The effect of a negative DC bias,|V_(dc)|,on the electrical parameters and discharge mode is investigated experimentally in a radiofrequency(RF)capacitively coupled Ar plasma operated at different RF voltage amplitude...The effect of a negative DC bias,|V_(dc)|,on the electrical parameters and discharge mode is investigated experimentally in a radiofrequency(RF)capacitively coupled Ar plasma operated at different RF voltage amplitudes and gas pressures.The electron density is measured using a hairpin probe and the spatio-temporal distribution of the electron-impact excitation rate is determined by phase-resolved optical emission spectroscopy.The electrical parameters are obtained based on the waveforms of the electrode voltage and plasma current measured by a voltage probe and a current probe.It was found that at a low|V_(dc)|,i.e.inα-mode,the electron density and RF current decline with increasing|V_(dc)|;meanwhile,the plasma impedance becomes more capacitive due to a widened sheath.Therefore,RF power deposition is suppressed.When|V_(dc)|exceeds a certain value,the plasma changes toα–γhybrid mode(or the discharge becomes dominated by theγ-mode),manifesting a drastically growing electron density and a moderately increasing RF current.Meanwhile,the plasma impedance becomes more resistive,so RF power deposition is enhanced with|V_(dc)|.We also found that the electrical parameters show similar dependence on|V_(dc)|at different RF voltages,andα–γmode transition occurs at a lower|V_(dc)|at a higher RF voltage.By increasing the pressure,plasma impedance becomes more resistive,so RF power deposition and electron density are enhanced.In particular,theα–γmode transition tends to occur at a lower|V_(dc)|with increase in pressure.展开更多
In the 2016 EAST experimental campaign,a steady-state long-pulse H-mode discharge with an ITER-like tungsten divertor lasting longer than one minute has been obtained using only RF heating and current drive,through an...In the 2016 EAST experimental campaign,a steady-state long-pulse H-mode discharge with an ITER-like tungsten divertor lasting longer than one minute has been obtained using only RF heating and current drive,through an integrated control of the wall conditioning,plasma configuration,divertor heat flux,particle exhaust,impurity management,and effective coupling of multiple RF heating and current drive sources at high injected power.The plasma current（Ip - 0.45 MA） was fully-noninductively driven（Vloop 〈 0.0 V） by a combination of-2.5 MW LHW,-0.4 MW ECH and -0.8 MW ICRF.This result demonstrates the progress of physics and technology studies on EAST,and will benefit the physics basis for steady state operation of ITER and CFETR.展开更多
The radio frequency (rf) self-bias of the substrate in a rf inductively coupled plasma is controlled by means of varying the impedance of an external LC network inserted between the substrate and the ground. Experimen...The radio frequency (rf) self-bias of the substrate in a rf inductively coupled plasma is controlled by means of varying the impedance of an external LC network inserted between the substrate and the ground. Experimental studies were done on the relations of the tuned substrate self-bias with varying discharge and external circuit parameters. Under a certain discharge gas pressure, the curves of tuned substrate self-bias Vtsb versus tuning capacitance Ct demonstrate jumps and hysteresises when rf discharge power is higher than a threshold. The hysteresis loop in terms of △Ctcrit1(= Ccrit1-Ccrit2, here,Ccrit1, Ccrit2 are critical capacitance magnitudes under which the tuned substrate self-bias jumps) decreases with increasing rf discharge power, while the maximum |Vtsbimn| is achieved in the middle discharge-power region. Under a constant discharge power |Vtsb min|, Ccrit1 and Ccrit2 achieve their minimums in the middle gas-pressure region. When the tuning capacitance is pre-set at a lower value, Ttsb varies slightly with gas-flow rate; in the case of tuning capacitance sufficiently approaching Ctcriti, Vtsb undergoes the jump and hysteresis with the changing gas-flow rate. By inserting a resistor R into the external network, the characteristics of Vtsb-Ct curves are changed with the reduced quality factor Q depending on resistance values. Based on inductive- and capacitive-coupling characteristics of inductively coupled plasma, the dependence of a plasma sheath on plasma parameters, and the impedance properties of the substrate branch, the observed results can be qualitatively interpreted.展开更多
This study presents the RF design of a linear accelerator(linac)operated in single-bunch mode.The accelerator is powered by a compressed RF pulse produced from a SLED-I type RF pulse compressor.The compressed RF pulse...This study presents the RF design of a linear accelerator(linac)operated in single-bunch mode.The accelerator is powered by a compressed RF pulse produced from a SLED-I type RF pulse compressor.The compressed RF pulse has an unflattened shape with a gradient distribution which varies over the structure cells.An analytical study to optimize the accelerating structure together with the RF pulse compressor is performed.The optimization aims to maximize the efficiency by minimizing the required RF power from the generator for a given average accelerating gradient.The study shows that,owing to the compressed RF pulse shape,the constant-impedance structure has a similar efficiency to the optimal structure using varying iris apertures.The constant-impedance structure is easily fabricated and is favorable for the design of a linac with a pulse compressor.We utilize these findings to optimize the RF design of a X-band linac using the constant-impedance accelerating structure for the Tsinghua Thomson X-ray source facility.展开更多
A differential low-voltage high gain current-mode integrated RF front end for an 802.1 lb WLAN is proposed. It contains a differential transeonductance low noise amplifier （Gm-LNA） and a differential current- mode d...A differential low-voltage high gain current-mode integrated RF front end for an 802.1 lb WLAN is proposed. It contains a differential transeonductance low noise amplifier （Gm-LNA） and a differential current- mode down converted mixer. The single terminal of the Gm-LNA contains just one MOS transistor, two capacitors and two inductors. The gate source shunt capacitors, Cx1 and Cx2, can not only reduce the effects of gate-source Cgs on resonance frequency and input-matching impedance, but they also enable the gate inductance Lgl,2 to be selected at a very small value. The current-mode mixer is composed of four switched current mirrors. Adjusting the ratio of the drain channel sizes of the switched current mirrors can increase the gain of the mixer and accordingly increase the gain of RF receiver front-end. The RF front-end operates under 1 V supply voltage. The receiver RFIC was fabricated using a chartered 0. 18 μm CMOS process. The integrated RF receiver front-end has a measured power conversion gain of 17.48 dB and an input referred third-order intercept point （IIP3） of-7.02 dBm. The total noise figure is 4.5 dB and the power is only 14 mW by post-simulations.展开更多
The tuned substrate self-bias in a radio-frequency inductively coupled plasma is controlled by varying the impedance of an external tuning LCR （inductor, capacitor and resistor） network inserted between the substrat...The tuned substrate self-bias in a radio-frequency inductively coupled plasma is controlled by varying the impedance of an external tuning LCR （inductor, capacitor and resistor） network inserted between the substrate and the ground. In experiments, it was found that the variation of the tuned substrate self-bias with the tuning capacitance demonstrated three features, namely, continuity, instability and bistability. In this paper, a numerical study is focused on the elucidation of the physical mechanisms underlying continuity and bistability. For the sake of simplicity and feasibility to include the key factors influencing the tuned substrate bias, the tedious calculation of inductive-coupling to obtain the plasma density axtd electron temperature is omitted, and discussion of the tuned substrate self-bias is made under the prescribed plasma density and electron temperature. On the other hand, the parameters influencing capacitive- coupling are retained in modeling the system with an equivalent circuit. It is found that multi-stable state appears when one of the parameters, such as the resistance in LCR, substrate area and plasma density, decreased to its critical value, or the rf voltage or electron temperature increased to the critical value individually. In the reverse cases, the tuned substrate self-bias varies continuously with the tuning capacitance.展开更多
The tokamak plasma flows induced by the local radio frequency （RF） forces in the core region are analyzed. The effective components of local RF forces are composed of the momentum absorption term and the resonant pa...The tokamak plasma flows induced by the local radio frequency （RF） forces in the core region are analyzed. The effective components of local RF forces are composed of the momentum absorption term and the resonant parallel momentum transport term （i.e. the parallel component of the resonant ponderomotive forces）. Different momentum balance relations are em- ployed to calculate the plasma flows depending on different assumptions of momentum transport. With the RF fields solved from RF simulation codes, the toroidal and poloidal flows by these forces under the lower hybrid current drive and the mode conversion ion cyclotron resonance heating on EAST-like plasmas are evaluated.展开更多
Polymer ethylene oxide （PEO） functional films can be used as a material for biocompatible research. In this paper, we investigated the structures of PEO-like films polymerized on Si surface with diethlyene glycole d...Polymer ethylene oxide （PEO） functional films can be used as a material for biocompatible research. In this paper, we investigated the structures of PEO-like films polymerized on Si surface with diethlyene glycole dimethyl ether （DEGDME） as the precursor and Ar as the dilution gas by plasma enhanced chemical vapor deposition （PECVD）. And the pulse plasma model was employed to polymerize the functional films. The chemical structure of the coatings was investigated by Fourier transform inference （FTIR） and X-ray photoelectron spectroscopy （XPS）. The results indicate that PEO-like structure films can be polymerized by DEGDME/Ar plasma. The concentration of C-O functional groups polymerized in the long plasma-off time was much higher than that in the short plasma-off time. With the same discharge parameters, moreover, the C-O ratio in polymers increased with a higher injected power.展开更多
According to the newest matching mode between the two cyclotrons at HIRFL, the beam obit properties were researched, especially for the harm of existing ‘over-magnetic shim’ in SSC as well as the trajectory in the n...According to the newest matching mode between the two cyclotrons at HIRFL, the beam obit properties were researched, especially for the harm of existing ‘over-magnetic shim’ in SSC as well as the trajectory in the new mode. The results obtained are encouraging.展开更多
The formula for calculating the threshold of average transmitting power of cylindrical TE11 mode window is revised by accurate deduction and a practical method for calculating the temperature increment of the dielectr...The formula for calculating the threshold of average transmitting power of cylindrical TE11 mode window is revised by accurate deduction and a practical method for calculating the temperature increment of the dielectric disk in cylindrical box type window is given. Meanwhile,a typical cylindrical box type window is calculated and used as an example to discuss the power capacity, the special harmfulness and elimination of ghost mode resonance when the window is used to transmit high power Continuous Wave(CW).展开更多
A longitudinal accumulation scheme based on a triple-frequency RF system,in which the static radio frequency(RF)bucket is lengthened to be compatible with the realizable raise time of a fast pulse kicker,is proposed i...A longitudinal accumulation scheme based on a triple-frequency RF system,in which the static radio frequency(RF)bucket is lengthened to be compatible with the realizable raise time of a fast pulse kicker,is proposed in this paper.With this technique,the bunch from a booster can be captured by the longitudinal acceptance without any disturbance to the stored bunch,which remains at the center.This composite RF system consists of three different frequencies,which can be regarded as the conventional bunch lengthening RF system(usually containing fundamental and third harmonic cavities)extended by an additional second harmonic RF cavity.In this paper,we discuss the RF jitter and the transverse mode-coupling instability(TMCI)when using this special RF system.Considering several different bunch profiles,we discuss the beam stability with regard to the RF jitter.However,for the TMCI we assume an ideal bunch profile,where the bunch is exactly lengthened to the maximum extent.While macroparticle simulation is the main method used to study the impact of the RF jitter,numerical analysis and simulations for the TMCI while using a triple-frequency RF system are also presented in this paper.An approximation formula,based on the existing model,is also derived to estimate the impact of the TMCI on the single bunch current threshold when using harmonic cavities.展开更多
基金financially supported by National Natural Science Foundation of China(NSFC)(Nos.12275043 and 11935005)the Fundamental Research Funds for the Central Universities(No.DUT21TD104)China Scholarship Council(No.202106060085)。
文摘The effect of a negative DC bias,|V_(dc)|,on the electrical parameters and discharge mode is investigated experimentally in a radiofrequency(RF)capacitively coupled Ar plasma operated at different RF voltage amplitudes and gas pressures.The electron density is measured using a hairpin probe and the spatio-temporal distribution of the electron-impact excitation rate is determined by phase-resolved optical emission spectroscopy.The electrical parameters are obtained based on the waveforms of the electrode voltage and plasma current measured by a voltage probe and a current probe.It was found that at a low|V_(dc)|,i.e.inα-mode,the electron density and RF current decline with increasing|V_(dc)|;meanwhile,the plasma impedance becomes more capacitive due to a widened sheath.Therefore,RF power deposition is suppressed.When|V_(dc)|exceeds a certain value,the plasma changes toα–γhybrid mode(or the discharge becomes dominated by theγ-mode),manifesting a drastically growing electron density and a moderately increasing RF current.Meanwhile,the plasma impedance becomes more resistive,so RF power deposition is enhanced with|V_(dc)|.We also found that the electrical parameters show similar dependence on|V_(dc)|at different RF voltages,andα–γmode transition occurs at a lower|V_(dc)|at a higher RF voltage.By increasing the pressure,plasma impedance becomes more resistive,so RF power deposition and electron density are enhanced.In particular,theα–γmode transition tends to occur at a lower|V_(dc)|with increase in pressure.
基金supported by the National Magnetic Conlinement Fusion Science Program of China(Nos.2015GB102000 and 2015GB103000)
文摘In the 2016 EAST experimental campaign,a steady-state long-pulse H-mode discharge with an ITER-like tungsten divertor lasting longer than one minute has been obtained using only RF heating and current drive,through an integrated control of the wall conditioning,plasma configuration,divertor heat flux,particle exhaust,impurity management,and effective coupling of multiple RF heating and current drive sources at high injected power.The plasma current（Ip - 0.45 MA） was fully-noninductively driven（Vloop 〈 0.0 V） by a combination of-2.5 MW LHW,-0.4 MW ECH and -0.8 MW ICRF.This result demonstrates the progress of physics and technology studies on EAST,and will benefit the physics basis for steady state operation of ITER and CFETR.
文摘The radio frequency (rf) self-bias of the substrate in a rf inductively coupled plasma is controlled by means of varying the impedance of an external LC network inserted between the substrate and the ground. Experimental studies were done on the relations of the tuned substrate self-bias with varying discharge and external circuit parameters. Under a certain discharge gas pressure, the curves of tuned substrate self-bias Vtsb versus tuning capacitance Ct demonstrate jumps and hysteresises when rf discharge power is higher than a threshold. The hysteresis loop in terms of △Ctcrit1(= Ccrit1-Ccrit2, here,Ccrit1, Ccrit2 are critical capacitance magnitudes under which the tuned substrate self-bias jumps) decreases with increasing rf discharge power, while the maximum |Vtsbimn| is achieved in the middle discharge-power region. Under a constant discharge power |Vtsb min|, Ccrit1 and Ccrit2 achieve their minimums in the middle gas-pressure region. When the tuning capacitance is pre-set at a lower value, Ttsb varies slightly with gas-flow rate; in the case of tuning capacitance sufficiently approaching Ctcriti, Vtsb undergoes the jump and hysteresis with the changing gas-flow rate. By inserting a resistor R into the external network, the characteristics of Vtsb-Ct curves are changed with the reduced quality factor Q depending on resistance values. Based on inductive- and capacitive-coupling characteristics of inductively coupled plasma, the dependence of a plasma sheath on plasma parameters, and the impedance properties of the substrate branch, the observed results can be qualitatively interpreted.
文摘This study presents the RF design of a linear accelerator(linac)operated in single-bunch mode.The accelerator is powered by a compressed RF pulse produced from a SLED-I type RF pulse compressor.The compressed RF pulse has an unflattened shape with a gradient distribution which varies over the structure cells.An analytical study to optimize the accelerating structure together with the RF pulse compressor is performed.The optimization aims to maximize the efficiency by minimizing the required RF power from the generator for a given average accelerating gradient.The study shows that,owing to the compressed RF pulse shape,the constant-impedance structure has a similar efficiency to the optimal structure using varying iris apertures.The constant-impedance structure is easily fabricated and is favorable for the design of a linac with a pulse compressor.We utilize these findings to optimize the RF design of a X-band linac using the constant-impedance accelerating structure for the Tsinghua Thomson X-ray source facility.
基金Project supported by the National Natural Science Foundation of China(No.60776021)the Open Fund Project of Key Laboratory in Hunan Universities,China(No.10K016)
文摘A differential low-voltage high gain current-mode integrated RF front end for an 802.1 lb WLAN is proposed. It contains a differential transeonductance low noise amplifier （Gm-LNA） and a differential current- mode down converted mixer. The single terminal of the Gm-LNA contains just one MOS transistor, two capacitors and two inductors. The gate source shunt capacitors, Cx1 and Cx2, can not only reduce the effects of gate-source Cgs on resonance frequency and input-matching impedance, but they also enable the gate inductance Lgl,2 to be selected at a very small value. The current-mode mixer is composed of four switched current mirrors. Adjusting the ratio of the drain channel sizes of the switched current mirrors can increase the gain of the mixer and accordingly increase the gain of RF receiver front-end. The RF front-end operates under 1 V supply voltage. The receiver RFIC was fabricated using a chartered 0. 18 μm CMOS process. The integrated RF receiver front-end has a measured power conversion gain of 17.48 dB and an input referred third-order intercept point （IIP3） of-7.02 dBm. The total noise figure is 4.5 dB and the power is only 14 mW by post-simulations.
基金supported by National Science Foundation of China (No.10175014)
文摘The tuned substrate self-bias in a radio-frequency inductively coupled plasma is controlled by varying the impedance of an external tuning LCR （inductor, capacitor and resistor） network inserted between the substrate and the ground. In experiments, it was found that the variation of the tuned substrate self-bias with the tuning capacitance demonstrated three features, namely, continuity, instability and bistability. In this paper, a numerical study is focused on the elucidation of the physical mechanisms underlying continuity and bistability. For the sake of simplicity and feasibility to include the key factors influencing the tuned substrate bias, the tedious calculation of inductive-coupling to obtain the plasma density axtd electron temperature is omitted, and discussion of the tuned substrate self-bias is made under the prescribed plasma density and electron temperature. On the other hand, the parameters influencing capacitive- coupling are retained in modeling the system with an equivalent circuit. It is found that multi-stable state appears when one of the parameters, such as the resistance in LCR, substrate area and plasma density, decreased to its critical value, or the rf voltage or electron temperature increased to the critical value individually. In the reverse cases, the tuned substrate self-bias varies continuously with the tuning capacitance.
基金supported by National Natural Science Foundation of China(Nos.11405218,11325524,11375235 and 11261140327)in part by the National Magnetic Confinement Fusion Science Program of China(Nos.2013GB111002,2013GB112001 and 2013GB112010)the Program of Fusion Reactor Physics and Digital Tokamak with the CAS"One-Three-Five"Strategic Planning
文摘The tokamak plasma flows induced by the local radio frequency （RF） forces in the core region are analyzed. The effective components of local RF forces are composed of the momentum absorption term and the resonant parallel momentum transport term （i.e. the parallel component of the resonant ponderomotive forces）. Different momentum balance relations are em- ployed to calculate the plasma flows depending on different assumptions of momentum transport. With the RF fields solved from RF simulation codes, the toroidal and poloidal flows by these forces under the lower hybrid current drive and the mode conversion ion cyclotron resonance heating on EAST-like plasmas are evaluated.
文摘Polymer ethylene oxide （PEO） functional films can be used as a material for biocompatible research. In this paper, we investigated the structures of PEO-like films polymerized on Si surface with diethlyene glycole dimethyl ether （DEGDME） as the precursor and Ar as the dilution gas by plasma enhanced chemical vapor deposition （PECVD）. And the pulse plasma model was employed to polymerize the functional films. The chemical structure of the coatings was investigated by Fourier transform inference （FTIR） and X-ray photoelectron spectroscopy （XPS）. The results indicate that PEO-like structure films can be polymerized by DEGDME/Ar plasma. The concentration of C-O functional groups polymerized in the long plasma-off time was much higher than that in the short plasma-off time. With the same discharge parameters, moreover, the C-O ratio in polymers increased with a higher injected power.
文摘According to the newest matching mode between the two cyclotrons at HIRFL, the beam obit properties were researched, especially for the harm of existing ‘over-magnetic shim’ in SSC as well as the trajectory in the new mode. The results obtained are encouraging.
文摘The formula for calculating the threshold of average transmitting power of cylindrical TE11 mode window is revised by accurate deduction and a practical method for calculating the temperature increment of the dielectric disk in cylindrical box type window is given. Meanwhile,a typical cylindrical box type window is calculated and used as an example to discuss the power capacity, the special harmfulness and elimination of ghost mode resonance when the window is used to transmit high power Continuous Wave(CW).
文摘A longitudinal accumulation scheme based on a triple-frequency RF system,in which the static radio frequency(RF)bucket is lengthened to be compatible with the realizable raise time of a fast pulse kicker,is proposed in this paper.With this technique,the bunch from a booster can be captured by the longitudinal acceptance without any disturbance to the stored bunch,which remains at the center.This composite RF system consists of three different frequencies,which can be regarded as the conventional bunch lengthening RF system(usually containing fundamental and third harmonic cavities)extended by an additional second harmonic RF cavity.In this paper,we discuss the RF jitter and the transverse mode-coupling instability(TMCI)when using this special RF system.Considering several different bunch profiles,we discuss the beam stability with regard to the RF jitter.However,for the TMCI we assume an ideal bunch profile,where the bunch is exactly lengthened to the maximum extent.While macroparticle simulation is the main method used to study the impact of the RF jitter,numerical analysis and simulations for the TMCI while using a triple-frequency RF system are also presented in this paper.An approximation formula,based on the existing model,is also derived to estimate the impact of the TMCI on the single bunch current threshold when using harmonic cavities.
