SOI (silicon-on-insulator) is a new material with a lot of important perform- ances such as large index difference, low transmission loss. Fabrication processes for SOI based optoelectronic devices are compatible with...SOI (silicon-on-insulator) is a new material with a lot of important perform- ances such as large index difference, low transmission loss. Fabrication processes for SOI based optoelectronic devices are compatible with conventional IC processes. Having the potential of OEIC monolithic integration, SOI based optoelectronic devices have shown many good characteristics and become more and more attractive recently. In this paper, the recent progresses of SOI waveguide devices in our research group are presented. By highly effective numerical simulation, the single mode conditions for SOI rib waveguides with rectangular and trapezoidal cross-section were accurately investigated. Using both chemical anisotropic wet etching and plasma dry etching techniques, SOI single mode rib waveguide, MMI coupler, VOA (variable optical attenuator), 2×2 thermal-optical switch were successfully designed and fabricated. Based on these, 4×4 and 8×8 SOI optical waveguide integrated switch matrixes are demonstrated for the first time.展开更多
A monolithic integrated variable attenuator multiplexer/demultiplexer is demonstrated. It is composed of a 16-channel 200 GHz silica-based arrayed waveguide grating and an array of Mach-Zehnder interferometer thermo-o...A monolithic integrated variable attenuator multiplexer/demultiplexer is demonstrated. It is composed of a 16-channel 200 GHz silica-based arrayed waveguide grating and an array of Mach-Zehnder interferometer thermo-optic variable optical attenuators. The integrated device is fabricated on a quartz substrate, which eliminates the process of depositing the undercladding layer and reduces the power consumption compared with a device fabricated on a silicon substrate. The insertion loss and crosstalk of the integrated device are -5 dB and less than -22 dB, respectively. The power consumption is only 110 mW at the attenuation of 20 dB per channel.展开更多
"微媒体时代"背景下,将移动学习模式引入到独立学院的大学英语教学,可以培养符合时代发展需求的高素质应用型综合人才。学生利用碎片化时间,利用"VOA Special English"手机App进行移动学习最新的新闻英语听力,练习..."微媒体时代"背景下,将移动学习模式引入到独立学院的大学英语教学,可以培养符合时代发展需求的高素质应用型综合人才。学生利用碎片化时间,利用"VOA Special English"手机App进行移动学习最新的新闻英语听力,练习口语表达。该软件的互动性、时效性及纯正规范的发音能激发学生学习兴趣,培养学生自主学习能力,从而提高学生综合听说能力。展开更多
A 16-channel variable attenuator multiplexer/demultiplexer （VMUX） device is demonstrated. The VM UX is based on a rib-type structure on a silicon-on-insulator （SOI） platform. It consists of a 100-GHz arrayed waveg...A 16-channel variable attenuator multiplexer/demultiplexer （VMUX） device is demonstrated. The VM UX is based on a rib-type structure on a silicon-on-insulator （SOI） platform. It consists of a 100-GHz arrayed waveguide grating （AWG） and an electro-optic variable optical attenuator （VOA） array with a p-i-n lateral diode structure. The insertion loss of the demonstrated device is about 9.1 dB and the corresponding crosstalk is about 10 dB. The injected current of the VOA is 60.74 mA at 20 dB attenuation and the whole area of the device is 2.9 × 1 mm2. The VMUX performs an excellent function of wavelength demultiplexing and optical power balancing in 16 channels.展开更多
In this paper, we designed a thermo-optic variable optical attenuator (VOA) based on quartz substrate, which consists of a Mach-Zehnder interferometer (MZI) and a thin film heater above the phase-modulation arm. The t...In this paper, we designed a thermo-optic variable optical attenuator (VOA) based on quartz substrate, which consists of a Mach-Zehnder interferometer (MZI) and a thin film heater above the phase-modulation arm. The transmission properties of the waveguide and attenuation characteristics of the device have been simulated by beam propagation method (BPM), and the simulated results illustrated that the designed VOA had good performance.展开更多
基金This work was supported by the National“973"Project of China(Grant No,G2000-03-66)the National“863”Project(Grant No.2002AA3 12060)of the Ministry of Science and Technology of Chinathe National Natural Science Foundation of China(Grant Nos.69896260 and 60336010).
文摘SOI (silicon-on-insulator) is a new material with a lot of important perform- ances such as large index difference, low transmission loss. Fabrication processes for SOI based optoelectronic devices are compatible with conventional IC processes. Having the potential of OEIC monolithic integration, SOI based optoelectronic devices have shown many good characteristics and become more and more attractive recently. In this paper, the recent progresses of SOI waveguide devices in our research group are presented. By highly effective numerical simulation, the single mode conditions for SOI rib waveguides with rectangular and trapezoidal cross-section were accurately investigated. Using both chemical anisotropic wet etching and plasma dry etching techniques, SOI single mode rib waveguide, MMI coupler, VOA (variable optical attenuator), 2×2 thermal-optical switch were successfully designed and fabricated. Based on these, 4×4 and 8×8 SOI optical waveguide integrated switch matrixes are demonstrated for the first time.
基金Project supported by the National High Technology Research and Development Program of China(Nos.2013AA031402,2011AA010303)the National Natural Science Foundation of China(Nos.61274047,61090390,61275029,61205044,61307034)the Major Science&Technology Specific Project of He’nan Province of China,and the Independent Innovation Foundation of He’nan Province of China
文摘A monolithic integrated variable attenuator multiplexer/demultiplexer is demonstrated. It is composed of a 16-channel 200 GHz silica-based arrayed waveguide grating and an array of Mach-Zehnder interferometer thermo-optic variable optical attenuators. The integrated device is fabricated on a quartz substrate, which eliminates the process of depositing the undercladding layer and reduces the power consumption compared with a device fabricated on a silicon substrate. The insertion loss and crosstalk of the integrated device are -5 dB and less than -22 dB, respectively. The power consumption is only 110 mW at the attenuation of 20 dB per channel.
文摘"微媒体时代"背景下,将移动学习模式引入到独立学院的大学英语教学,可以培养符合时代发展需求的高素质应用型综合人才。学生利用碎片化时间,利用"VOA Special English"手机App进行移动学习最新的新闻英语听力,练习口语表达。该软件的互动性、时效性及纯正规范的发音能激发学生学习兴趣,培养学生自主学习能力,从而提高学生综合听说能力。
基金supported by the National High Technology Research and Development Program of China(No.2013AA031402)
文摘A 16-channel variable attenuator multiplexer/demultiplexer （VMUX） device is demonstrated. The VM UX is based on a rib-type structure on a silicon-on-insulator （SOI） platform. It consists of a 100-GHz arrayed waveguide grating （AWG） and an electro-optic variable optical attenuator （VOA） array with a p-i-n lateral diode structure. The insertion loss of the demonstrated device is about 9.1 dB and the corresponding crosstalk is about 10 dB. The injected current of the VOA is 60.74 mA at 20 dB attenuation and the whole area of the device is 2.9 × 1 mm2. The VMUX performs an excellent function of wavelength demultiplexing and optical power balancing in 16 channels.
文摘In this paper, we designed a thermo-optic variable optical attenuator (VOA) based on quartz substrate, which consists of a Mach-Zehnder interferometer (MZI) and a thin film heater above the phase-modulation arm. The transmission properties of the waveguide and attenuation characteristics of the device have been simulated by beam propagation method (BPM), and the simulated results illustrated that the designed VOA had good performance.
