In this study, the effects of oxygen flow rate and annealing temperature on Gd_2 O_3 structures and optical properties were systematically analyzed. Gd_2 O_3 films were deposited on both quartz and ZnS substrates by m...In this study, the effects of oxygen flow rate and annealing temperature on Gd_2 O_3 structures and optical properties were systematically analyzed. Gd_2 O_3 films were deposited on both quartz and ZnS substrates by magnetron sputtering and then annealed under vacuum at 700, 800 and 900℃, Restructure and phase transformation from cubic to monoclinic occur at different temperatures depending on the oxygen flow rate. The optical band gap, which is more sensitive to the annealing temperature than oxygen flow rate changes from 5.32 to 5.65 eV. The refractive index is approximately 1.75 at 550 nm and is adjustable by the oxygen flow rate. The transmittance of the ZnS substrate with Gd_2 O_3 film exceeds 80% and reaches82% at the 7.5-9.5 μm range. When ZnS is coated on both sides, the transmittance is increased to approximately 90%. Our results indicate that Gd_2 O_3 films are promising new candidates for anti-reflective coatings in the infrared region.展开更多
基金supported by the National Science Fund for Distinguished Young Scholars(51625201)National Key Research and Development Program of China(2016YFE0201600)+3 种基金National Natural Science Foundation of China(51372053)Innovative Research Group of National Natural Science Foundation of China(11421091)International Science&Technology Cooperation Program of China(2015DFR50300)the Major State Basic Search Program(2014CB46505)
文摘In this study, the effects of oxygen flow rate and annealing temperature on Gd_2 O_3 structures and optical properties were systematically analyzed. Gd_2 O_3 films were deposited on both quartz and ZnS substrates by magnetron sputtering and then annealed under vacuum at 700, 800 and 900℃, Restructure and phase transformation from cubic to monoclinic occur at different temperatures depending on the oxygen flow rate. The optical band gap, which is more sensitive to the annealing temperature than oxygen flow rate changes from 5.32 to 5.65 eV. The refractive index is approximately 1.75 at 550 nm and is adjustable by the oxygen flow rate. The transmittance of the ZnS substrate with Gd_2 O_3 film exceeds 80% and reaches82% at the 7.5-9.5 μm range. When ZnS is coated on both sides, the transmittance is increased to approximately 90%. Our results indicate that Gd_2 O_3 films are promising new candidates for anti-reflective coatings in the infrared region.
