In this study,a new method was developed to realize two-dimensional(2D)figure correction of grazing-incidence X-ray mirrors using a one-dimensional(1D)ion-beam figuring system.A mask of holes was specifically designed...In this study,a new method was developed to realize two-dimensional(2D)figure correction of grazing-incidence X-ray mirrors using a one-dimensional(1D)ion-beam figuring system.A mask of holes was specifically designed to generate removal functions at different widths and extend the figuring capability over a wide area.Accordingly,a long mirror could be manufactured.Using this method,the surface height root-mean-square(RMS)error of the center area of 484 mm×16 mm was reduced from 11.49 nm to 2.01 nm,and the 1D meridional RMS error reached 1.0 nm.The proposed method exhibits high precision and cost effectiveness for production of long X-ray mirrors.展开更多
Growing data volume of masks tremendously increases manufacture cost. The cost increase is partially due to the complicated optical proximity corrections applied on mask design. In this paper, a yield-aware dissec- ti...Growing data volume of masks tremendously increases manufacture cost. The cost increase is partially due to the complicated optical proximity corrections applied on mask design. In this paper, a yield-aware dissec- tion method is presented. Based on the recognition of yield related mask context, the dissection result provides sufficient degrees of freedom to keep fidelity on critical sites while still retaining the frugality of modified designs. Experiments show that the final mask volume using the new method is reduced to about 50% of the conventional method.展开更多
基金supported by the National Key R&D Program of China(Grant No.2022YFF0709101)the National Natural Science Foundation of China(Grant No.12235011).
文摘In this study,a new method was developed to realize two-dimensional(2D)figure correction of grazing-incidence X-ray mirrors using a one-dimensional(1D)ion-beam figuring system.A mask of holes was specifically designed to generate removal functions at different widths and extend the figuring capability over a wide area.Accordingly,a long mirror could be manufactured.Using this method,the surface height root-mean-square(RMS)error of the center area of 484 mm×16 mm was reduced from 11.49 nm to 2.01 nm,and the 1D meridional RMS error reached 1.0 nm.The proposed method exhibits high precision and cost effectiveness for production of long X-ray mirrors.
文摘Growing data volume of masks tremendously increases manufacture cost. The cost increase is partially due to the complicated optical proximity corrections applied on mask design. In this paper, a yield-aware dissec- tion method is presented. Based on the recognition of yield related mask context, the dissection result provides sufficient degrees of freedom to keep fidelity on critical sites while still retaining the frugality of modified designs. Experiments show that the final mask volume using the new method is reduced to about 50% of the conventional method.
