A macro-micro dual-drive positioning system showing good potential for high acceleration and high precision positioning required in IC packaging applications is devised in this paper. The dual-drive positioning stage ...A macro-micro dual-drive positioning system showing good potential for high acceleration and high precision positioning required in IC packaging applications is devised in this paper. The dual-drive positioning stage uses a VCM (voice coil motor) driven macro positioning stage and a PZT piezo-electric driven micro positioning stage. The coupling characteristics of the system are analyzed to produce a control structure with a micro positioning stage that can dynamically compensate for the positioning error produced by the macro positioning stage. Models of the two positioning stages are described. The models cover both the mechanism and the actuator. For the macro positioning stage, friction characteristics are taken into account, and a controller with an LQG (linear-quadratic-Gaussian) control algorithm combining a feed-forward compensation algorithm is derived. A PID controller is used to control the micro positioning stage. Detailed designs are derived for the proposed approach, and the performance is validated by simulation.展开更多
基金Supported by the National Natural Science Foundation of China(Grant No.50705027)the National High Technology Research and Development Program of China("863"Program)(Grant No.2007AA04Z315)Self-Planned Task of State Key Laboratory of Robotics and System(HIT)(Grant No.SKLRS200804B)
文摘A macro-micro dual-drive positioning system showing good potential for high acceleration and high precision positioning required in IC packaging applications is devised in this paper. The dual-drive positioning stage uses a VCM (voice coil motor) driven macro positioning stage and a PZT piezo-electric driven micro positioning stage. The coupling characteristics of the system are analyzed to produce a control structure with a micro positioning stage that can dynamically compensate for the positioning error produced by the macro positioning stage. Models of the two positioning stages are described. The models cover both the mechanism and the actuator. For the macro positioning stage, friction characteristics are taken into account, and a controller with an LQG (linear-quadratic-Gaussian) control algorithm combining a feed-forward compensation algorithm is derived. A PID controller is used to control the micro positioning stage. Detailed designs are derived for the proposed approach, and the performance is validated by simulation.
