A computer-controlled system for plasma ion energy auto-analyzer was technically studied for rapid and online measurement of plasma ion energy distribution. The system intelligently controls all the equipments via a R...A computer-controlled system for plasma ion energy auto-analyzer was technically studied for rapid and online measurement of plasma ion energy distribution. The system intelligently controls all the equipments via a RS-232 port, a printer port and a home-built circuit. The software designed by LabVIEW G language automatically fulfils all of the tasks such as system initializing, adjustment of scanning-voltage, measurement of weak-current, data processing, graphic export, etc. By using the system, a few minutes are taken to acquire the whole ion energy distribution, which rapidly provides important parameters of plasma process techniques based on semiconductor devices and microelectronics.展开更多
Supervisory control is a very popular paradigm for computer-controlled systems. Knowledge and tracking the control effect of every control operation is crucial to the control tasks. In the paper, we present a message-...Supervisory control is a very popular paradigm for computer-controlled systems. Knowledge and tracking the control effect of every control operation is crucial to the control tasks. In the paper, we present a message-array-based mechanism to track control effects in supervisory control software. A novel data type, message array, is designed to efficiently support this tracking mechanism. The operation algorithms, adding algorithm （AA）, removing algorithm （RA）, and scheduler algorithm （SA） are proposed to operate the tracking messages in message array, which forms the special first input X output （FIXO） strategy of message array. Automatically tracking, recording, and rolling back are the characteristics of our tracking mechanism. We implement this messagearray-based mechanism on the famous human machine interface （HMI） software platform-proficy iFix, and construct experiments to evaluate the performance of the mechanism in various cases. The results show our mechanism can be well satisfied with supervisory control software.展开更多
基金The project supported by Natural Science Foundation of Guangdong Province(No. 000675, No. 011466)Major Project of Guangdong Province (No. 2KM01401G, No. 2002C40505)
文摘A computer-controlled system for plasma ion energy auto-analyzer was technically studied for rapid and online measurement of plasma ion energy distribution. The system intelligently controls all the equipments via a RS-232 port, a printer port and a home-built circuit. The software designed by LabVIEW G language automatically fulfils all of the tasks such as system initializing, adjustment of scanning-voltage, measurement of weak-current, data processing, graphic export, etc. By using the system, a few minutes are taken to acquire the whole ion energy distribution, which rapidly provides important parameters of plasma process techniques based on semiconductor devices and microelectronics.
文摘Supervisory control is a very popular paradigm for computer-controlled systems. Knowledge and tracking the control effect of every control operation is crucial to the control tasks. In the paper, we present a message-array-based mechanism to track control effects in supervisory control software. A novel data type, message array, is designed to efficiently support this tracking mechanism. The operation algorithms, adding algorithm （AA）, removing algorithm （RA）, and scheduler algorithm （SA） are proposed to operate the tracking messages in message array, which forms the special first input X output （FIXO） strategy of message array. Automatically tracking, recording, and rolling back are the characteristics of our tracking mechanism. We implement this messagearray-based mechanism on the famous human machine interface （HMI） software platform-proficy iFix, and construct experiments to evaluate the performance of the mechanism in various cases. The results show our mechanism can be well satisfied with supervisory control software.
