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铁电薄膜及铁电存储器的研究进展 被引量:13
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作者 周益春 唐明华 《材料导报》 EI CAS CSCD 北大核心 2009年第9期1-19,共19页
铁电薄膜是具有铁电性且厚度尺寸为数纳米到数微米的薄膜材料,因其在非挥发性铁电随机存储器方面的潜在应用而受到广泛关注。综述了新型无铅、无疲劳Bi4Ti3O12(BIT)基铁电薄膜材料的制备和改性及性能表征方法,阐述了铁电薄膜的3种失效... 铁电薄膜是具有铁电性且厚度尺寸为数纳米到数微米的薄膜材料,因其在非挥发性铁电随机存储器方面的潜在应用而受到广泛关注。综述了新型无铅、无疲劳Bi4Ti3O12(BIT)基铁电薄膜材料的制备和改性及性能表征方法,阐述了铁电薄膜的3种失效机制及铁电薄膜存储器的研究现状,最后提出了铁电薄膜及存储器今后可能的研究方向。 展开更多
关键词 铁电薄膜 掺杂改性 失效机制 铁电薄膜存储器
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铁电存储器研究进展 被引量:7
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作者 包定华 《压电与声光》 CSCD 北大核心 1993年第3期60-63,共4页
近几年来,铁电存储器研究取得了很大进展.铁电存储器因其所具有的许多优越性和良好的应用前景而受到人们的广泛关注和重视.本文介绍了铁电存储器的工作原理及设计与制作方法.并对其研究现状及进一步发展趋势作了简要的评述.
关键词 铁电存储器 铁电薄膜 存贮器
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铁电存储器和IC卡 被引量:1
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作者 罗维根 丁爱丽 《压电与声光》 CSCD 北大核心 1999年第1期22-27,共6页
铁电薄膜与半导体集成产生了新一代非易失存储器,与传统的半导体非易失存储器比较具有突出的优点,是新一代IC卡的理想存储芯片。
关键词 铁电薄膜 存储器 IC卡 半导体存储器
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并行接口铁电存储器FM1808及其应用 被引量:2
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作者 李敏 孟臣 《国外电子元器件》 2004年第3期36-39,共4页
RAMTRON公司生产的并行接口高性能铁电存储器FM1808是NV -SRAM的理想替代产品。文中介绍了FM1808的性能特点、引脚功能和工作原理 ,同时重点介绍了铁电存储器的应用特点及与其它类型存储器之间的应用差别 。
关键词 并行接口 铁电存储器 FM1808 FRAM 应用
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Two-dimensional In_(2)Se_(3):A rising advanced material for ferroelectric data storage 被引量:6
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作者 Yu-Ting Huang Nian-Ke Chen +4 位作者 Zhen-Ze Li Xue-Peng Wang Hong-Bo Sun Shengbai Zhang Xian-Bin Li 《InfoMat》 SCIE CAS 2022年第8期54-81,共28页
Ferroelectric memory is a promising candidate for next-generation nonvolatile memory owing to its outstanding performance such as low power consump-tion,fast speed,and high endurance.However,the ferroelectricity of co... Ferroelectric memory is a promising candidate for next-generation nonvolatile memory owing to its outstanding performance such as low power consump-tion,fast speed,and high endurance.However,the ferroelectricity of conven-tional ferroelectric materials will be eliminated by the depolarization field when the size drops to the nanometer scale.As a result,the miniaturization of ferroelectric devices was hindered,which makes ferroelectric memory unable to keep up with the development of integrated-circuit(IC)miniaturization.Recently,a two-dimensional(2D)In2Se3 was reported to maintain stable ferro-electricity at the ultrathin scale,which is expected to break through the bottle-neck of miniaturization.Soon,devices based on 2D In2Se3,including the ferroelectric field-effect transistor,ferroelectric channel transistor,synaptic fer-roelectric semiconductor junction,and ferroelectric memristor were demon-strated.However,a comprehensive understanding of the structures and the ferroelectric-switching mechanism of 2D In2Se3 is still lacking.Here,the atomic structures of different phases,the dynamic mechanism of ferroelectric switching,and the performance/functions of the latest devices of 2D In2Se3 are reviewed.Furthermore,the correlations among the structures,the properties,and the device performance are analyzed.Finally,several crucial problems or challenges and possible research directions are put forward.We hope that this review paper can provide timely knowledge and help for the research commu-nity to develop 2D In2Se3 based ferroelectric memory and computing technol-ogy for practical industrial applications. 展开更多
关键词 2D ferroelectric device 2D ferroelectric material 2D In2Se3 neuromorphic computing nonvolatile memory
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铁电存储器的研究进展 被引量:5
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作者 付承菊 郭冬云 《微纳电子技术》 CAS 2006年第9期414-419,共6页
介绍了铁电存储器的存储原理,同时对两种铁电存储器(铁电随机存取存储器和铁电场效应晶体管存储器)的研究进展、当前存在的问题以及我国目前在这一领域的研究现状进行了简单介绍,并对今后的技术发展进行了展望。
关键词 铁电存储器 铁电随机存取存储器 铁电场效应晶体管
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Challenges and recent advances in HfO_(2)-based ferroelectric films for non-volatile memory applications
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作者 Ming-Hao Shao Rui-Ting Zhao +15 位作者 Houfang Liu Wen-Jia Xu Yi-Da Guo Da-Peng Huang Yu-Zhe Yang Xin-Ru Li Wancheng Shao Peng-Hui Shen Junwei Liu Kuanmao Wang Jinguo Zheng Zhao-Yi Yan Jian-Lan Yan Tian Lu Yi Yang Tian-Ling Ren 《Chip》 EI 2024年第3期50-72,共23页
The emergence of data-centric applications such as artificial intelligence(AI),machine learning,and the Internet of Things(IoT),has promoted surges in demand for storage memories with high operating speed and nonvolat... The emergence of data-centric applications such as artificial intelligence(AI),machine learning,and the Internet of Things(IoT),has promoted surges in demand for storage memories with high operating speed and nonvolatile characteristics.HfO_(2)-based ferroelectric memory technologies,which emerge as a promising alternative,have attracted considerable attention due to their high performance,energy efficiency,and full compatibility with the standard complementary metal-oxide-semiconductors(CMOS)process.These nonvolatile storage elements,such as ferroelectric random access memory(FeRAM),ferroelectric field-effect transistors(FeFETs),and ferroelectric tunnel junctions(FTJs),possess different data access mechanisms,individual merits,and specific application boundaries in next-generation memories or even beyond von Neumann architecture.This paper provides an overview of ferroelectric HfO2 memory technologies,addresses the current challenges,and offers insights into future research directions and prospects. 展开更多
关键词 ferroelectric memory ferroelectric random-access memory ferroelectricfield effect transistor ferroelectric tunneling junction Hafnium oxide
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水下冲击波超压高速采集测试技术研究 被引量:6
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作者 刘洋 张丕状 《核电子学与探测技术》 CAS CSCD 北大核心 2013年第1期113-116,共4页
针对冲击波场测量中存在的通用测试系统采样速度较慢、布设不方便等问题,研制了具有增益可调和无线数据传输功能的新型高速冲击波压力测试系统,信号输入级使用电荷输出型压电传感器并设计了信号调理电路,存储模块使用铁电存储器实现高... 针对冲击波场测量中存在的通用测试系统采样速度较慢、布设不方便等问题,研制了具有增益可调和无线数据传输功能的新型高速冲击波压力测试系统,信号输入级使用电荷输出型压电传感器并设计了信号调理电路,存储模块使用铁电存储器实现高速存储省略了传统的缓存电路。经试验证明系统能够稳定运行,并能够适用多种电荷输出型传感器。 展开更多
关键词 电荷放大器 冲击波测试 铁电存储器
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Dual-logic-in-memory implementation with orthogonal polarization of van der Waals ferroelectric heterostructure 被引量:1
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作者 Jingjie Niu Sumin Jeon +6 位作者 Donggyu Kim Sungpyo Baek Hyun Ho Yoo Jie Li Ji-Sang Park Yoonmyung Lee Sungjoo Lee 《InfoMat》 SCIE CSCD 2024年第2期107-117,共11页
The rapid advancement of AI-enabled applications has resulted in an increasing need for energy-efficient computing hardware.Logic-in-memory is a promising approach for processing the data stored in memory,wherein fast... The rapid advancement of AI-enabled applications has resulted in an increasing need for energy-efficient computing hardware.Logic-in-memory is a promising approach for processing the data stored in memory,wherein fast and efficient computations are possible owing to the parallel execution of reconfigurable logic operations.In this study,a dual-logic-in-memory device,which can simultaneously perform two logic operations in four states,is demonstrated using van der Waals ferroelectric field-effect transistors(vdW FeFETs).The proposed dual-logic-in-memory device,which also acts as a twobit storage device,is a single bidirectional polarization-integrated ferroelectric field-effect transistor(BPI-FeFET).It is fabricated by integrating an in-plane vdW ferroelectric semiconductor SnS and an out-of-plane vdW ferroelectric gate dielectric material—CuInP_(2)S_(6).Four reliable resistance states with excellent endurance and retention characteristics were achieved.The two-bit storage mechanism in a BPI-FeFET was analyzed from two perspectives:carrier density and carrier injection controls,which originated from the out-of-plane polarization of the gate dielectric and in-plane polarization of the semiconductor,respectively.Unlike conventional multilevel FeFETs,the proposed BPIFeFET does not require additional pre-examination or erasing steps to switch from/to an intermediate polarization,enabling direct switching between the four memory states.To utilize the fabricated BPI-FeFET as a dual-logic-inmemory device,two logical operations were selected(XOR and AND),and their parallel execution was demonstrated.Different types of logic operations could be implemented by selecting different initial states,demonstrating various types of functions required for numerous neural network operations.The flexibility and efficiency of the proposed dual-logic-in-memory device appear promising in the realization of next-generation low-power computing systems. 展开更多
关键词 ferroelectric field-effect transistor in-plane ferroelectricity logic-in-memory out-of-plane ferroelectricity
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氧化铪基铁电薄膜的研究进展
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作者 秦羽铖 蒋昊岚 +3 位作者 闵月淇 谢文钦 张静 谢亮 《微纳电子技术》 CAS 2024年第12期28-38,共11页
氧化铪(HfO_(2))基铁电薄膜拥有稳定、独特的铁电极化,且与CMOS集成电路制造工艺的高度兼容性,成为下一代高密度、非易失性铁电存储器的重要候选材料,因而备受关注。首先探讨了HfO_(2)基铁电薄膜的不同制备方法,分析了脉冲激光沉积法、... 氧化铪(HfO_(2))基铁电薄膜拥有稳定、独特的铁电极化,且与CMOS集成电路制造工艺的高度兼容性,成为下一代高密度、非易失性铁电存储器的重要候选材料,因而备受关注。首先探讨了HfO_(2)基铁电薄膜的不同制备方法,分析了脉冲激光沉积法、磁控溅射法、原子层沉积法等制备方法的特点。其次,阐述了退火处理、唤醒效应、底电极等因素对该类薄膜铁电性的影响,并对其铁电性的起源进行了介绍。此外,总结了HfO_(2)基铁电薄膜在铁电存储器、铁电隧道结、铁电场效应晶体管等领域的应用研究成果。最后对HfO_(2)基铁电薄膜研究中存在的问题及发展方向进行了总结与展望。 展开更多
关键词 氧化铪(HfO_(2))薄膜 铁电性 铁电正交相 铁电性起源 铁电存储器
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Ferroelectric materials for neuroinspired computing applications
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作者 Dong Wang Shenglan Hao +2 位作者 Brahim Dkhil Bobo Tian Chungang Duan 《Fundamental Research》 CAS CSCD 2024年第5期1272-1291,共20页
In recent years,the emergence of numerous applications of artificial intelligence(AI)has sparked a new technological revolution.These applications include facial recognition,autonomous driving,intelligent robotics,and... In recent years,the emergence of numerous applications of artificial intelligence(AI)has sparked a new technological revolution.These applications include facial recognition,autonomous driving,intelligent robotics,and image restoration.However,the data processing and storage procedures in the conventional von Neumann architecture are discrete,which leads to the“memory wall”problem.As a result,such architecture is incompatible with AI requirements for efficient and sustainable processing.Exploring new computing architectures and material bases is therefore imperative.Inspired by neurobiological systems,in-memory and in-sensor computing techniques provide a new means of overcoming the limitations inherent in the von Neumann architecture.The basis of neural morphological computation is a crossbar array of high-density,high-efficiency non-volatile memory devices.Among the numerous candidate memory devices,ferroelectric memory devices with non-volatile polarization states,low power consumption and strong endurance are expected to be ideal candidates for neuromorphic computing.Further research on the complementary metal-oxide-semiconductor(CMOS)compatibility for these devices is underway and has yielded favorable results.Herein,we first introduce the development of ferroelectric materials as well as their mechanisms of polarization reversal and detail the applications of ferroelectric synaptic devices in artificial neural networks.Subsequently,we introduce the latest developments in ferroelectrics-based in-memory and in-sensor computing.Finally,we review recent works on hafnium-based ferroelectric memory devices with CMOS process compatibility and give a perspective for future developments. 展开更多
关键词 ferroelectric materials ferroelectric synaptic devices Artificial neural network In-memory computing In-sensor computing
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Ferromagnetic and ferroelectric two-dimensional materials for memory application 被引量:5
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作者 Zhen Liu Longjiang Deng Bo Peng 《Nano Research》 SCIE EI CAS CSCD 2021年第6期1802-1813,共12页
The discoveries of ferromagnetic and ferroelectric two-dimensional(2D)materials have dramatically inspired intense interests due to their potential in the field of spintronic and nonvolatile memories.This review focus... The discoveries of ferromagnetic and ferroelectric two-dimensional(2D)materials have dramatically inspired intense interests due to their potential in the field of spintronic and nonvolatile memories.This review focuses on the latest 2D ferromagnetic and ferroelectric materials that have been most recently studied,including insulating ferromagnetic,metallic ferromagnetic,antiferromagnetic and ferroelectric 2D materials.The fundamental properties that lead to the long-range magnetic orders of 2D materials are discussed.The low Curie temperature(Tc)and instability in 2D systems limits their use in practical applications,and several strategies to address this constraint are proposed,such as gating and composition stoichiometry.A van der Waals(vdW)heterostructure comprising 2D ferromagnetic and ferroelectric materials will open a door to exploring exotic physical phenomena and achieve multifunctional or nonvolatile devices. 展开更多
关键词 two-dimensional(2D)materials FERROMAGNETIC ferroelectric HETEROSTRUCTURE nonvolatile memory
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二维铁电半导体层级处理模块设计及低功耗高性能人工视觉系统应用 被引量:1
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作者 吴广成 向立 +17 位作者 王文强 姚程栋 颜泽毅 张成 吴家鑫 刘勇 郑弼元 刘华伟 胡城伟 孙兴霞 朱晨光 王一喆 熊雄 吴燕庆 高亮 李东 潘安练 李晟曼 《Science Bulletin》 SCIE EI CAS CSCD 2024年第4期473-482,共10页
The growth of data and Internet of Things challenges traditional hardware,which encounters efficiency and power issues owing to separate functional units for sensors,memory,and computation.In this study,we designed an... The growth of data and Internet of Things challenges traditional hardware,which encounters efficiency and power issues owing to separate functional units for sensors,memory,and computation.In this study,we designed an a-phase indium selenide(a-In_(2)Se_(3))transistor,which is a two-dimensional ferroelectric semiconductor as the channel material,to create artificial optic-neural and electro-neural synapses,enabling cutting-edge processing-in-sensor(PIS)and computing-in-memory(CIM)functionalities.As an optic-neural synapse for low-level sensory processing,the a-In_(2)Se_(3)transistor exhibits a high photoresponsivity(2855 A/W)and detectivity(2.91×10^(14)Jones),facilitating efficient feature extraction.For high-level processing tasks as an electro-neural synapse,it offers a fast program/erase speed of 40 ns/50μs and ultralow energy consumption of 0.37 aJ/spike.An AI vision system using a-In_(2)Se_(3)transistors has been demonstrated.It achieved an impressive recognition accuracy of 92.63%within 12 epochs owing to the synergistic combination of the PIS and CIM functionalities.This study demonstrates the potential of the a-In_(2)Se_(3)transistor in future vision hardware,enhancing processing,power efficiency,and AI applications. 展开更多
关键词 Two-dimensional ferroelectric SEMICONDUCTOR Processing-in-sensor Computing-in-memory Synaptic device Artificial-intelligence vision system
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Overview of one transistor type of hybrid organic ferroelectric non-volatile memory 被引量:3
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作者 Young Tea Chun Daping Chu 《Instrumentation》 2015年第1期65-74,共10页
Organic ferroelectric memory devices based on field effect transistors that can be configured between two stable states of on and off have been widely researched as the next generation data storage media in recent yea... Organic ferroelectric memory devices based on field effect transistors that can be configured between two stable states of on and off have been widely researched as the next generation data storage media in recent years.This emerging type of memory devices can lead to a new instrument system as a potential alternative to previous non-volatile memory building blocks in future processing units because of their numerous merits such as cost-effective process,simple structure and freedom in substrate choices.This bi-stable non-volatile memory device of information storage has been investigated using several organic or inorganic semiconductors with organic ferroelectric polymer materials.Recent progresses in this ferroelectric memory field,hybrid system have attracted a lot of attention due to their excellent device performance in comparison with that of all organic systems.In this paper,a general review of this type of ferroelectric non-volatile memory is provided,which include the device structure,organic ferroelectric materials,electrical characteristics and working principles.We also present some snapshots of our previous study on hybrid ferroelectric memories including our recent work based on zinc oxide nanowire channels. 展开更多
关键词 ORGANIC ferroelectric field effect TRANSISTOR non-volatile memory HYBRID
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硅基PZT薄膜的制备与工艺损伤 被引量:2
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作者 魏朝刚 任天令 +4 位作者 邵天奇 王小宁 李春晓 刘理天 朱钧 《清华大学学报(自然科学版)》 EI CAS CSCD 北大核心 2003年第4期557-560,共4页
以 Pb Ti O3(PT)作为种子层 ,在 Si衬底上用改进的溶胶凝胶法制备了 PZT薄膜 ,并用 RIE法刻蚀形成 MFM(金属铁电层金属 )结构的电容 ,以用于铁电随机存取存储器 (Fe RAM)中。测得 PZT薄膜相对介电常数、矫顽场和剩余极化强度分别为 10 0... 以 Pb Ti O3(PT)作为种子层 ,在 Si衬底上用改进的溶胶凝胶法制备了 PZT薄膜 ,并用 RIE法刻蚀形成 MFM(金属铁电层金属 )结构的电容 ,以用于铁电随机存取存储器 (Fe RAM)中。测得 PZT薄膜相对介电常数、矫顽场和剩余极化强度分别为 10 0 0 ,30 k V/ cm和 16 μC/ cm2 ,漏电流在 0 .1n A / cm2 量级 ,达到 Fe RAM的应用要求。铁电膜与CMOS电路集成时对铁电膜的铁电性可能造成的工艺损伤(如刻蚀损伤、氢损伤和应力损伤等 )的物理机制进行了初步研究和讨论 。 展开更多
关键词 铁电薄膜 硅基PZT薄膜 制备工艺 工艺损伤 溶胶-凝胶法 介电常数 矫顽场 剩余极化强度
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HfO_(2)基铁电薄膜的结构、性能调控及典型器件应用 被引量:2
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作者 袁国亮 王琛皓 +2 位作者 唐文彬 张睿 陆旭兵 《物理学报》 SCIE EI CAS CSCD 北大核心 2023年第9期69-90,共22页
大数据、物联网和人工智能的快速发展对存储芯片、逻辑芯片和其他电子元器件的性能提出了越来越高的要求.本文介绍了HfO_(2)基铁电薄膜的铁电性起源,通过掺杂元素改变晶体结构的对称性或引入适量的氧空位来降低相转变的能垒可以增强HfO_... 大数据、物联网和人工智能的快速发展对存储芯片、逻辑芯片和其他电子元器件的性能提出了越来越高的要求.本文介绍了HfO_(2)基铁电薄膜的铁电性起源,通过掺杂元素改变晶体结构的对称性或引入适量的氧空位来降低相转变的能垒可以增强HfO_(2)基薄膜的铁电性,在衬底和电极之间引入应力、减小薄膜厚度、构建纳米层结构和降低退火温度等方法也可以稳定铁电相.与钙钛矿氧化物铁电薄膜相比, HfO_(2)基铁电薄膜具有与现有半导体工艺兼容性更强和在纳米级厚度下铁电性强等优点.铁电存储器件理论上可以达到闪存的存储密度,读写次数超过1010次,同时具有读写速度快、低操作电压和低功耗等优点.此外,还总结了HfO_(2)基薄膜在负电容晶体管、铁电隧道结、神经形态计算和反铁电储能等方面的主要研究成果.最后,讨论了HfO_(2)基铁电薄膜器件当前面临的挑战和未来的机遇. 展开更多
关键词 HfO_(2)基薄膜 铁电极化 铁电存储器
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与CMOS工艺兼容的氧化铪基铁电材料的亚稳相及其存储器器件力学 被引量:3
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作者 周益春 《湘潭大学学报(自然科学版)》 CAS 2019年第3期1-21,共21页
该文对新型的氧化铪基铁电晶体管存储器的巨大优势及其面临的工程和科学问题进行了详细评述,提出了存储器“器件力学”的概念.作为电子信息技术最核心的存储器是衡量国家综合实力和关系国家安全的战略性技术,我国全部依赖进口,几乎不能... 该文对新型的氧化铪基铁电晶体管存储器的巨大优势及其面临的工程和科学问题进行了详细评述,提出了存储器“器件力学”的概念.作为电子信息技术最核心的存储器是衡量国家综合实力和关系国家安全的战略性技术,我国全部依赖进口,几乎不能做到自主可控.新型存储器是我们“变轨超车”的绝佳机会.氧化铪基铁电晶体管(FeFET)存储器与CMOS(互补金属氧化物半导体)工艺完全兼容,这就为其产业化创造了得天独厚的先天条件.HfO2基铁电薄膜的FeFET存储器与CMOS兼容,可以实现FinFET(鱼鳍3D架构),可以突破后摩尔时代、有望填补“存储鸿沟”,具有超高抗辐射能力、能耗低等突出优点,将引领新型存储器的发展方向.疲劳性能不是很好、存储器存储窗口的均匀性欠佳是限制氧化铪基FeFET存储器产业化的技术瓶颈,即工程问题.亚稳相、复杂界面效应、存储器“器件力学”的理论基础不清楚是限制与CMOS工艺兼容的氧化铪基铁电存储器产业化的关键科学问题.需要从氧化铪基FeFET存储器面临的工程问题提炼出基础科学问题,通过氧化铪基材料的铁电物理本质、亚稳相及其本构关系的研究,将界面的物理力学性能研究作为一个桥梁,提出栅极电压VG即“场效应”和“铁电性”双控制因素下的存储器“器件力学”理论模型和实验研究方法,从而为解决氧化铪基FeFET存储器的技术瓶颈提供理论和实验支撑. 展开更多
关键词 铁电材料 氧化铪 亚稳相 铁电存储器 CMOS工艺兼容 器件力学
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Evidence for reversible oxygen ion movement during electrical pulsing:enabler of emerging ferroelectricity in binary oxides
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作者 Huan Liu Fei Yu +9 位作者 Bing Chen Zheng-Dong Luo Jiajia Chen Yong Zhang Ze Feng Hong Dong Xiao Yu Yan Liu Genquan Han Yue Hao 《Materials Futures》 2024年第3期195-205,共11页
Ferroelectric HfO_(2)-based materials and devices show promising potential for applications in information technology but face challenges with inadequate electrostatic control,degraded reliability,and serious variatio... Ferroelectric HfO_(2)-based materials and devices show promising potential for applications in information technology but face challenges with inadequate electrostatic control,degraded reliability,and serious variation in effective oxide thickness scaling.We demonstrate a novel interface-type switching strategy to realize ferroelectric characteristics in atomic-scale amorphous binary oxide films,which are formed in oxygen-deficient conditions by atomic layer deposition at low temperatures.This approach can avoid the shortcomings of reliability degradation and gate leakage increment in scaling polycrystalline doped HfO_(2)-based films.Using theoretical modeling and experimental characterization,we show the following.(1)Emerging ferroelectricity exists in ultrathin oxide systems as a result of microscopic ion migration during the switching process.(2)These ferroelectric binary oxide films are governed by an interface-limited switching mechanism,which can be attributed to oxygen vacancy migration and surface defects related to electron(de)trapping.(3)Transistors featuring ultrathin amorphous dielectrics,used for non-volatile memory applications with an operating voltage reduced to±1 V,have also been experimentally demonstrated.These findings suggest that this strategy is a promising approach to realizing next-generation complementary metal-oxide semiconductors with scalable ferroelectric materials. 展开更多
关键词 ferroelectric binary oxide mobile ion amorphous dielectric nonvolatile memory
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Sensing with extended gate negative capacitance ferroelectric field-effect transistors
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作者 Honglei Xue Yue Peng +3 位作者 Qiushi Jing Jiuren Zhou Genquan Han Wangyang Fu 《Chip》 EI 2024年第1期18-23,共6页
With major signal analytical elements situated away from the measurement environment,extended gate(EG)ion-sensitive fieldeffect transistors(ISFETs)offer prospects for whole chip circuit design and system integration o... With major signal analytical elements situated away from the measurement environment,extended gate(EG)ion-sensitive fieldeffect transistors(ISFETs)offer prospects for whole chip circuit design and system integration of chemical sensors.In this work,a highly sensitive and power-efficient ISFET was proposed based on a metal-ferroelectric-insulator gate stack with negative capacitance–induced super-steep subthreshold swing and ferroelectric memory function.Along with a remotely connected EG electrode,the architecture facilitates diverse sensing functions for future establishment of smart biochemical sensor platforms. 展开更多
关键词 Extended gate Ion-sensitive field-effect transistors Negative capacitance Sub-60 mV/dec subthreshold swing ferroelectric memory effect
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环境温度对HfO_(2)铁电存储器的质子辐照效应影响研究
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作者 朱旭昊 袁亦辉 +6 位作者 黄铭敏 马瑶 毕津顺 许高博 龚敏 杨治美 李芸 《微电子学》 CAS 北大核心 2024年第2期330-337,共8页
基于HfO_(2)的铁电随机存取存储器(FeRAM)具有功耗低、存取速度快,易于小型化,抗干扰能力强等优势,在航天航空领域有广袤的发展空间。然而,FeRAM在太空环境下的抗辐照性能尚未得到全面的研究。研究了W/TiN/Hf_(0.5)Zr_(0.5)O_(2)(HZO)/... 基于HfO_(2)的铁电随机存取存储器(FeRAM)具有功耗低、存取速度快,易于小型化,抗干扰能力强等优势,在航天航空领域有广袤的发展空间。然而,FeRAM在太空环境下的抗辐照性能尚未得到全面的研究。研究了W/TiN/Hf_(0.5)Zr_(0.5)O_(2)(HZO)/TiN铁电存储器在常温和高温环境下经5 MeV质子辐照后的电学特性和铁电畴结构变化。通过电学和压电响应力显微镜(PFM)手段表征发现,在常温质子辐照后,电容器的介电常数(ε_(r))和剩余极化强度(P_(r))值均增大,器件的铁电性能提升,常温高注量质子辐照有利于存储器在太空环境中工作,但随着辐照时环境温度升高,HZO存储器的铁电性能下降,漏电流增大,铁电存储器的各项性能明显退化。 展开更多
关键词 HfO_(2) 铁电存储器 质子辐照 温度
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