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NO_2气体传感器敏感材料 被引量:12
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作者 余道建 沈瑞琪 《传感器技术》 CSCD 北大核心 2001年第4期1-5,共5页
描述了近十年来用作NO2 气体传感器的酞菁类和氧化物半导体敏感材料。总结了这两类材料的成膜条件、薄膜表面形态和结构以及它们的敏感特性。
关键词 二氧化氮 气体传感器 敏感材料
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Strategy and Future Prospects to Develop Room-Temperature-Recoverable NO2 Gas Sensor Based on Two-Dimensional Molybdenum Disulfide 被引量:8
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作者 Abhay V.Agrawal Naveen Kumar Mukesh Kumar 《Nano-Micro Letters》 SCIE EI CAS CSCD 2021年第2期305-362,共58页
Nitrogen dioxide(NO2),a hazardous gas with acidic nature,is continuously being liberated in the atmosphere due to human activity.The NO2 sensors based on traditional materials have limitations of high-temperature requ... Nitrogen dioxide(NO2),a hazardous gas with acidic nature,is continuously being liberated in the atmosphere due to human activity.The NO2 sensors based on traditional materials have limitations of high-temperature requirements,slow recovery,and performance degradation under harsh environmental conditions.These limitations of traditional materials are forcing the scientific community to discover future alternative NO2 sensitive materials.Molybdenum disulfide(MoS2)has emerged as a potential candidate for developing next-generation NO2 gas sensors.MoS2 has a large surface area for NO2 molecules adsorption with controllable morphologies,facile integration with other materials and compatibility with internet of things(IoT)devices.The aim of this review is to provide a detailed overview of the fabrication of MoS2 chemiresistance sensors in terms of devices(resistor and transistor),layer thickness,morphology control,defect tailoring,heterostructure,metal nanoparticle doping,and through light illumination.Moreover,the experimental and theoretical aspects used in designing MoS2-based NO2 sensors are also discussed extensively.Finally,the review concludes the challenges and future perspectives to further enhance the gas-sensing performance of MoS2.Understanding and addressing these issues are expected to yield the development of highly reliable and industry standard chemiresistance NO2 gas sensors for environmental monitoring. 展开更多
关键词 MOS2 no2 gas sensors Light illumination HETEROJUNCTION
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氧化钨纳米线气敏传感器的制备及其室温NO_2敏感特性 被引量:2
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作者 赵博硕 强晓永 +1 位作者 秦岳 胡明 《物理学报》 SCIE EI CAS CSCD 北大核心 2018年第5期245-252,共8页
纳米结构的氧化钨有高比表面积和气体吸附能力,在气体传感器领域得到了广泛研究.本文采用磁控溅射金属钨薄膜和两步热氧化工艺在二氧化硅衬底上生长出氧化钨纳米线.通过改变第二步氧化温度,研究退火温度对氧化钨纳米线气敏特性的影响.... 纳米结构的氧化钨有高比表面积和气体吸附能力,在气体传感器领域得到了广泛研究.本文采用磁控溅射金属钨薄膜和两步热氧化工艺在二氧化硅衬底上生长出氧化钨纳米线.通过改变第二步氧化温度,研究退火温度对氧化钨纳米线气敏特性的影响.采用扫描电子显微镜、X射线衍射仪、X射线光电子能谱分析仪和透射射电子显微镜表征材料的微观特性和晶体结构,利用静态配气法测试气敏性能.研究结果表明,经过退火处理后氧化钨纳米线密度略微降低,300℃比400℃退火后的氧化钨结晶性差,对应的表面态含量多,有利于室温气体敏感性.测试NO_2的气敏性能,经过对比得出300℃退火温度下制备的氧化钨纳米线在室温下表现出较很好的气敏响应,对6 ppm(1 ppm=10^(-6))NO_2达到2.5,对检测极限0.5 ppm NO_2响应达1.37.氧化钨纳米线在室温下表现出反常的P型响应,是因为氧化钨纳米线表面被氧气吸附形成反型层,空穴取代电子成为主要载流子所致. 展开更多
关键词 氧化钨 纳米线 no2气体传感器 响应类型
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Preparation of two-dimensional molybdenum disulfide for NO2 detection at room temperature 被引量:1
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作者 Xin Yu Ding Wang +2 位作者 Yuqiu Wang Ji Yan Xianying Wang 《Chinese Chemical Letters》 SCIE CAS CSCD 2020年第8期2099-2102,共4页
In this work,the two-dimensional MoS2 film was prepared by sulfuring the molybdenum atomic layer on SiO2/Si substrate.The reaction temperature,heating rate,holding time and carrier gas flow rate were inve stigated com... In this work,the two-dimensional MoS2 film was prepared by sulfuring the molybdenum atomic layer on SiO2/Si substrate.The reaction temperature,heating rate,holding time and carrier gas flow rate were inve stigated compre hensively.The quality of MoS2 film was characterized by optical microscopy,atomic fo rce microscopy,Raman and photoluminescence spectro scopy.The characte rization results showed that the optimum synthesis parameters were heating rate of 25℃/min,reaction temperature of 750℃,holding time of 30 min and carrier gas velocity of 100 sccm.The MoS2 gas sensor was fabricated and its gas sensing performance was tested.The test results indicated that the sensor had a good response to both reducing gas(NH3)and oxidizing gas(NO2)at room temperature.The sensitivity to 100 ppm of NO2 was 31.3%,and the response/recovery times were 4 s and 5 s,respectively.In addition,the limit of detection could be as low as 1 ppm.This work helps us to develop low power and integrable room temperature NO2 sensors. 展开更多
关键词 MoS2 film no2 detection Two-dimensional materials gas sensors NAnoDEVICES Room temperature detection
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新型NO_2薄膜气敏元件的研究
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作者 林伟 黄世震 陈文哲 《半导体技术》 CAS CSCD 北大核心 2010年第7期664-668,共5页
采用射频反应磁控溅射方法制备了氧化钨/多壁碳纳米管(WO3/MWCNTs)薄膜材料,并在此基础上研制NO2气敏元件。采用X射线衍射仪(XRD)、X光电子能谱仪(XPS)、扫描电子显微镜(SEM)来研究WO3/MWCNTs材料的表面形貌、表面化学状态、表面化学元... 采用射频反应磁控溅射方法制备了氧化钨/多壁碳纳米管(WO3/MWCNTs)薄膜材料,并在此基础上研制NO2气敏元件。采用X射线衍射仪(XRD)、X光电子能谱仪(XPS)、扫描电子显微镜(SEM)来研究WO3/MWCNTs材料的表面形貌、表面化学状态、表面化学元素等材料特性。研究结果表明,MWCNTs已经掺杂进WO3材料,合成的WO3/MWCNTs气敏元件表现出对NO2气体有较高的灵敏度和较好的响应-恢复特性,并解释了该元件的工作机理。 展开更多
关键词 氧化钨/多壁碳纳米管 射频反应磁控溅射 no2气敏元件
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ZnSe/NiO heterostructure-based chemiresistive-type sensors for low-concentration NO_(2) detection 被引量:3
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作者 Wei Liu Ding Gu +3 位作者 Jian-Wei Zhang Xiao-Gan Li Marina N.Rumyantseva Alexander M.Gaskov 《Rare Metals》 SCIE EI CAS CSCD 2021年第6期1632-1641,共10页
Novel ZnSe/NiO heterostructure nanocomposites were successfully prepared by one-step hydrothermal method.The ZnSe/NiO-based sensor exhibits a response of~96.47% to 8×10^(-6) NO_(2) at 140℃,which is significantly... Novel ZnSe/NiO heterostructure nanocomposites were successfully prepared by one-step hydrothermal method.The ZnSe/NiO-based sensor exhibits a response of~96.47% to 8×10^(-6) NO_(2) at 140℃,which is significantly higher than those of intrinsic ZnSe-based(no response)and NiO-based(~19.65%)sensors.The theoretical detection limit(LOD)of the sensor is calculated to be 8.91×10^(-9),indicating that the sensor can be applied to detect the ultralow concentrations of NO_(2).The effect of NiO content on the gas-sensing performance of the nanocomposites was investigated in detail.The optimal NiO content in the nanocomposite is determined to be15.16%to achieve the highest response.The as-fabricated sensor also presents an excellent selectivity to several possible interferents such as methanol,ethanol,acetone,benzene,ammonia and formaldehyde.The enhanced sensing performance can be attributed to the formation of p-p heterostructures between ZnSe and NiO,which induces the charge transfer across the interfaces and yields more active sites. 展开更多
关键词 ZnSe/NiO heterostructure no_(2)detection gas sensors Charge transfer
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