靶材刻蚀特性是研究磁控溅射靶材利用率、薄膜生长速度和薄膜质量的关键因素。本文用有限元分析软件ANSYS模拟了磁控溅射放电空间的磁场分布,用粒子模拟软件OOPIC Pro(object oriented particlein cell)模拟了放电过程,最后用SRIM(stopp...靶材刻蚀特性是研究磁控溅射靶材利用率、薄膜生长速度和薄膜质量的关键因素。本文用有限元分析软件ANSYS模拟了磁控溅射放电空间的磁场分布,用粒子模拟软件OOPIC Pro(object oriented particlein cell)模拟了放电过程,最后用SRIM(stopping and range of ions in matter)模拟了靶材的溅射特性,得到了靶材的刻蚀形貌和刻蚀速度,并讨论了不同工作气压和不同阴极电压对靶材刻蚀的影响。模拟结果表明:靶材刻蚀形貌与磁场分布有关,磁通密度越强,对应的靶材位置刻蚀越深;靶材的刻蚀速度随阴极电压的增大而增大,而当工作气压增大时,靶材的刻蚀速度先增大后趋向平衡,当工作气压超过一定的值时,刻蚀速度随气压的增大开始减小。模拟结果与实验观测进行了比较,二者符合较好。展开更多
The existence of narrow and brittle white etching layers(WELs)on the rail surface is often linked with the formation of rail defects such as squats and studs,which play the key roles in rail surface degradation and tr...The existence of narrow and brittle white etching layers(WELs)on the rail surface is often linked with the formation of rail defects such as squats and studs,which play the key roles in rail surface degradation and tribological performance.In the present study,a systematic investigation on stress/strain distribution and fatigue life of the WEL during wheel-rail rolling contact was conducted based on a numerical model considering the realistic wheel geometry.This is the first study considering the influence of rail materials,loading pressure,frictional condition,WEL geometry(a/b),and slip ratio(Sr)in the practical service conditions at the same time.The results revealed much higher residual stress in WEL than in rail matrix.Stress changes along the rail depth matched with the previously reported microstructure evolutions.The current work revealed that the maximum difference in contact stress between the wheel passages of rail matrix and the WEL region(noted as stress variation)rises with the increase of loading pressure,the value of a/b,and Sr;but drops with the friction coefficient(μ).In addition,a critical length–depth ratio of 5 for a/b has been found.The fatigue parameter,FP,of the WEL decreased quickly with the length–depth ratio when it was less than 5 and then increased slightly when it was larger than 5.This study also revealed that the fatigue life of the WEL was reduced for high strength head hardened(HH)rail compared with standard carbon(SC)rail.展开更多
文摘靶材刻蚀特性是研究磁控溅射靶材利用率、薄膜生长速度和薄膜质量的关键因素。本文用有限元分析软件ANSYS模拟了磁控溅射放电空间的磁场分布,用粒子模拟软件OOPIC Pro(object oriented particlein cell)模拟了放电过程,最后用SRIM(stopping and range of ions in matter)模拟了靶材的溅射特性,得到了靶材的刻蚀形貌和刻蚀速度,并讨论了不同工作气压和不同阴极电压对靶材刻蚀的影响。模拟结果表明:靶材刻蚀形貌与磁场分布有关,磁通密度越强,对应的靶材位置刻蚀越深;靶材的刻蚀速度随阴极电压的增大而增大,而当工作气压增大时,靶材的刻蚀速度先增大后趋向平衡,当工作气压超过一定的值时,刻蚀速度随气压的增大开始减小。模拟结果与实验观测进行了比较,二者符合较好。
基金Authors Qinglin LIAN,Xi WANG,and Zhiming LIU would like to acknowledge the National Key R&D Program of China(2016YFB1200501-008)for the financial support.Author Hongtao ZHU would like to acknowledge the support of Australian Research Council Training Centre for Advanced Technologies in Rail Track Infrastructure(ARC ITTC-Rail).
文摘The existence of narrow and brittle white etching layers(WELs)on the rail surface is often linked with the formation of rail defects such as squats and studs,which play the key roles in rail surface degradation and tribological performance.In the present study,a systematic investigation on stress/strain distribution and fatigue life of the WEL during wheel-rail rolling contact was conducted based on a numerical model considering the realistic wheel geometry.This is the first study considering the influence of rail materials,loading pressure,frictional condition,WEL geometry(a/b),and slip ratio(Sr)in the practical service conditions at the same time.The results revealed much higher residual stress in WEL than in rail matrix.Stress changes along the rail depth matched with the previously reported microstructure evolutions.The current work revealed that the maximum difference in contact stress between the wheel passages of rail matrix and the WEL region(noted as stress variation)rises with the increase of loading pressure,the value of a/b,and Sr;but drops with the friction coefficient(μ).In addition,a critical length–depth ratio of 5 for a/b has been found.The fatigue parameter,FP,of the WEL decreased quickly with the length–depth ratio when it was less than 5 and then increased slightly when it was larger than 5.This study also revealed that the fatigue life of the WEL was reduced for high strength head hardened(HH)rail compared with standard carbon(SC)rail.
