One of the major challenges faced by the biomedical industry is the development of robust synthetic surfaces that can resist bacterial colonization. Much inspiration has been drawn recently from naturally occurring me...One of the major challenges faced by the biomedical industry is the development of robust synthetic surfaces that can resist bacterial colonization. Much inspiration has been drawn recently from naturally occurring mechano-bactericidal surfaces such as the wings of cicada(Psaltoda claripennis) and dragonfly(Diplacodes bipunctata) species in fabricating their synthetic analogs. However,the bactericidal activity of nanostructured surfaces is observed in a particular range of parameters reflecting the geometry of nanostructures and surface wettability. Here,several of the nanometer-scale characteristics of black silicon(bSi) surfaces including the density and height of the nanopillars that have the potential to influence the bactericidal efficiency of these nanostructured surfaces have been investigated. The results provide important evidence that minor variations in the nanoarchitecture of substrata can substantially alter their performance as bactericidal surfaces.展开更多
深反应离子刻蚀(DRIE)工艺在目前的硅微机械高深宽比结构加工中应用十分广泛。在SOI硅片DRIE刻蚀过程中,存在着一些被认为对刻蚀速率和结构轮廓不利的效应,如横向刻蚀(Notching)效应。通过在结构旁布置牺牲结构-硅岛,利用Notching效应...深反应离子刻蚀(DRIE)工艺在目前的硅微机械高深宽比结构加工中应用十分广泛。在SOI硅片DRIE刻蚀过程中,存在着一些被认为对刻蚀速率和结构轮廓不利的效应,如横向刻蚀(Notching)效应。通过在结构旁布置牺牲结构-硅岛,利用Notching效应加工出以悬空硅作为敏感单元的风速仪,其响应时间常数和电阻温度系数TCR(Temperature Coefficient of Resistant)分别为1.08μs和4 738×10-6/℃。正如所描述的,对于特定的微机械应用,Notching效应可以转变为一种加工优势,提高了微加工过程中的变化性。展开更多
基金funding from Marie Curie Actions under EU FP7 Initial Training Network SNAL 608184
文摘One of the major challenges faced by the biomedical industry is the development of robust synthetic surfaces that can resist bacterial colonization. Much inspiration has been drawn recently from naturally occurring mechano-bactericidal surfaces such as the wings of cicada(Psaltoda claripennis) and dragonfly(Diplacodes bipunctata) species in fabricating their synthetic analogs. However,the bactericidal activity of nanostructured surfaces is observed in a particular range of parameters reflecting the geometry of nanostructures and surface wettability. Here,several of the nanometer-scale characteristics of black silicon(bSi) surfaces including the density and height of the nanopillars that have the potential to influence the bactericidal efficiency of these nanostructured surfaces have been investigated. The results provide important evidence that minor variations in the nanoarchitecture of substrata can substantially alter their performance as bactericidal surfaces.
文摘深反应离子刻蚀(DRIE)工艺在目前的硅微机械高深宽比结构加工中应用十分广泛。在SOI硅片DRIE刻蚀过程中,存在着一些被认为对刻蚀速率和结构轮廓不利的效应,如横向刻蚀(Notching)效应。通过在结构旁布置牺牲结构-硅岛,利用Notching效应加工出以悬空硅作为敏感单元的风速仪,其响应时间常数和电阻温度系数TCR(Temperature Coefficient of Resistant)分别为1.08μs和4 738×10-6/℃。正如所描述的,对于特定的微机械应用,Notching效应可以转变为一种加工优势,提高了微加工过程中的变化性。
