基于不断发展的系统级封装技术,提出了一种用于芯片间高速互连的新型可集成的物理器件:硅基毫米波介质填充波导。文中阐述了该器件的物理原理,采用建模、仿真相结合的方法对该模块进行了结构设计,利用新的设计思路结合半导体工艺解决了...基于不断发展的系统级封装技术,提出了一种用于芯片间高速互连的新型可集成的物理器件:硅基毫米波介质填充波导。文中阐述了该器件的物理原理,采用建模、仿真相结合的方法对该模块进行了结构设计,利用新的设计思路结合半导体工艺解决了毫米波互连结构内部的反射、电压驻波比(VSWR)、信号耦合、准TEM-TE-准TEM转换传输问题以及毫米波互连结构阵列中信号泄露的问题,并利用半导体与MEMS加工工艺加以实现。测试结果表明宽度为680μm的单通道矩形波导,-10 d B带宽为9.8 GHz,相对带宽为12.56%;传输损耗为1 d B/cm,工作频带内相邻波导之间串扰低于-40 d B,可以形成大阵列并进行集成,从而实现芯片间数据的并行传输。展开更多
Eigenvalues of the dielectric-filled waveguide are of great importance to its transmission characteristic analysis and optimization design, which could be easily affected by spatially uncertain dielectric parameters. ...Eigenvalues of the dielectric-filled waveguide are of great importance to its transmission characteristic analysis and optimization design, which could be easily affected by spatially uncertain dielectric parameters. For the sake of quantifying their influence on eigenvalues of the dielectric-filled waveguide and overcoming the limitation of less samples, an interval vector finite element method(IVFEM) is proposed to acquire the lower and upper bounds of the eigenvalues with spatial uncertainty of the medium parameters. Firstly, the uncertain dielectric material properties are described by the interval field model and the corresponding interval Karhunen-Loève(K-L) approximate method. Secondly, by inserting the interval uncertainties into the constitutive relationship of the standard generalized eigenvalue equations of the dielectric-filled waveguide, an interval standard generalized eigenvalue equation is then formulated. At last, the lower and upper bounds of the eigenvalues are calculated according to the first-order perturbation method, which can be used to estimate the transmission properties of the waveguide efficiently. Three kinds of the dielectric-filled waveguides are analyzed by the proposed IVFEM and verified by Monte Carlo simulation method.展开更多
文摘基于不断发展的系统级封装技术,提出了一种用于芯片间高速互连的新型可集成的物理器件:硅基毫米波介质填充波导。文中阐述了该器件的物理原理,采用建模、仿真相结合的方法对该模块进行了结构设计,利用新的设计思路结合半导体工艺解决了毫米波互连结构内部的反射、电压驻波比(VSWR)、信号耦合、准TEM-TE-准TEM转换传输问题以及毫米波互连结构阵列中信号泄露的问题,并利用半导体与MEMS加工工艺加以实现。测试结果表明宽度为680μm的单通道矩形波导,-10 d B带宽为9.8 GHz,相对带宽为12.56%;传输损耗为1 d B/cm,工作频带内相邻波导之间串扰低于-40 d B,可以形成大阵列并进行集成,从而实现芯片间数据的并行传输。
基金supported by the National Science Fund for Distinguished Young Scholars(Grant No.51725502)the National Natural Science Foundation of China(Grant No.11802089)the National Defense Fundamental Research Foundation of China(Grant No.JCKY2020110C105)。
文摘Eigenvalues of the dielectric-filled waveguide are of great importance to its transmission characteristic analysis and optimization design, which could be easily affected by spatially uncertain dielectric parameters. For the sake of quantifying their influence on eigenvalues of the dielectric-filled waveguide and overcoming the limitation of less samples, an interval vector finite element method(IVFEM) is proposed to acquire the lower and upper bounds of the eigenvalues with spatial uncertainty of the medium parameters. Firstly, the uncertain dielectric material properties are described by the interval field model and the corresponding interval Karhunen-Loève(K-L) approximate method. Secondly, by inserting the interval uncertainties into the constitutive relationship of the standard generalized eigenvalue equations of the dielectric-filled waveguide, an interval standard generalized eigenvalue equation is then formulated. At last, the lower and upper bounds of the eigenvalues are calculated according to the first-order perturbation method, which can be used to estimate the transmission properties of the waveguide efficiently. Three kinds of the dielectric-filled waveguides are analyzed by the proposed IVFEM and verified by Monte Carlo simulation method.
