Microwave photonic sensors are promising for improving sensing resolution and speed of optical sensors.In this paper,a high-sensitivity,high-resolution temperature sensor based on microwave photonic flter(MPF)is propo...Microwave photonic sensors are promising for improving sensing resolution and speed of optical sensors.In this paper,a high-sensitivity,high-resolution temperature sensor based on microwave photonic flter(MPF)is proposed and demonstrated.A micro-ring resonator(MRR)based on silicon-on-insulator is used as the sensing probe to convert the wavelength shift caused by temperature change to microwave frequency variation via the MPF system.By analyzing the frequency shift with high-speed and high-resolution monitors,the temperature change can be detected.The MRR is designed with multi-mode ridge waveguides to reduce propagation loss and achieves an ultra-high Q factor of 1.01×10^(6).The proposed MPF has a single passband with a narrow bandwidth of 192 MHz.With clear peak-frequency shift,the sensitivity of the MPF-based temperature sensor is measured to be 10.22 GHz/℃.Due to higher sensitivity and ultra-narrow bandwidth of the MPF,the sensing resolution of the proposed temperature sensor is as high as 0.019℃.展开更多
基金supported by the National Key Research and Development Program of China(Nos.2019YFB2203200 and 2019YFB2205200)the National Natural Science Foundation of China(Grant No.U21A20454)the Young Top-notch Talent Cultivation Program of Hubei Province.
文摘Microwave photonic sensors are promising for improving sensing resolution and speed of optical sensors.In this paper,a high-sensitivity,high-resolution temperature sensor based on microwave photonic flter(MPF)is proposed and demonstrated.A micro-ring resonator(MRR)based on silicon-on-insulator is used as the sensing probe to convert the wavelength shift caused by temperature change to microwave frequency variation via the MPF system.By analyzing the frequency shift with high-speed and high-resolution monitors,the temperature change can be detected.The MRR is designed with multi-mode ridge waveguides to reduce propagation loss and achieves an ultra-high Q factor of 1.01×10^(6).The proposed MPF has a single passband with a narrow bandwidth of 192 MHz.With clear peak-frequency shift,the sensitivity of the MPF-based temperature sensor is measured to be 10.22 GHz/℃.Due to higher sensitivity and ultra-narrow bandwidth of the MPF,the sensing resolution of the proposed temperature sensor is as high as 0.019℃.
