A wideband wavelength-tunable 4×5 distributed feedback(DFB)semiconductor laser array based on the reconstructionequivalent-chirp(REC)technique using a simple tuning scheme is demonstrated.It consists of 20 DFB la...A wideband wavelength-tunable 4×5 distributed feedback(DFB)semiconductor laser array based on the reconstructionequivalent-chirp(REC)technique using a simple tuning scheme is demonstrated.It consists of 20 DFB lasers with 4×5matrix interleaving distributions,two-level cascaded Y-branch optical combiners,and one active semiconductor opticalamplifier(SOA),all in-series integrated on one chip.Unlike the traditional thermal-electric cooler(TEC)-based wavelength-tuning scheme,the tunable 4×5 REC-DFB laser array achieves a faster and broader continuous wavelength-tuningrange using TaN thin-film heaters integrated on the AlN submount.By changing the injection current of the TaN resistorfrom 0 to 190 mA,the proposed tunable laser achieves a wavelength-tuning range of∼2.5 nm per channel and a total tuningof over 50 nm.This study opens up new avenues for realizing cost-effective and wide-tuning-range semiconductor lasers.展开更多
设计了基于微机电系统(MEMS)工艺,以镍薄膜作为加热体的新型催化传感器。通过磁控溅射沉积、刻蚀等工艺制成镍薄膜加热器,并对其进行了稳定化热处理以及防氧化聚合物涂层处理。传感器性能测试结果表明:镍薄膜加热器具有良好的抗高温氧...设计了基于微机电系统(MEMS)工艺,以镍薄膜作为加热体的新型催化传感器。通过磁控溅射沉积、刻蚀等工艺制成镍薄膜加热器,并对其进行了稳定化热处理以及防氧化聚合物涂层处理。传感器性能测试结果表明:镍薄膜加热器具有良好的抗高温氧化能力;气氛老化可缩短50%的老化时间;甲烷气体浓度与灵敏度呈良好的线性关系;对甲烷的灵敏度约为30 m V/1%Vol;传感器功耗约为150 m W,零点和灵敏度年漂移小于1. 5%LEL。展开更多
基金supported by the Chinese National Key Basic Research Special Fund(Nos.2017YFA0206401,2018YFA0704402,2018YFB2201801,and 2018YFE0201200)National Key Research and Development Program of China(No.2020YFB2205800)+2 种基金National Natural Science Foundation of China(Nos.61975075,61975076,and 62004094)Natural Science Foundation of Jiangsu Province(No.BK20200334)Jiangsu Science and Technology Project(No.BE2017003-2).
文摘A wideband wavelength-tunable 4×5 distributed feedback(DFB)semiconductor laser array based on the reconstructionequivalent-chirp(REC)technique using a simple tuning scheme is demonstrated.It consists of 20 DFB lasers with 4×5matrix interleaving distributions,two-level cascaded Y-branch optical combiners,and one active semiconductor opticalamplifier(SOA),all in-series integrated on one chip.Unlike the traditional thermal-electric cooler(TEC)-based wavelength-tuning scheme,the tunable 4×5 REC-DFB laser array achieves a faster and broader continuous wavelength-tuningrange using TaN thin-film heaters integrated on the AlN submount.By changing the injection current of the TaN resistorfrom 0 to 190 mA,the proposed tunable laser achieves a wavelength-tuning range of∼2.5 nm per channel and a total tuningof over 50 nm.This study opens up new avenues for realizing cost-effective and wide-tuning-range semiconductor lasers.
文摘设计了基于微机电系统(MEMS)工艺,以镍薄膜作为加热体的新型催化传感器。通过磁控溅射沉积、刻蚀等工艺制成镍薄膜加热器,并对其进行了稳定化热处理以及防氧化聚合物涂层处理。传感器性能测试结果表明:镍薄膜加热器具有良好的抗高温氧化能力;气氛老化可缩短50%的老化时间;甲烷气体浓度与灵敏度呈良好的线性关系;对甲烷的灵敏度约为30 m V/1%Vol;传感器功耗约为150 m W,零点和灵敏度年漂移小于1. 5%LEL。
