子体电子温度呈现出先增加后降低的变化规律,... 利用射频空心阴极作为放电结构,测试了放电结构在低气压下的发射光谱,并计算了电子温度,分析了不同放电条件对光谱强度及电子温度的影响。研究发现,随着气体流量的增加,氩原子谱线强度和等离子体电子温度呈现出先增加后降低的变化规律,这是由于频繁的碰撞造成的。光谱强度随着射频功率的增加而升高。气体流量低于20 mL/min(标准状态)时,随着射频空心阴极放电气压的增加,电子温度呈现先增加后降低的变化趋势;当气体流量高于30 mL/min时,电子温度不随着放电气压的变化而变化。低气体流量下的电子温度大于高气体流量下的电子温度。 展开更多
关键词 射频放电 发射光谱 空心阴极 电子温度
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大气压射频均匀辉光放电的条件 被引量:2
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作者 李森 陈辰 《真空科学与技术学报》 EI CAS CSCD 北大核心 2015年第2期220-224,共5页
大气压放电应用在很多领域时,其放电的均匀性显得十分重要。本文通过实验得出影响大气压射频放电的均匀性的条件。实验中研究的影响因素有介质阻挡、放电电压、放电气体组成以及放电间隙。实验采用单反照相机以及ICCD照相机对放电进行拍... 大气压放电应用在很多领域时,其放电的均匀性显得十分重要。本文通过实验得出影响大气压射频放电的均匀性的条件。实验中研究的影响因素有介质阻挡、放电电压、放电气体组成以及放电间隙。实验采用单反照相机以及ICCD照相机对放电进行拍照,观察不同参数放电下的放电模式。通过放电现象发现对维持大面积均匀辉光放电影响最大的因素是采用介质阻挡和放电气体的组成,影响较小的是放电电压。放电间隙在可维持放电的间隙范围内对放电模式影响很小。实验得出,改变这些条件会使均匀辉光放电中出现放电丝,或完全转变为丝状放电甚至熄灭。 展开更多
关键词 射频 大气压 辉光放电 介质阻挡
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Effect of Duty Cycle on the Characteristics of Pulse-Modulhted Radio-Frequency Atmospheric Pressure Dielectric Barrier Discharge
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作者 LI Xuechun WANG Huan DING Zhenfeng WANG Younian 《Plasma Science and Technology》 SCIE EI CAS CSCD 2012年第12期1069-1072,共4页
Using a one-dimensional fluid model, the pulse-modulated radio-frequency dielectric barrier discharge in atmospheric helium is described. The influences of the pulse duty cycle on the discharge characteristics are stu... Using a one-dimensional fluid model, the pulse-modulated radio-frequency dielectric barrier discharge in atmospheric helium is described. The influences of the pulse duty cycle on the discharge characteristics are studied. The numerical results show that the dependence of discharge characteristics on the duty cycle is sensitive in the region of around 40% duty cycle under the given simulation parameters. In the case of a larger duty cycle, the plasma density is higher, the discharge becomes more intense, but the power consumption is higher. When the duty cycle is lower, one can get a weaker discharge, lower plasma density and higher electron temperature in the bulk plasma. In practical applications, in order to get a higher plasma density and a lower power consumption, it is more important to choose a suitable duty cycle to modulate the RF power supply. 展开更多
关键词 pulse-modulation simulation radio-frequency atmospheric pressure dielectric barrier discharge
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激光诱导荧光方法对SiH_4N_2混合气体放电等离子体的研究 被引量:1
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作者 吴嘉达 伍长征 李富铭 《光学学报》 EI CAS CSCD 北大核心 1990年第4期317-321,共5页
用激光诱导荧光方法对SiH_4/N_2混合气体射频放电等离子体进行了研究,实验上首次检测到SiH_4分子射频放电离解过程的中间产物Si_2.
关键词 激光诱导荧光 气体放电 等离子体
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常压直流脉冲辅助射频放电起辉过程研究
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作者 赵文亮 郭颖 +3 位作者 任吉达 张杰 张菁 石建军 《东华大学学报(自然科学版)》 CAS CSCD 北大核心 2017年第1期134-138,共5页
采用组合电极结构产生常压等离子体射流,对直流(DC)脉冲辅助射频放电进行试验研究.在每个射频脉冲产生之前,引入一个微秒级DC脉冲放电,通过采集放电电流和电压曲线以及时间分辨放电图像,研究这种组合放电的电学特性及时空分布.结果表明... 采用组合电极结构产生常压等离子体射流,对直流(DC)脉冲辅助射频放电进行试验研究.在每个射频脉冲产生之前,引入一个微秒级DC脉冲放电,通过采集放电电流和电压曲线以及时间分辨放电图像,研究这种组合放电的电学特性及时空分布.结果表明,在射频放电脉冲中间引入微秒级DC脉冲放电之后,使射频放电脉冲起辉电压从3.86kV降低到1.61kV,提高了常压脉冲射频放电的稳定性,可为常压射频放电在工业上的连续化应用提供技术依据. 展开更多
关键词 常压等离子体射流 射频放电 直流脉冲放电 放电起辉
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Kinetic simulation of the transition from a pulse-modulation microwave discharge to a continuous plasma
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作者 Guan WANG Ye KUANG Yuantao ZHANG 《Plasma Science and Technology》 SCIE EI CAS CSCD 2020年第1期45-52,共8页
The generation of a very strong peak current in the first period(PCFP)in a pulse-modulated microwave discharge has been discussed in previous studies.In this paper we focus on the transition process from a pulsed disc... The generation of a very strong peak current in the first period(PCFP)in a pulse-modulated microwave discharge has been discussed in previous studies.In this paper we focus on the transition process from a pulsed discharge to a fully continuous one driven by the pulsed microwave power source by means of a kinetic model.The computational results show that by increasing the duty cycle or voltage modulation rate(VMR).the discharge eventually becomes fully continuous and PCFP can no longer he observed.In the transition process,the distributions of the electric field,electron energy probability function(EEPF)and plasma density are discussed according to the simulation data,showing different discharge structures.The simulations indicate that many high-energy electrons with electron energy larger than 20eV and low-energy electrons with electron energy less than 3eV could he generated in a pulsed microwave discharge,together with a reversal electric field formed in the anode sheath when PCFP occurs.However,only medium-energy electrons could be observed in a fully continuous discharge.Therefore,by investigating the transition process the pulse-modulated microwave discharges can be further optimized for plasma applications at atmospheric pressure. 展开更多
关键词 atmospheric plasmas pulse modulation radio-frequency discharge.PIC-MCC model
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Period Multiplication in a Continuous Time Series of Radio-Frequency DBDs at Atmospheric Pressure
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作者 Jiao Zhang Yanhui Wang Dezhen Wang 《Communications in Computational Physics》 SCIE 2012年第4期1226-1235,共10页
As a spatially extended dissipative system with strong nonlinearity,the radio-frequency(rf)dielectric-barrier discharges(DBDs)at atmospheric pressure possess complex spatiotemporal nonlinear behaviors.In this paper,th... As a spatially extended dissipative system with strong nonlinearity,the radio-frequency(rf)dielectric-barrier discharges(DBDs)at atmospheric pressure possess complex spatiotemporal nonlinear behaviors.In this paper,the time-domain nonlinear behaviors of rf DBD in atmospheric argon are studied numerically by a onedimensional fluid model.Simulation results show that,under appropriate controlling parameters,the rf DBD can undergo a transition from single-period state to chaos through period doubling bifurcation with increasing discharge time,i.e.,the regular periodic oscillation and chaos can coexist in a long time series of the atmosphericpressure rf DBD.With increasing applied voltage amplitude,the duration of the periodic oscillation reduces gradually and chaotic zone increases,and finally the whole discharge series becomes completely chaotic state.This is different from conventional period doubling route to chaos.Moreover,the spatial characteristics of rf perioddoubling discharge and chaos,as well as the parameter range of various discharge behaviors occurring are also investigated in this paper. 展开更多
关键词 Atmospheric radio-frequency discharge period-doubling bifurcation CHAOS
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Mode transition induced by gas pressure in dusty acetylene microdischarges: two-dimensional simulation
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作者 Xiangmei LIU Ningning ZU +1 位作者 Hongying LI Jingyao LI 《Plasma Science and Technology》 SCIE EI CAS CSCD 2020年第4期64-70,共7页
Radio-frequency microdischarge in acetylene is investigated by use of a fluid model and an aerosol dynamics model in a cylindrical discharge chamber.In this article,the results at a pressure of 100–500 Torr,a voltage... Radio-frequency microdischarge in acetylene is investigated by use of a fluid model and an aerosol dynamics model in a cylindrical discharge chamber.In this article,the results at a pressure of 100–500 Torr,a voltage of 80–150 V,and an electrode gap of 400–1000μm are carefully analyzed and discussed.It is shown that two electron heating modesαandγappear in the microdischarge,and the pressure-dependent transition fromαtoγwas accompanied by the abrupt decrease of electron density and electron temperature.The mode transition phenomenon is further confirmed by the variation of the electron temperature axial profiles,the profiles vary continuously from a center high at the pressure of 100 Torr to an edge high at the pressure of500 Torr.Furthermore,in theαmode(100 Torr)the plasma density increases linearly with the increase of electrode gap,but decreases sharply with the increase of electrode gap in theγmode(>100 Torr).The gas pressure and applied voltage effects on the nanoparticle density and degree of nonuniformity are also investigated.It has been shown that the gas pressure greatly influences the axial profiles of nanoparticle density and the values of the degree of nonuniformity,while the values of the plasma parameters(electron density and nanoparticle density)strongly depend on the applied voltage. 展开更多
关键词 radio-frequency capacitive discharge ACETYLENE MICROPLASMA NANOPARTICLE dynamics
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Experimental study of a low-pressure hybrid RF discharge
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作者 Elena KRALKINA Polina NEKLIUDOVA +2 位作者 Vladimir PAVLOV Konstantin VAVILIN Ilya ZADIRIEV and Chen ZHAO 《Plasma Science and Technology》 SCIE EI CAS CSCD 2020年第5期70-82,共13页
Experimental study of the low-pressure hybrid RF discharge with both inductive and capacitive channels was carried out. The RF power unit consists of inductor(antenna) and capacitor plates connected in parallel to the... Experimental study of the low-pressure hybrid RF discharge with both inductive and capacitive channels was carried out. The RF power unit consists of inductor(antenna) and capacitor plates connected in parallel to the same RF power source. A separating capacitor Csepis included into the circuit between the antenna ends and the lead connected to the discharge capacitor plate in order to prevent the closing of the capacitive circuit through direct current by inductor and to control the contribution of capacitive channel to discharge sustaining. It is shown that at low power of the RF power source, power coupling to the discharge mainly occurs through the capacitive channel. Increasing the power of the RF power source increases the power coupled in the inductive channel, electron density, and current flowing through the capacitive channel. This leads to increasing voltage drop on the separating capacitor and partial cutoff of the capacitive channel. At separating capacitance values below certain value(below 50 pF in the present experiments), the self-bias of the loaded plate of the discharge capacitor becomes positive indicating that the thickness of the electrode sheath of the loaded electrode decreases compared to thickness of the sheath of the grounded electrode. The thickness of the space-charge sheath of the grounded electrode decreases with increasing power coupled to the plasma. At separating capacitance below 50 pF, higher harmonics of the RF voltage and current are actively generated in the capacitive discharge channel. Increasing the separating capacitance leads to decreasing electron density, increasing effective electron temperature and more effective RF energy coupling to plasma due to increasing relative importance of the capacitive discharge channel. 展开更多
关键词 radio-frequency discharge PLASMA E-mode H-MODE
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Power absorption,plasma parameters and wave structure in inductive RF plasma source with low value external magnetic field
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作者 Elena KRALKINA Konstantin VAVILIN +1 位作者 Ilya ZADIRIEV Alexander NIKONOV 《Plasma Science and Technology》 SCIE EI CAS CSCD 2020年第11期60-73,共14页
The efficiency of radio-frequency(RF)power absorption,RF magnetic field structure and plasma parameters were measured in cylindrical inductive RF plasma sources 20 cm in diameter and 22,32,53 cm in length with a low v... The efficiency of radio-frequency(RF)power absorption,RF magnetic field structure and plasma parameters were measured in cylindrical inductive RF plasma sources 20 cm in diameter and 22,32,53 cm in length with a low value external magnetic field.The experiments were carried out in argon at pressures of 13-140 m Pa.The RF power supply changed from 200 W to 800 W.The spiral antenna was used for sustaining the discharge.It was shown that efficiency of RF power absorption depended nonlinearly on the external magnetic field values.At maximal values of the RF power absorption efficiency,the axial distributions of longitudinal Bzand azimuthal Bφcomponents of RF magnetic field manifested the formation of the partially standing wave with a half wavelength close to 8 cm.At the same conditions,the axial dependence of the radial RF magnetic field component Brdiffered drastically.It was concluded that the Bz and Bφamplitudes were largely determined by the RF field of Trivelpiece-Gould wave,while Br amplitude represented the radial RF field of the helicon wave. 展开更多
关键词 radio-frequency PLASMA helicon Trivelpiece-Gould waves inductive discharge
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大气压射频辉光放电阻抗特性的实验研究 被引量:12
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作者 金锋 焉迪 +3 位作者 王志斌 李和平 葛楠 包成玉 《高电压技术》 EI CAS CSCD 北大核心 2013年第7期1596-1601,共6页
为研究大气压射频辉光放电过程中不同工作气体(氦气和氩气)对发生器等效阻抗的影响,基于等离子体的介电特性,建立了描述等离子体区域的"电阻-电容混联"等效电路模型;通过实验测量放电电压及电流,并基于等效电路模型来计算等... 为研究大气压射频辉光放电过程中不同工作气体(氦气和氩气)对发生器等效阻抗的影响,基于等离子体的介电特性,建立了描述等离子体区域的"电阻-电容混联"等效电路模型;通过实验测量放电电压及电流,并基于等效电路模型来计算等离子体在放电过程中的电子数密度,从而得到等离子体发生器的等效阻抗。实验测量了大气压射频辉光放电的放电电压及电流,并基于等效电路模型得到了等离子体发生器的等效阻抗及放电区的电子数密度。实验结果表明:对氦气和氩气放电,在α放电模式下其电阻及电抗的绝对值均随着放电电流的增加而减小,而电子数密度则随放电电流的增大而线性增加;且在相同的放电电流条件下,氩等离子体的电阻和电容都比氦等离子体高。研究结论可作为等离子体在不同工作气体条件下放电阻抗匹配研究的参考。 展开更多
关键词 大气压等离子体 射频辉光放电 等效阻抗 电路模型 电子数密度 阻抗匹配
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容性耦合等离子体腔室放电特性仿真研究 被引量:11
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作者 杨旺 刘学平 +2 位作者 夏焕雄 向东 牟鹏 《真空科学与技术学报》 EI CAS CSCD 北大核心 2015年第6期639-645,共7页
容性耦合等离子体射频放电广泛应用于IC制造中的薄膜沉积、刻蚀工艺中,等离子体中的电子密度和平均电子温度直接影响离化及激发反应速率,其在放电腔室中径向分布的均匀性严重影响刻蚀和薄膜沉积的均匀性。以某12寸腔体为研究对象,采用Co... 容性耦合等离子体射频放电广泛应用于IC制造中的薄膜沉积、刻蚀工艺中,等离子体中的电子密度和平均电子温度直接影响离化及激发反应速率,其在放电腔室中径向分布的均匀性严重影响刻蚀和薄膜沉积的均匀性。以某12寸腔体为研究对象,采用Comsol软件仿真研究了功率电极电压、腔室气压和极板间距对等离子体的电子密度和平均电子温度的影响规律。仿真研究发现:在研究的气压、电压、极板间距范围内,电子密度和平均电子温度随电压的增加而增加,其均匀性随电压的增加而变差;电子密度随气压的增加而增加,平均电子温度随气压的增加而降低,电子密度的均匀性随气压的增加而改善,电子温度的均匀性随气压的增加先变差再变好;电子密度随极板间距的增加而增加,平均电子温度随极板的增加而降低,电子密度和平均电子温度的均匀性随极板间距的增加而变好。研究结果对指导等离子体参与的IC工艺腔室结构设计及工艺控制具有重要意义。 展开更多
关键词 容性耦合等离子体 放电参数 氩气放电 射频放电特性
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基于均匀模型的低气压电容耦合射频放电特性研究 被引量:7
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作者 王宇天 张百灵 +3 位作者 李益文 樊昊 高岭 庄重 《真空科学与技术学报》 EI CAS CSCD 北大核心 2016年第7期773-778,共6页
针对磁流体流动控制技术对大体积、均匀放电等离子体的需要,开展了低气压下平板型电容耦合放电特性实验研究,并基于均匀射频放电模型,联立能量平衡方程建立诊断模型对等离子体参数进行诊断。结果表明:气压较低时,放电为α模式,整个放电... 针对磁流体流动控制技术对大体积、均匀放电等离子体的需要,开展了低气压下平板型电容耦合放电特性实验研究,并基于均匀射频放电模型,联立能量平衡方程建立诊断模型对等离子体参数进行诊断。结果表明:气压较低时,放电为α模式,整个放电空间发光较为均匀,当气压大于500 Pa时,放电转变为γ模式,在电极附近出现负辉光区,但负辉光区较厚占据了整个放电空间,随着气压增大,负辉光区、法拉第暗区厚度减小,并在放电区域中心出现明显正柱区,正柱区面积随负载功率的增大而增大;放电为γ模式时,电流将随负载功率增大而增大,而电压先不变后增大,并且转折点负载功率随着气压增大而增大;电子数密度ne随负载功率的增大线性增大,而电子温度T_e只是略有增大,约为5500 K(0.47 e V)。 展开更多
关键词 电容耦合射频放电 等离子体诊断 均匀模型 电子数密度 电子温度
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脉冲放电射流辅助射频辉光放电研究 被引量:4
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作者 韩乾翰 郭颖 +2 位作者 申亚军 王晓东 石建军 《强激光与粒子束》 EI CAS CSCD 北大核心 2017年第6期32-35,共4页
通过实验研究了脉冲放电射流辅助下大气压氦气射频辉光放电的电学和光学特性。采用组合电极结构,在射频放电前段增加脉冲电极,脉冲放电产生的射流以等离子体子弹形式注入射频放电区域,主要研究脉冲射流辅助射频放电的电流电压曲线、最... 通过实验研究了脉冲放电射流辅助下大气压氦气射频辉光放电的电学和光学特性。采用组合电极结构,在射频放电前段增加脉冲电极,脉冲放电产生的射流以等离子体子弹形式注入射频放电区域,主要研究脉冲射流辅助射频放电的电流电压曲线、最低放电维持电压、放电强度和空间结构时空分布。研究结果表明:等离子体子弹经过射频放电区域后,由于等离子体子弹引入的活性粒子,会使射频放电区域等离子体强度增强;而射频放电最低维持电压也从0.93kV降低至0.43kV。 展开更多
关键词 射频辉光放电 等离子体射流 放电维持电压 辅助放电
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基于射频放电一维模型的等离子体诊断 被引量:5
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作者 张百灵 樊昊 +3 位作者 李益文 阳鹏宇 高岭 王宇天 《高电压技术》 EI CAS CSCD 北大核心 2015年第12期3994-3999,共6页
为深入研究磁流体效应机理,采用阻抗测量的方法,通过对放电波形的处理,得到放电电压幅值、电流幅值及相位角,依据射频放电一维模型建立等效放电电路,对等离子体参数进行诊断。研究表明,采用半峰值法能够精确读取电压电流幅值及相位角;... 为深入研究磁流体效应机理,采用阻抗测量的方法,通过对放电波形的处理,得到放电电压幅值、电流幅值及相位角,依据射频放电一维模型建立等效放电电路,对等离子体参数进行诊断。研究表明,采用半峰值法能够精确读取电压电流幅值及相位角;同轴电缆的容性作用对射频放电电路结构有很大影响;在压力P=1 500 Pa,放电频率f=6.2 MHz的静止条件下,电容耦合射频放电等离子体的电导率约为4×10-3 S/m,电子数密度在1016 m-3量级,电导率随着负载功率增大而增大,随磁感应强度变化呈"V"形变化,在磁感应强度较小时,电导率随磁感应强度增加减小,磁感应强度较大时,随磁感应强度增大而增大;电子数密度随着负载功率和磁感应强度增加而增大。 展开更多
关键词 等离子体诊断 一维模型 电容耦合射频放电 电导率 电子数密度 磁流体
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Applications of cold atmospheric plasmas(CAPs)in agriculture:a brief review and the novel development of a radio-frequency CAP jet generator for plant mutation 被引量:2
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作者 Heping LI Jing LI +8 位作者 Xiting ZHAO Liyan WANG Chuan FANG Nan SU Chong ZHANG Yan XU Meng LV Mingjun LI Xinhui XING 《Plasma Science and Technology》 SCIE EI CAS CSCD 2022年第9期1-14,共14页
Cold atmospheric plasmas(CAPs)have shown great applicability in agriculture.Many kinds of CAP sources have been studied in agricultural applications to promote plant growth and cure plant diseases.We briefly review th... Cold atmospheric plasmas(CAPs)have shown great applicability in agriculture.Many kinds of CAP sources have been studied in agricultural applications to promote plant growth and cure plant diseases.We briefly review the state-of-the-art stimulating effects of atmospheric-pressure dielectricbarrier-discharge(AP-DBD)plasmas,after the direct or indirect treatment of plants for growth promotion and disease control.We then discuss the special demands on the characteristics of the CAP sources for their applications in plant mutation breeding.An atmospheric and room temperature plasma(ARTP)jet generator with a large plasma irradiation area,a high enough concentration of chemically reactive species and a low gas temperature is designed for direct plant mutagenesis.Experimental measurements of the electrical,thermal and optical features of the ARTP generator are conducted.Then,an ARTP-P(ARTP for plant mutagenesis)mutation breeding machine is developed,and a typical case of plant mutation breeding by the ARTP-P mutation machine is presented using Coreopsis tinctoria Nutt.seeds.Physical and agricultural experiments show that the newly-developed ARTP-P mutation breeding machine with a large irradiation area can generate uniform CAP jets with high concentrations of chemically reactive species and mild gas temperatures,and have signiflcant mutagenesis effects on the Coreopsis tinctoria Nutt.seeds.The ARTP-P mutation breeding machine may provide a platform for systematic studies on mutation mechanisms and results for various plant seeds under different operating conditions in future research. 展开更多
关键词 cold atmospheric plasma radio-frequency glow discharge MUTATION plant breeding ARTP agricultural application
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