Columnar nanocrystalline aluminum nitride(cnc-AlN) thin films with(002) orientation and uniform texture have been deposited successfully on large silicon wafers by RF reactive magnetron sputtering.At the optimum sputt...Columnar nanocrystalline aluminum nitride(cnc-AlN) thin films with(002) orientation and uniform texture have been deposited successfully on large silicon wafers by RF reactive magnetron sputtering.At the optimum sputtering parameters, the deposited cnc-AlN thin films show a c-axis preferred orientation with a crystallite size of about 28 nm and surface roughness(RMS) of about 1.29 nm. The cnc-AlN thin films were well transparent with an optical band gap about 4.8 e V, and the residual compressive stress and the defect density in the film have been revealed by Ramon spectroscopy. Moreover, piezoelectric performances of the cnc-AlN thin films executed effectively in a film bulk acoustic resonator structure.展开更多
Zinc oxide(ZnO) thin films were deposited onto different substrates — tin-doped indium oxide(ITO)/glass, ITO/polyethylene naphthalate(PEN), ITO/polyethylene terephthalate(PET) — by the radio-frequency(RF) magnetron ...Zinc oxide(ZnO) thin films were deposited onto different substrates — tin-doped indium oxide(ITO)/glass, ITO/polyethylene naphthalate(PEN), ITO/polyethylene terephthalate(PET) — by the radio-frequency(RF) magnetron sputtering method. The effect of various O2/(Ar+O2) gas flow ratios(0, 0.1, 0.2, 0.3, 0.4, 0.5, and 0.6) was studied in detail. ZnO layers deposited onto ITO/PEN and ITO/PET substrates exhibited a stronger c-axis preferred orientation along the(0002) direction compared to ZnO deposited onto ITO/glass. The transmittance spectra of ZnO films showed that the maximum transmittances of ZnO films deposited onto ITO/glass, ITO/PEN, and ITO/PET substrates were 89.2%, 65.0%, and 77.8%, respectively. Scanning electron microscopy(SEM) images of the film surfaces indicated that the grain was uniform. The cross-sectional SEM images showed that the ZnO films were columnar structures whose c-axis was perpendicular to the film surface. The test results for a fabricated ZnO thin film based energy harvester showed that its output voltage increased with increasing acceleration of external vibration.展开更多
Short copper standing wave （SW） structures operating at an X-band frequency have been recently designed and manufactured at the Laboratori Nazionali di Frascati of the Istituto Nazionale di Fisica Nucleare （INFN） ...Short copper standing wave （SW） structures operating at an X-band frequency have been recently designed and manufactured at the Laboratori Nazionali di Frascati of the Istituto Nazionale di Fisica Nucleare （INFN） using the vacuum brazing technique. High power tests of the structures have been performed at the SLAC National Accelerator Laboratory. In this manuscript we report the results of these tests and the activity in progress to enhance the high gradient performance of the next generation of structures, particularly the technological characterization of high performance coatings obtained via molybdenum sputtering.展开更多
文摘Columnar nanocrystalline aluminum nitride(cnc-AlN) thin films with(002) orientation and uniform texture have been deposited successfully on large silicon wafers by RF reactive magnetron sputtering.At the optimum sputtering parameters, the deposited cnc-AlN thin films show a c-axis preferred orientation with a crystallite size of about 28 nm and surface roughness(RMS) of about 1.29 nm. The cnc-AlN thin films were well transparent with an optical band gap about 4.8 e V, and the residual compressive stress and the defect density in the film have been revealed by Ramon spectroscopy. Moreover, piezoelectric performances of the cnc-AlN thin films executed effectively in a film bulk acoustic resonator structure.
基金supported by the National Natural Science Foundation of China (61671017)Anhui Provincial Natural Science Foundation (1508085ME72)the Provincial Natural Science Foundation of Anhui Higher Education Institution (KJ2016A787)
文摘Zinc oxide(ZnO) thin films were deposited onto different substrates — tin-doped indium oxide(ITO)/glass, ITO/polyethylene naphthalate(PEN), ITO/polyethylene terephthalate(PET) — by the radio-frequency(RF) magnetron sputtering method. The effect of various O2/(Ar+O2) gas flow ratios(0, 0.1, 0.2, 0.3, 0.4, 0.5, and 0.6) was studied in detail. ZnO layers deposited onto ITO/PEN and ITO/PET substrates exhibited a stronger c-axis preferred orientation along the(0002) direction compared to ZnO deposited onto ITO/glass. The transmittance spectra of ZnO films showed that the maximum transmittances of ZnO films deposited onto ITO/glass, ITO/PEN, and ITO/PET substrates were 89.2%, 65.0%, and 77.8%, respectively. Scanning electron microscopy(SEM) images of the film surfaces indicated that the grain was uniform. The cross-sectional SEM images showed that the ZnO films were columnar structures whose c-axis was perpendicular to the film surface. The test results for a fabricated ZnO thin film based energy harvester showed that its output voltage increased with increasing acceleration of external vibration.
基金Supported by Technological Innovation Project of Institute of High Energy Physics
文摘Short copper standing wave （SW） structures operating at an X-band frequency have been recently designed and manufactured at the Laboratori Nazionali di Frascati of the Istituto Nazionale di Fisica Nucleare （INFN） using the vacuum brazing technique. High power tests of the structures have been performed at the SLAC National Accelerator Laboratory. In this manuscript we report the results of these tests and the activity in progress to enhance the high gradient performance of the next generation of structures, particularly the technological characterization of high performance coatings obtained via molybdenum sputtering.
