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Twisted Integration of Complex Oxide Magnetoelectric Heterostructures via Water‑Etching and Transfer Process
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作者 Guannan Yang Guohua Dong +4 位作者 Butong Zhang Xu Xu Yanan Zhao Zhongqiang Hu Ming Liu 《Nano-Micro Letters》 SCIE EI CAS CSCD 2024年第1期360-369,共10页
Manipulating strain mode and degree that can be applied to epitaxial complex oxide thin films have been a cornerstone of strain engineering.In recent years,lift-off and transfer technology of the epitaxial oxide thin ... Manipulating strain mode and degree that can be applied to epitaxial complex oxide thin films have been a cornerstone of strain engineering.In recent years,lift-off and transfer technology of the epitaxial oxide thin films have been developed that enabled the integration of heterostructures without the limitation of material types and crystal orientations.Moreover,twisted integration would provide a more interesting strategy in artificial magnetoelectric heterostructures.A specific twist angle between the ferroelectric and ferromagnetic oxide layers corresponds to the distinct strain regulation modes in the magnetoelectric coupling process,which could provide some insight in to the physical phenomena.In this work,the La_(0.67)Sr_(0.33)MnO_(3)(001)/0.7Pb(Mg_(1/3)Nb_(2/3))O_(3)-0.3PbTiO_(3)(011)(LSMO/PMN-PT)heterostructures with 45.and 0.twist angles were assembled via water-etching and transfer process.The transferred LSMO films exhibit a fourfold magnetic anisotropy with easy axis along LSMO<110>.A coexistence of uniaxial and fourfold magnetic anisotropy with LSMO[110]easy axis is observed for the 45°Sample by applying a 7.2 kV cm^(−1)electrical field,significantly different from a uniaxial anisotropy with LSMO[100]easy axis for the 0°Sample.The fitting of the ferromagnetic resonance field reveals that the strain coupling generated by the 45°twist angle causes different lattice distortion of LSMO,thereby enhancing both the fourfold and uniaxial anisotropy.This work confirms the twisting degrees of freedom for magnetoelectric coupling and opens opportunities for fabricating artificial magnetoelectric heterostructures. 展开更多
关键词 Magnetoelectric heterostructures Twist angle epitaxial lift-off Magnetic anisotropy Ferromagnetic resonance
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大面积、高性能柔性GaInP/GaAs/InGaAs叠层太阳电池的制备(英文) 被引量:3
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作者 张梦炎 郭振 +1 位作者 孙利杰 陈杰 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 2018年第5期518-522,共5页
柔性高效Ⅲ-Ⅴ族多结太阳电池正在被开发、应用于无人机、可穿戴设备和空间能源等领域.采用MOCVD技术在Ga As衬底上制备太阳电池外延层,之后通过低温键合和外延层剥离方法将外延层转移到柔性衬底上.通过外延层剥离设备设计和大量参数优... 柔性高效Ⅲ-Ⅴ族多结太阳电池正在被开发、应用于无人机、可穿戴设备和空间能源等领域.采用MOCVD技术在Ga As衬底上制备太阳电池外延层,之后通过低温键合和外延层剥离方法将外延层转移到柔性衬底上.通过外延层剥离设备设计和大量参数优化实验,实现了GaAs太阳电池结构从四英寸砷化镓晶圆上的有效分离,且不产生缺陷并保持原有的性能.近期,在50μm聚酰亚胺薄膜上制备的30 cm^2大面积柔性GaInP/Ga As/InGaAs三结太阳电池实现了31. 5%的转换效率(AM0光谱),其中开路电压3. 01 V,短路电流密度16. 8 mA/cm^2,填充因子0. 845.由于采用了轻质的聚酰亚胺材料,所得到的柔性太阳电池面密度仅为168. 5 g/m^2,比功率高达2 530 W/kg. 展开更多
关键词 太阳电池 柔性高效 外延层剥离 砷化镓
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Self-Assembly of Micro-Parts onto Si Substrates at Liquid-Liquid Interface 被引量:1
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作者 刘梅 张建刚 +1 位作者 吕曜 夏善红 《Chinese Physics Letters》 SCIE CAS CSCD 2006年第1期42-44,共3页
We report a new approach for the self-assembly of cuboid micro-parts onto Si substrates to construct three-dimensional microstructures. To perform assembly, the Si substrates are prepared with a deep cavity array as b... We report a new approach for the self-assembly of cuboid micro-parts onto Si substrates to construct three-dimensional microstructures. To perform assembly, the Si substrates are prepared with a deep cavity array as binding sites. An aggregate composed of hundreds of uniformly aligned micro-parts is formed at the C10F18-H2O interface. The micro-parts are arranged by passing the substrate through the aggregate of micro-parts, thus the micro-parts are left on the substrate, and then the substrate is vibrated ultrasonically in the solution, making it possible for the micro-parts to fall into the cavities on the substrate. Finally the substrate is pulled out of the solution after assembly. This technique could give a high yield of up to 70%, providing a new method for micro-assembly. 展开更多
关键词 epitaxial lift-off FABRICATION FORCES SCALE
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Transforming the cost of solar-to-electrical energy conversion: Integrating thin-film GaAs solar cells with non-tracking mini-concentrators 被引量:2
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作者 Kyusang Lee Jaesang Lee +1 位作者 Bryan A Mazor Stephen R Forrest 《Light(Science & Applications)》 SCIE EI CAS CSCD 2015年第1期367-373,共7页
Practical solar energy solutions must not only reduce the cost of the module,but also address the substantial balance of system costs.Here,we demonstrate a counter-intuitive approach based on gallium arsenide solar ce... Practical solar energy solutions must not only reduce the cost of the module,but also address the substantial balance of system costs.Here,we demonstrate a counter-intuitive approach based on gallium arsenide solar cells that can achieve extremely low-cost solar energy conversion with an estimated cost of only 3% that of conventional gallium arsenide solar cells using an accelerated,non-destructive epitaxial lift-off wafer recycling process along with a lightweight,thermoformed plastic,truncated mini-compound parabolic concentrator that avoids the need for active solar tracking.Using solar cell/concentrator assemblies whose orientations are adjusted only a few times per year,the annual energy harvesting is increased by 2.8 times compared with planar solar cells without solar tracking.These results represent a potentially drastic cost reduction in both the module and the balance of system costs compared with heavy,rigid conventional modules and trackers that are subject to wind loading damage and high installation costs. 展开更多
关键词 CONCENTRATOR cost per Watt epitaxial lift-off plastic substrate thin-film GaAs solar cell
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高质量的AlGaN外延结构和UVC垂直腔面发射激光器的实现 被引量:1
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作者 郑重明 王玉坤 +6 位作者 胡建正 郭世平 梅洋 龙浩 应磊莹 郑志威 张保平 《Science China Materials》 SCIE EI CAS CSCD 2023年第5期1978-1988,共11页
AlGaN基垂直腔面发射激光器(VCSEL)因其优越的材料性质和器件优点吸引了很多关注.然而,由于材料外延生长和器件制备工艺的局限,AlGaN基VCSEL制备很困难.本工作通过侧向外延生长技术制备了高质量的AlGaN多量子阱(MQWs)结构的外延片,并通... AlGaN基垂直腔面发射激光器(VCSEL)因其优越的材料性质和器件优点吸引了很多关注.然而,由于材料外延生长和器件制备工艺的局限,AlGaN基VCSEL制备很困难.本工作通过侧向外延生长技术制备了高质量的AlGaN多量子阱(MQWs)结构的外延片,并通过X射线衍射(XRD)和光致发光(PL)实验对外延片进行了分析.XRD测量显示,外延片中的AlN模板层几乎是弛豫的,刃位错密度为10^(9)cm^(-2).随后,生长的AlGaN/AlN超晶格(SL)层被用来减少刃位错密度,使得量子阱中的位错密度为10^(8)cm^(-2).根据PL测试结果,MQWs的内量子效率(IQE)为62%,且在室温下的发光以辐射复合为主.通过激光剥离(LLO)和化学机械抛光(CMP)技术,将这些外延片制备成UVC VCSEL.经过这些工艺,MQWs的晶体质量没有受到影响,还在抛光之后的表面观察到了UVC波段的受激辐射.这些AlGaN基UVC VCSEL在275.91,276.28和277.64 nm实现了激射,最小激射阈值为0.79 MW cm^(-2). 展开更多
关键词 ALGAN vertical-cavity surface-emitting lasers epitaxial lateral overgrowth laser lift-off UVC
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Epitaxial Lift-Off of Flexible GaN‑Based HEMT Arrays with Performances Optimization by the Piezotronic Effect 被引量:1
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作者 Xin Chen Jianqi Dong +6 位作者 Chenguang He Longfei He Zhitao Chen Shuti Li Kang Zhang Xingfu Wang Zhong Lin Wang 《Nano-Micro Letters》 SCIE EI CAS CSCD 2021年第4期221-233,共13页
High-electron-mobility transistors(HEMTs)are a promising device in the field of radio frequency and wireless communication.However,to unlock the full potential of HEMTs,the fabrication of large-size flexible HEMTs is ... High-electron-mobility transistors(HEMTs)are a promising device in the field of radio frequency and wireless communication.However,to unlock the full potential of HEMTs,the fabrication of large-size flexible HEMTs is required.Herein,a large-sized(>2 cm^(2))of AlGaN/AlN/GaN heterostructure-based HEMTs were successfully stripped from sapphire substrate to a flexible polyethylene terephthalate substrate by an electrochemical lift-off technique.The piezotronic effect was then induced to optimize the electron transport performance by modulating/tuning the physical properties of two-dimensional electron gas(2DEG)and phonons.The saturation current of the flexible HEMT is enhanced by 3.15%under the 0.547%tensile condition,and the thermal degradation of the HEMT was also obviously suppressed under compressive straining.The corresponding electrical performance changes and energy diagrams systematically illustrate the intrinsic mechanism.This work not only provides in-depth understanding of the piezotronic effect in tuning 2DEG and phonon properties in GaN HEMTs,but also demonstrates a low-cost method to optimize its electronic and thermal properties. 展开更多
关键词 AlGaN/AlN/GaN heterojunction epitaxial lift-off Flexible membrane Two-dimensional electron gas Piezotronic effect
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外延层剥离技术(ELO)制备GaAs薄膜太阳电池
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作者 许军 刘海港 +2 位作者 王帅 高伟 孙强 《电源技术》 CAS CSCD 北大核心 2008年第1期33-34,共2页
通过外延层剥离技术获得GaAs薄膜太阳电池样品,实验对比了正向和反向外延结构方法,解释了现有技术条件下,采用新颖的反向外延结构制备GaAs薄膜太阳电池的原因。对样品进行了光电转换性能测试,并对实验结果进行了讨论。
关键词 MOCVD技术 外延层剥离技术 掩模工艺
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外延迁移技术制作光电子单片集成Si的GaAs/GaAlAs DH LED
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作者 肖德元 郭康瑾 +2 位作者 李爱珍 徐少华 朱黎明 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 1992年第5期367-369,共3页
描述了采用外延迁移技术制作光电子集成电路的Si衬底砷化镓双异质结发光二极管的工艺过程及实验结果.发光器件是在外延迁移后流片制作的,克服了光子器件与电子器件的对准问题,可与电子器件大规模集成.
关键词 外延迁移 光电子 集成电路 LED
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Fabrication of extremely thermal-stable GaN template on Mo substrate using double bonding and step annealing process
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作者 汪青 刘扬 +2 位作者 孙永健 童玉珍 张国义 《Journal of Semiconductors》 EI CAS CSCD 2016年第8期15-18,共4页
A new layer transfer technique which comprised double bonding and a step annealing process was utilized to transfer the GaN epilayer from a sapphire substrate to a Mo substrate. Combined with the application of the th... A new layer transfer technique which comprised double bonding and a step annealing process was utilized to transfer the GaN epilayer from a sapphire substrate to a Mo substrate. Combined with the application of the thermal-stable bonding medium, the resulting two-inch-diameter GaN template showed extremely good stability under high temperature and low stress state. Moreover, no cracks and winkles were observed. The transferred GaN template was suitable for homogeneous epitaxial, thus could be used for the direct fabrication of vertical LED chips as well as power electron devices. It has been confirmed that the double bonding and step annealing technique together with the thermal-stable bonding layer could significantly improve the bonding strength and stress relief, finally enhancing the thermal stability of the transferred GaN template. 展开更多
关键词 gallium nitride Mo substrate medium bonding laser lift off thermal stability homogeneous epitaxial
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