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石英晶体谐振器用高导电率导电胶粘剂的研制 被引量:1
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作者 解海峰 《中国胶粘剂》 CAS 2007年第6期26-29,共4页
简要介绍了一种高导电率导电胶的研制方法,论述了导电促进剂对性能的影响。实验结果证明,此国产导电胶性能良好,完全可以替代进口导电胶应用于石英晶体谐振器生产中。
关键词 高导电率导电胶 导电促进剂 石英晶体谐振器
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Extendibility Evaluation of Industrial EUV Source Technologies for kW Average Power and 6.x nm Wavelength Operation 被引量:1
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作者 Akira Endo 《Journal of Modern Physics》 2014年第5期285-295,共11页
Interests in the extendibility are growing after the introduction of the LPP (Laser Produced Plasma) EUV source technology in the semiconductor industry, towards higher average power and shorter wavelength, based on t... Interests in the extendibility are growing after the introduction of the LPP (Laser Produced Plasma) EUV source technology in the semiconductor industry, towards higher average power and shorter wavelength, based on the basic architecture of the established LPP EUV source technology. It is discussed in this article that the power scaling of the 13.5nm wavelength source is essentially possible by a slight increase of the driving laser power, CE (Conversion Efficiency) and EUV collection efficiency by some introduction of novel component technologies. Extension of the EUV wavelength towards BEUV (Beyond EUV), namely 6.x nm is discussed based on the general rule of the UTA (Unresolved Transition Arrays) of high Z ions, and development of multilayer mirrors in this particular wavelength region. Technical difficulties are evaluated for the extension of the LPP source technology by considering the narrower mirror bandwidth and higher melting temperature of the candidate plasma materials. Alternative approach based on the superconducting FEL is evaluated in comparison with the LPP source technology for the future solution. 展开更多
关键词 EUV LPP High Power BEUV FEL Super conductING accelerator
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