The angle dependence of optical phonon modes of an AlN bulk single crystal from the m-plane（1100） and c-plane（0001） surfaces, respectively, is investigated by polarized Raman spectroscopy in a backscattering confi...The angle dependence of optical phonon modes of an AlN bulk single crystal from the m-plane（1100） and c-plane（0001） surfaces, respectively, is investigated by polarized Raman spectroscopy in a backscattering configuration at room temperature. Corresponding Raman selection rules are derived according to measured scattering geometries to illustrate the angle dependence. The angle-dependent intensities of phonon modes are discussed and compared to theoretical scattering intensities, yielding the Raman tensor elements of A1（TO）, E22, E1（TO）, and A1（LO） phonon modes and the relative phase difference between the two complex elements of A1（TO）. Furthermore, the Raman tensor of wurtzite AlN is compared with that of wurtzite ZnO reported in previous work, revealing the intrinsic differences of lattice vibration dynamics between AlN and ZnO.展开更多
本文采用物理气相传输法对不同衬底温度和温差下制备的氮化铝(AlN)晶体形貌进行研究,研究结果表明AlN晶体生长受到AlN晶面表面能、Al基元平均动能和AlN晶体表面极性的共同影响。当温差为60℃时,AlN晶体(0001)面生长速率小于(10-10)面,Al...本文采用物理气相传输法对不同衬底温度和温差下制备的氮化铝(AlN)晶体形貌进行研究,研究结果表明AlN晶体生长受到AlN晶面表面能、Al基元平均动能和AlN晶体表面极性的共同影响。当温差为60℃时,AlN晶体(0001)面生长速率小于(10-10)面,AlN以带状形式生长。将该工艺应用于AlN同质生长中,研究结果表明:温差为60℃时AlN晶体(0001)面呈现畴生长模式,该晶体质量最差;温差为35℃时AlN晶体(0001)面呈现台阶流生长模式,该晶体质量最优;温差为20℃时AlN晶体(0001)面呈现台阶簇生长模式,该晶体容易开裂。通过工艺优化最终获得了直径为40 mm AlN单晶衬底,完全满足器件制备需求。展开更多
通过物理气相传输(PVT)法在石墨系统中制备了绿色、无色和琥珀色氮化铝(Al N)单晶,在金属系统中制备了琥珀色Al N单晶。晶体中杂质含量测试结果表明石墨系统中琥珀色的Al N晶体比绿色和无色Al N晶体C、Si杂质含量低1~2个数量级,金属系...通过物理气相传输(PVT)法在石墨系统中制备了绿色、无色和琥珀色氮化铝(Al N)单晶,在金属系统中制备了琥珀色Al N单晶。晶体中杂质含量测试结果表明石墨系统中琥珀色的Al N晶体比绿色和无色Al N晶体C、Si杂质含量低1~2个数量级,金属系统中琥珀色Al N晶体杂质含量最低,C、Si、O元素含量均在1018cm-3级别。Al N晶体的吸收图谱和光致发光图谱的分析结果表明,Al N晶体存在着位于4.7 e V、3.5 e V、2.8 e V、1.85 e V的4个吸收峰,其中4.7 e V和3.5 e V的吸收峰导致了Al N吸收截止边的红移,该吸收峰分别源于碳占氮位(CN)的点缺陷和VAl与O杂质的复合缺陷,2.80 e V的吸收峰导致了Al N晶体的琥珀色,该吸收峰是C元素和O元素共同导致的,1.85 e V的吸收峰导致了Al N晶体的绿色,该吸收峰是Si元素和C元素导致的。展开更多
AlN single crystal grown by physical vapor transport (PVT) using homogeneous seed is considered as the most promising approach to obtain high-quality AlN boule.In this work,the morphology of AlN single crystals grown ...AlN single crystal grown by physical vapor transport (PVT) using homogeneous seed is considered as the most promising approach to obtain high-quality AlN boule.In this work,the morphology of AlN single crystals grown under different modes (3D islands and single spiral center) were investigated.It is proved that,within an optimized thermal distribution chamber system,the surface temperature of AlN seed plays an important role in crystal growth,revealing a direct relationship between growth mode and growth condition.Notably,a high-quality AlN crystal,with (002) and (102) reflection peaks of 65and 36 arcsec at full width at half maximum (FWHM),was obtained grown under a single spiral center mode.And on which,a high-quality Al_x Ga_(1–x) N epitaxial layer with high Al content (x=0.54) was also obtained.The FWHMs of (002) and (102) reflection of Al_x Ga_(1–x) N were 202 and 496 arcsec,respectively,which shows superiority over their counterpart grown on SiC or a sapphire substrate.展开更多
基金financially supported by the Special Program for the State Key Program of National Natural Science of China (No. 61136001)the Major Research Plan of the National Natural Science Foundation of China (No. 91333207)
文摘The angle dependence of optical phonon modes of an AlN bulk single crystal from the m-plane（1100） and c-plane（0001） surfaces, respectively, is investigated by polarized Raman spectroscopy in a backscattering configuration at room temperature. Corresponding Raman selection rules are derived according to measured scattering geometries to illustrate the angle dependence. The angle-dependent intensities of phonon modes are discussed and compared to theoretical scattering intensities, yielding the Raman tensor elements of A1（TO）, E22, E1（TO）, and A1（LO） phonon modes and the relative phase difference between the two complex elements of A1（TO）. Furthermore, the Raman tensor of wurtzite AlN is compared with that of wurtzite ZnO reported in previous work, revealing the intrinsic differences of lattice vibration dynamics between AlN and ZnO.
基金Shenzhen Science and Technology Program(JCYJ20210324141607019)Natural Science Foundation of Shandong Province(ZR2022QF044)National Natural Science Foundation of China(52202265)。
文摘本文采用物理气相传输法对不同衬底温度和温差下制备的氮化铝(AlN)晶体形貌进行研究,研究结果表明AlN晶体生长受到AlN晶面表面能、Al基元平均动能和AlN晶体表面极性的共同影响。当温差为60℃时,AlN晶体(0001)面生长速率小于(10-10)面,AlN以带状形式生长。将该工艺应用于AlN同质生长中,研究结果表明:温差为60℃时AlN晶体(0001)面呈现畴生长模式,该晶体质量最差;温差为35℃时AlN晶体(0001)面呈现台阶流生长模式,该晶体质量最优;温差为20℃时AlN晶体(0001)面呈现台阶簇生长模式,该晶体容易开裂。通过工艺优化最终获得了直径为40 mm AlN单晶衬底,完全满足器件制备需求。
文摘通过物理气相传输(PVT)法在石墨系统中制备了绿色、无色和琥珀色氮化铝(Al N)单晶,在金属系统中制备了琥珀色Al N单晶。晶体中杂质含量测试结果表明石墨系统中琥珀色的Al N晶体比绿色和无色Al N晶体C、Si杂质含量低1~2个数量级,金属系统中琥珀色Al N晶体杂质含量最低,C、Si、O元素含量均在1018cm-3级别。Al N晶体的吸收图谱和光致发光图谱的分析结果表明,Al N晶体存在着位于4.7 e V、3.5 e V、2.8 e V、1.85 e V的4个吸收峰,其中4.7 e V和3.5 e V的吸收峰导致了Al N吸收截止边的红移,该吸收峰分别源于碳占氮位(CN)的点缺陷和VAl与O杂质的复合缺陷,2.80 e V的吸收峰导致了Al N晶体的琥珀色,该吸收峰是C元素和O元素共同导致的,1.85 e V的吸收峰导致了Al N晶体的绿色,该吸收峰是Si元素和C元素导致的。
基金supported by the National Key Research and Development Plan of China (2017YFB0404103)the National Natural Science Foundation of China (No.51702297)。
文摘AlN single crystal grown by physical vapor transport (PVT) using homogeneous seed is considered as the most promising approach to obtain high-quality AlN boule.In this work,the morphology of AlN single crystals grown under different modes (3D islands and single spiral center) were investigated.It is proved that,within an optimized thermal distribution chamber system,the surface temperature of AlN seed plays an important role in crystal growth,revealing a direct relationship between growth mode and growth condition.Notably,a high-quality AlN crystal,with (002) and (102) reflection peaks of 65and 36 arcsec at full width at half maximum (FWHM),was obtained grown under a single spiral center mode.And on which,a high-quality Al_x Ga_(1–x) N epitaxial layer with high Al content (x=0.54) was also obtained.The FWHMs of (002) and (102) reflection of Al_x Ga_(1–x) N were 202 and 496 arcsec,respectively,which shows superiority over their counterpart grown on SiC or a sapphire substrate.
