A physical model of ke V electron scattering in multi-layer medium and a Monte Carlo simulation method proposed by the authors have been successfully applied to theoretical calculation on the emission of backscattered...A physical model of ke V electron scattering in multi-layer medium and a Monte Carlo simulation method proposed by the authors have been successfully applied to theoretical calculation on the emission of backscattered electron, X-ray quantitative analysis in multi-layer films and the energy deposition of electron beam exposure.The model is based on the 'equal number of steps and variational step length' con-cept. In the model, when an electron comes from one medium into another, the scattering number of the electron in the 'new' medium is considered as N-n,展开更多
基金Project supported by the National Natural Science Foundation of China
文摘A physical model of ke V electron scattering in multi-layer medium and a Monte Carlo simulation method proposed by the authors have been successfully applied to theoretical calculation on the emission of backscattered electron, X-ray quantitative analysis in multi-layer films and the energy deposition of electron beam exposure.The model is based on the 'equal number of steps and variational step length' con-cept. In the model, when an electron comes from one medium into another, the scattering number of the electron in the 'new' medium is considered as N-n,
