In conventional pulsed laser deposition （PLD） technique, plume deflection and composition distribution change with the laser incident direction and pulse energy, then causing uneven film thickness and composition di...In conventional pulsed laser deposition （PLD） technique, plume deflection and composition distribution change with the laser incident direction and pulse energy, then causing uneven film thickness and composition distribution for a multicomponent film and eventually leading to low device quality and low rate of final products. We present a novel method based on PLD for depositing large CIGS films with uni- form thickness and stoichiometry. By oscillating a mirror placed coaxially with the incident laser beam, the laser＇s focus is scanned across the rotating target surface. This arrangement maintains a constant re- flectance and optical distance, ensuring that a consistent energy density is delivered to the target surface by each laser pulse. Scanning the laser spot across the target suppresses the formation of micro-columns, and thus the plume deflection effect that reduces film uniformity in conventional PLD technique is eliminated. This coaxial scanning PLD method is used to deposit a CIGS film, 500 nm thick, with thickness uniformity exceeding ±3% within a 5 cm diameter, and exhibiting a highly homogeneous elemental distribution.展开更多
To increase the biocompatibility of hydroxyapatite (HA), Ca10(PO4)6(OH)2, the Sr substitution of Ca into the HA structure was effected to yield Ca10-xSrx(PO4)6(OH)2(Sr-HA). For medical and dental applications, it is i...To increase the biocompatibility of hydroxyapatite (HA), Ca10(PO4)6(OH)2, the Sr substitution of Ca into the HA structure was effected to yield Ca10-xSrx(PO4)6(OH)2(Sr-HA). For medical and dental applications, it is important that Sr-HA is prepared as a thin film so that the Sr fully substitutes the Ca sites in the HA structure and does not form segregated impurities consisting of Sr compounds. If the segregated Sr forms different amounts of different impurities, the dissolution of the Sr into the living body will not be reproducible across different samples. To confirm the Sr substitution into the Ca site in the HA structure, the systematic variation in the lattice constants of the Sr-HA with Sr content was evaluated as the first step. The a- and c-axis lengths were found to exhibit a linear relationship with the Sr content for six samples with different Sr contents, indicating that the prepared Sr-HA thin films likely possessed partial Sr substitution into the Ca sites of the HA structure. This result is an important first step in the accurate evaluation of the biological effects of Sr-HA thin films.展开更多
基金supported by the Shenzhen Basic Research Project of Science and Technology under Grant No.JCYJ20120613112423982
文摘In conventional pulsed laser deposition （PLD） technique, plume deflection and composition distribution change with the laser incident direction and pulse energy, then causing uneven film thickness and composition distribution for a multicomponent film and eventually leading to low device quality and low rate of final products. We present a novel method based on PLD for depositing large CIGS films with uni- form thickness and stoichiometry. By oscillating a mirror placed coaxially with the incident laser beam, the laser＇s focus is scanned across the rotating target surface. This arrangement maintains a constant re- flectance and optical distance, ensuring that a consistent energy density is delivered to the target surface by each laser pulse. Scanning the laser spot across the target suppresses the formation of micro-columns, and thus the plume deflection effect that reduces film uniformity in conventional PLD technique is eliminated. This coaxial scanning PLD method is used to deposit a CIGS film, 500 nm thick, with thickness uniformity exceeding ±3% within a 5 cm diameter, and exhibiting a highly homogeneous elemental distribution.
文摘To increase the biocompatibility of hydroxyapatite (HA), Ca10(PO4)6(OH)2, the Sr substitution of Ca into the HA structure was effected to yield Ca10-xSrx(PO4)6(OH)2(Sr-HA). For medical and dental applications, it is important that Sr-HA is prepared as a thin film so that the Sr fully substitutes the Ca sites in the HA structure and does not form segregated impurities consisting of Sr compounds. If the segregated Sr forms different amounts of different impurities, the dissolution of the Sr into the living body will not be reproducible across different samples. To confirm the Sr substitution into the Ca site in the HA structure, the systematic variation in the lattice constants of the Sr-HA with Sr content was evaluated as the first step. The a- and c-axis lengths were found to exhibit a linear relationship with the Sr content for six samples with different Sr contents, indicating that the prepared Sr-HA thin films likely possessed partial Sr substitution into the Ca sites of the HA structure. This result is an important first step in the accurate evaluation of the biological effects of Sr-HA thin films.
