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基于MOCVD生长的高Al组分Al_xGa_(1-x)N的HRXRD研究 被引量:2
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作者 杜阳 李培咸 +1 位作者 周小伟 白俊春 《电子科技》 2009年第5期69-71,77,共4页
通过MOCVD设备,在c面蓝宝石衬底上异质外延了不同Al组分含量的AlxGa1-xN材料,生长过程中采用了低温缓冲层技术、脉冲原子外延技术(PALE)和多层超晶格缓冲技术,例如AlGaN/AlNSLs结构,成功得到了表面光滑无裂纹的AlxGa1-xN膜。并且通过HR... 通过MOCVD设备,在c面蓝宝石衬底上异质外延了不同Al组分含量的AlxGa1-xN材料,生长过程中采用了低温缓冲层技术、脉冲原子外延技术(PALE)和多层超晶格缓冲技术,例如AlGaN/AlNSLs结构,成功得到了表面光滑无裂纹的AlxGa1-xN膜。并且通过HRXRD对材料进行了多个晶面方向上的摇摆曲线和2θ~ω表征测试,在此测试基础上对材料的Al组分、a轴和c轴的晶格常数以及位错密度进行了相应的计算,并定性的分析了材料的应变状态。 展开更多
关键词 MOCVD alxga1-xn HRxRD 位错 晶格常数
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Influence of Polarization-Induced Electric Fields on Optical Properties of Intersubband Transitions in Al_xGa_(1-x)N/GaN Double Quantum Wells 被引量:1
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作者 雷双英 沈波 +3 位作者 许福军 杨志坚 徐柯 张国义 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2006年第3期403-408,共6页
The influence of polarization-induced electric fields on the electron distribution and the optical properties of intersubband transitions (ISBT) in AlxGa(1-x)N/GaN coupled double quantum wells (DQWs) is investig... The influence of polarization-induced electric fields on the electron distribution and the optical properties of intersubband transitions (ISBT) in AlxGa(1-x)N/GaN coupled double quantum wells (DQWs) is investigated by self-consistent calculation. It is found that the polarization-induced potential drop leads to an asymmetric potential profile of AlxGa(1-x)N/GaN DQWs even though the two wells have the same width and depth. The polarization effects result in a very large Stark shift between the odd and even order subbands,thus shortening the wavelength of the ISBT between the first odd order and the second even order (1odd-2 ) subbands. Meanwhile, the electron distribution becomes asymmetric due to the polarization effects, and the absorption coefficient of the 1odd-2 ISBT decreases with increasing polarization field discontinuity. 展开更多
关键词 alxga1-xn/Gan DQWs intersubband transition polarization field discontinuity
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