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Growth-temperature-dependent optical and acetone detection properties of ZnO thin films 被引量:2
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作者 P.S.Shewale Y.S.Yu 《Journal of Semiconductors》 EI CAS CSCD 2015年第7期17-21,共5页
Zinc oxide (ZnO) thin films were prepared onto glass substrates at moderately low growth tempera- ture by two-stage spray pyrolysis technique. The effects of growth temperature on structural, optical and acetone det... Zinc oxide (ZnO) thin films were prepared onto glass substrates at moderately low growth tempera- ture by two-stage spray pyrolysis technique. The effects of growth temperature on structural, optical and acetone detection properties were investigated with X-ray diffractometry, a UV-visible spectrophotometer, photoluminescence (PL) spectroscopy and a homemade gas sensor testing unit, respectively. All the films are polycrystalline with a hexagonal wurtzite phase and exhibit a preferential orientation along [002] direction. The film crystallinity is gradually enhanced with an increase in growth temperature. The optical measurements show that all the films are physically highly transparent with a transmittance greater than 82% in the visible range. The band gap of the film is observed to exhibit a slight red shift with an increasing growth temperature. The PL studies on the films show UV/violet PL band at - 395 nm. Among all the films investigated, the film deposited at 250℃ demonstrates a maximum sensitivity of 13% towards 20 ppm of acetone vapors at 300℃ operating temperature. 展开更多
关键词 ZnO thin film growth temperature OPTICAL acetone sensing properties
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