The disk resonator gyroscope is an attractive candidate for high-performance MEMS gyroscopes.This gyroscope consists of a sensor and readout electronics,and the characteristics of the sensor directly determine the per...The disk resonator gyroscope is an attractive candidate for high-performance MEMS gyroscopes.This gyroscope consists of a sensor and readout electronics,and the characteristics of the sensor directly determine the performance.For the sensor,a high-quality factor and long decaying time constant are the most important characteristics required to achieve high performance.We report a disk resonator gyroscope with a measured quality factor of 510 k and decaying time constant of 74.9 s,which is a record for MEMS silicon disk resonator gyroscopes,to the best of our knowledge.To improve the quality factor of the DRG,the quality factor improvement mechanism is first analyzed,and based on this mechanism two stiffness-mass decoupled methods,i.e.,spoke length distribution optimization and lumped mass configuration design,are proposed and demonstrated.A disk resonator gyroscope prototype is fabricated based on these design strategies,and the sensor itself shows an angle random walk as low as 0.001°/√h,demonstrating true potential to achieve navigation-grade performance.The gyroscope with readout electronics shows an angle random walk of 0.01°/√h and a bias instability of 0.04°/h at room temperature without compensation,revealing that the performance of the gyroscope is severely limited by the readout electronics,which should be further improved.We expect that the quality factor improvement methods can be used in the design of other MEMS gyroscopes and that the newly designed DRG can be further improved to achieve navigation-grade performances for high-end industrial,transportation,aerospace,and automotive applications.展开更多
An ultrahigh-Q silicon racetrack resonator is proposed and demonstrated with uniform multimode silicon photonic waveguides.It consists of two multimode straight waveguides connected by two multimode waveguide bends(MW...An ultrahigh-Q silicon racetrack resonator is proposed and demonstrated with uniform multimode silicon photonic waveguides.It consists of two multimode straight waveguides connected by two multimode waveguide bends(MWBs).In particular,the MWBs are based on modified Euler curves,and a bent directional coupler is used to achieve the selective mode coupling for the fundamental mode and not exciting the higher-order mode in the racetrack.In this way,the fundamental mode is excited and propagates in the multimode racetrack resonator with ultralow loss and low intermode coupling.Meanwhile,it helps achieve a compact 180°bend to make a compact resonator with a maximized free spectral range(FSR).In this paper,for the chosen 1.6μm wide silicon photonic waveguide,the effective radius Reffof the designed 180°bend is as small as 29μm.The corresponding FSR is about 0.9 nm when choosing 260μm long straight waveguides in the racetrack.The present high-Q resonator is realized with a simple standard single-etching process provided by a multiproject wafer foundry.The fabricated device,which has a measured intrinsic Q-factor as high as 2.3×10~6,is the smallest silicon resonator with a>106Q-factor.展开更多
基金This work was supported by the National Natural Science Foundation of China under Grant 51575521the 2017 Huxiang Provincial Scholar Program.
文摘The disk resonator gyroscope is an attractive candidate for high-performance MEMS gyroscopes.This gyroscope consists of a sensor and readout electronics,and the characteristics of the sensor directly determine the performance.For the sensor,a high-quality factor and long decaying time constant are the most important characteristics required to achieve high performance.We report a disk resonator gyroscope with a measured quality factor of 510 k and decaying time constant of 74.9 s,which is a record for MEMS silicon disk resonator gyroscopes,to the best of our knowledge.To improve the quality factor of the DRG,the quality factor improvement mechanism is first analyzed,and based on this mechanism two stiffness-mass decoupled methods,i.e.,spoke length distribution optimization and lumped mass configuration design,are proposed and demonstrated.A disk resonator gyroscope prototype is fabricated based on these design strategies,and the sensor itself shows an angle random walk as low as 0.001°/√h,demonstrating true potential to achieve navigation-grade performance.The gyroscope with readout electronics shows an angle random walk of 0.01°/√h and a bias instability of 0.04°/h at room temperature without compensation,revealing that the performance of the gyroscope is severely limited by the readout electronics,which should be further improved.We expect that the quality factor improvement methods can be used in the design of other MEMS gyroscopes and that the newly designed DRG can be further improved to achieve navigation-grade performances for high-end industrial,transportation,aerospace,and automotive applications.
基金National Major Research and Development Program(2018YFB2200200)China National Funds for Distinguished Young Scientists(61725503)+1 种基金National Natural Science Foundation of China(6191101294,91950205)Natural Science Foundation of Zhejiang Province(LD19F050001,LZ18F050001)。
文摘An ultrahigh-Q silicon racetrack resonator is proposed and demonstrated with uniform multimode silicon photonic waveguides.It consists of two multimode straight waveguides connected by two multimode waveguide bends(MWBs).In particular,the MWBs are based on modified Euler curves,and a bent directional coupler is used to achieve the selective mode coupling for the fundamental mode and not exciting the higher-order mode in the racetrack.In this way,the fundamental mode is excited and propagates in the multimode racetrack resonator with ultralow loss and low intermode coupling.Meanwhile,it helps achieve a compact 180°bend to make a compact resonator with a maximized free spectral range(FSR).In this paper,for the chosen 1.6μm wide silicon photonic waveguide,the effective radius Reffof the designed 180°bend is as small as 29μm.The corresponding FSR is about 0.9 nm when choosing 260μm long straight waveguides in the racetrack.The present high-Q resonator is realized with a simple standard single-etching process provided by a multiproject wafer foundry.The fabricated device,which has a measured intrinsic Q-factor as high as 2.3×10~6,is the smallest silicon resonator with a>106Q-factor.
