Chemical mechanical polishing (CMP) process is commonly regarded as the best method for achieving global planarization in the field of surface finishing with ultra-precision. The development of investigation on materi...Chemical mechanical polishing (CMP) process is commonly regarded as the best method for achieving global planarization in the field of surface finishing with ultra-precision. The development of investigation on material removal mechanisms for different materials used in com-puter hard disk and ultra-large scale integration fabrication are reviewed here. The mechanisms underlying the interac-tion between the abrasive particles and polished surfaces during CMP are addressed, and some ways to investigate the polishing mechanisms are presented.展开更多
目的设计单晶蓝宝石衬底化学机械抛光的合理方案,探究主要抛光工艺参数对抛光衬底的表面质量和材料去除率的影响,并得到一组材料去除率高且表面质量满足要求的抛光工艺参数。方法借助原子力显微镜和精密天平分别对衬底表面形貌和材料去...目的设计单晶蓝宝石衬底化学机械抛光的合理方案,探究主要抛光工艺参数对抛光衬底的表面质量和材料去除率的影响,并得到一组材料去除率高且表面质量满足要求的抛光工艺参数。方法借助原子力显微镜和精密天平分别对衬底表面形貌和材料去除率进行分析,采用单因素实验法探究了抛光粒子、抛光时间、抛光压力和抛光盘转速对蓝宝石衬底化学机械抛光的表面质量和材料去除率的影响,并设计合理的交互正交优化实验寻求一组较优的抛光工艺参数。结果在蓝宝石衬底化学机械精抛过程中,在抛光时间为0.5 h、抛光压力为45.09 k Pa、抛光盘转速为50 r/min、SiO_2抛光液粒子质量分数为15%、抛光液流量为60 m L/min的条件下,蓝宝石衬底材料的去除率达41.89 nm/min,表面粗糙度降低至0.342 nm,衬底表面台阶结构清晰,满足后续外延工序的要求。结论采用化学机械抛光技术和优化的工艺参数,可同时获得较高的材料去除率和高质量的蓝宝石衬底表面。展开更多
Based on the remote sensing (RS) and geographic information system (GIS) analysis of the Landsat multispectral scanner (MSS) and thematic mapper (TM) satellite images of 1983, 1993, and 2005, the present research exam...Based on the remote sensing (RS) and geographic information system (GIS) analysis of the Landsat multispectral scanner (MSS) and thematic mapper (TM) satellite images of 1983, 1993, and 2005, the present research examined the effectiveness of the urban construction boundaries (UCBs) in containing urban growth within the 6th Ring Road of Beijing Municipality. Three indicators on boundary control were proposed, through which the effectiveness of boundary containment, land inventory sufficiency and illegal adjacent development to the UCBs were explored. The results suggested that, first, the UCBs were limited in effectiveness in containing urban growth; second, the area encompassed by the UCBs might not be designed large enough to accommodate new development. The frustration of the urban growth control through the UCBs mainly resulted from the lack of a transparent system for urban land use planning and control to provide sufficient information, the limitation of the traditional land use prediction method to consider contingencies, and the absence of a mechanism to monitor and adjust the UCBs to respond just in time to urban change.展开更多
The effluent from the pulping of E. urophylla by alkali sodium sulfite chemi mechanical process(AS-CMP) was characterized for its biodegradability by photosynthetic bacteria (PSB). Chemical coagulation post treat...The effluent from the pulping of E. urophylla by alkali sodium sulfite chemi mechanical process(AS-CMP) was characterized for its biodegradability by photosynthetic bacteria (PSB). Chemical coagulation post treatment of biotreated wastewater was also studied. One month continuous treatment in the laboratory indicated that the COD Cr , BOD 5 and SS removals in biotreatment stages reached 56%, 83% and 89% respectively, and the CH 2Cl 2 extractives decreased from 10.7 mg/L to 7.7 mg/L. In chemical coagulation post treatment stage, the effects of process conditions, such as coagulant dosage, pH value and the coordinated coagulation flocculation treatment of three kinds of coagulants on coagulation effectiveness were discussed. The optimum operating conditions were given.展开更多
文摘Chemical mechanical polishing (CMP) process is commonly regarded as the best method for achieving global planarization in the field of surface finishing with ultra-precision. The development of investigation on material removal mechanisms for different materials used in com-puter hard disk and ultra-large scale integration fabrication are reviewed here. The mechanisms underlying the interac-tion between the abrasive particles and polished surfaces during CMP are addressed, and some ways to investigate the polishing mechanisms are presented.
文摘目的设计单晶蓝宝石衬底化学机械抛光的合理方案,探究主要抛光工艺参数对抛光衬底的表面质量和材料去除率的影响,并得到一组材料去除率高且表面质量满足要求的抛光工艺参数。方法借助原子力显微镜和精密天平分别对衬底表面形貌和材料去除率进行分析,采用单因素实验法探究了抛光粒子、抛光时间、抛光压力和抛光盘转速对蓝宝石衬底化学机械抛光的表面质量和材料去除率的影响,并设计合理的交互正交优化实验寻求一组较优的抛光工艺参数。结果在蓝宝石衬底化学机械精抛过程中,在抛光时间为0.5 h、抛光压力为45.09 k Pa、抛光盘转速为50 r/min、SiO_2抛光液粒子质量分数为15%、抛光液流量为60 m L/min的条件下,蓝宝石衬底材料的去除率达41.89 nm/min,表面粗糙度降低至0.342 nm,衬底表面台阶结构清晰,满足后续外延工序的要求。结论采用化学机械抛光技术和优化的工艺参数,可同时获得较高的材料去除率和高质量的蓝宝石衬底表面。
基金Project supported by the National Natural Science Foundation of China (No. 50678088)the National Key Technology R&D Program (No. 2006BAJ14B08)the Postdoctoral Science Foundation of China (No. 20080430210)
文摘Based on the remote sensing (RS) and geographic information system (GIS) analysis of the Landsat multispectral scanner (MSS) and thematic mapper (TM) satellite images of 1983, 1993, and 2005, the present research examined the effectiveness of the urban construction boundaries (UCBs) in containing urban growth within the 6th Ring Road of Beijing Municipality. Three indicators on boundary control were proposed, through which the effectiveness of boundary containment, land inventory sufficiency and illegal adjacent development to the UCBs were explored. The results suggested that, first, the UCBs were limited in effectiveness in containing urban growth; second, the area encompassed by the UCBs might not be designed large enough to accommodate new development. The frustration of the urban growth control through the UCBs mainly resulted from the lack of a transparent system for urban land use planning and control to provide sufficient information, the limitation of the traditional land use prediction method to consider contingencies, and the absence of a mechanism to monitor and adjust the UCBs to respond just in time to urban change.
文摘The effluent from the pulping of E. urophylla by alkali sodium sulfite chemi mechanical process(AS-CMP) was characterized for its biodegradability by photosynthetic bacteria (PSB). Chemical coagulation post treatment of biotreated wastewater was also studied. One month continuous treatment in the laboratory indicated that the COD Cr , BOD 5 and SS removals in biotreatment stages reached 56%, 83% and 89% respectively, and the CH 2Cl 2 extractives decreased from 10.7 mg/L to 7.7 mg/L. In chemical coagulation post treatment stage, the effects of process conditions, such as coagulant dosage, pH value and the coordinated coagulation flocculation treatment of three kinds of coagulants on coagulation effectiveness were discussed. The optimum operating conditions were given.
