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Monolithic integration of a silica-based 16-channel VMUX/VDMUX on quartz substrate 被引量:3
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作者 代红庆 安俊明 +7 位作者 王玥 张家顺 王亮亮 王红杰 李建光 吴远大 钟飞 查强 《Journal of Semiconductors》 EI CAS CSCD 2014年第10期70-73,共4页
A monolithic integrated variable attenuator multiplexer/demultiplexer is demonstrated. It is composed of a 16-channel 200 GHz silica-based arrayed waveguide grating and an array of Mach-Zehnder interferometer thermo-o... A monolithic integrated variable attenuator multiplexer/demultiplexer is demonstrated. It is composed of a 16-channel 200 GHz silica-based arrayed waveguide grating and an array of Mach-Zehnder interferometer thermo-optic variable optical attenuators. The integrated device is fabricated on a quartz substrate, which eliminates the process of depositing the undercladding layer and reduces the power consumption compared with a device fabricated on a silicon substrate. The insertion loss and crosstalk of the integrated device are -5 dB and less than -22 dB, respectively. The power consumption is only 110 mW at the attenuation of 20 dB per channel. 展开更多
关键词 monolithic integration quartz substrate vmux/vdmux AWG thermo-optic VOA
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