Particle induced X- ray emission (PIXE) and Rutherford backscattering spectrometry (RBS) have been used extensively for analytical purpose because of their quantitative accuracy, reliability, simplicity and capability...Particle induced X- ray emission (PIXE) and Rutherford backscattering spectrometry (RBS) have been used extensively for analytical purpose because of their quantitative accuracy, reliability, simplicity and capability of non- destructive and multielement analysis. When these techniques are combined with a scanning microbeam system and a data acquisition system, three dimensional distribution of elemental composition can be displayed. Samples analyzed so far at Fudan University include a microelectronic circuit and some biological and archaeological samples. The PIXE and RBS spectra and the secondary electron images have been measured.展开更多
文摘Particle induced X- ray emission (PIXE) and Rutherford backscattering spectrometry (RBS) have been used extensively for analytical purpose because of their quantitative accuracy, reliability, simplicity and capability of non- destructive and multielement analysis. When these techniques are combined with a scanning microbeam system and a data acquisition system, three dimensional distribution of elemental composition can be displayed. Samples analyzed so far at Fudan University include a microelectronic circuit and some biological and archaeological samples. The PIXE and RBS spectra and the secondary electron images have been measured.
