The hot deformation behavior of a Ta-particle reinforced TiAl composite was studied.Ti-48Al-2Cr-2Nb-0.2 W(at.%)/20 vol.%Ta metal matrix composite was fabricated by spark plasma sintering.The deformation behavior was i...The hot deformation behavior of a Ta-particle reinforced TiAl composite was studied.Ti-48Al-2Cr-2Nb-0.2 W(at.%)/20 vol.%Ta metal matrix composite was fabricated by spark plasma sintering.The deformation behavior was investigated by hot compression tests at the temperature ranging from 1050 to 1200℃ and the strain rate ranging from 1×10-3 to 1 s-1.The constitutive equation containing true strain variables was established.The values of activation energy Q under different strain degrees are between 240 and 280 kJ/mol,which are lower than that of pure TiAl.Based on dynamic material modeling,the processing maps at various strain degrees were established,and the optimized parameters for hot working are 1050-1100℃ and 0.005-0.01 s-1.The microstructural evolution during deformation was characterized,which indicated that the dynamic recrystallization plays an important role in this process.展开更多
利用E-t曲线、动电位极化曲线研究了氢氟酸-硝酸体系中溶液主体成分、温度对Ti-6Al-4V腐蚀加工溶解行为和特征的影响,通过测试阳极与阴极反应动力学揭示钛合金腐蚀加工动力学规律。研究结果表明,在该溶液体系中钛合金的腐蚀加工是侵蚀-...利用E-t曲线、动电位极化曲线研究了氢氟酸-硝酸体系中溶液主体成分、温度对Ti-6Al-4V腐蚀加工溶解行为和特征的影响,通过测试阳极与阴极反应动力学揭示钛合金腐蚀加工动力学规律。研究结果表明,在该溶液体系中钛合金的腐蚀加工是侵蚀-溶解-钝化循环往复的过程,硝酸的钝化作用与氢氟酸的溶解作用同时存在,当钝化膜的生成速度和钛基体的溶解速度达到动态平衡时,腐蚀速度处于相对稳定的状态。腐蚀加工初期阶段氢氟酸浓度会影响钛合金表面氧化膜的破坏,浓度较低时,氧化膜较难破坏,自腐蚀电位正移;浓度较高时,氧化膜容易被腐蚀溶解,自腐蚀电位负移。氢氟酸浓度和温度增加,反应活化能减少,腐蚀溶解加剧。氢氟酸浓度较低时,温度对加工速度的影响占主导地位;浓度增加到80 m L/L,温度的影响减弱,氢氟酸起主要作用。硝酸的钝化作用在减少总体腐蚀速度的同时可有效改善微观表面的凹凸不平,使微观表面趋于平整。展开更多
Batch-processing wet-etch reactors are the key equipment widely used in chip fabrication,and their performance is largely affected by the internal structure.This work develops a three-dimensional computational fluid d...Batch-processing wet-etch reactors are the key equipment widely used in chip fabrication,and their performance is largely affected by the internal structure.This work develops a three-dimensional computational fluid dynamics(CFD)model considering heat generation of wet-etching reactions to investigate the fluid flow and heat transfer in the wet-etch reactor.The backflow is observed below and above the wafer region,as the flow resistance in this region is high.The temperature on the upper part of a wafer is higher due to the accumulation of reaction heat,and the average temperature of the side wafer is highest as its convective heat transfer is weakest.Narrowing the gap between wafer and reactor wall can force the etchant to flow in the wafer region and then facilitate the convective heat transfer,leading to better within-wafer and wafer-to-wafer etch uniformities.An inlet angle of 60°balances fluid by-pass and mechanical energy loss,and it yields the best temperature and etch uniformities.The batch with 25wafers has much wider flow channels and much lower flow resistance compared with that with 50wafers,and thus it shows better temperature and etch uniformities.These results and the CFD model should serve to guide the optimal design of batch-processing wet-etch reactors.展开更多
An optimized design of laser range finding system using the self-mixing effect in a single-mode verticalcavity surface-emitting laser （VCSEL） is proposed. In order to improve the ranging accuracy and expand dynamic ...An optimized design of laser range finding system using the self-mixing effect in a single-mode verticalcavity surface-emitting laser （VCSEL） is proposed. In order to improve the ranging accuracy and expand dynamic measurement range, we apply difference frequency analog phase-locked loop （PLL） instead of fast Fourier transform （FFT） to process signal, and choose the optimum triangular wave frequency .fm= 500 Hz and small modulation current △Ip p = 0.28 mA to modulate single-mode VCSEL. The experiment results show that, without controlling the laser＇s temperature, the ranging accuracy is better than 2 mm and the measurement dynamic range is as large as 50-500 mm when the sampling time is 0.1 s and the room temperature is 0--55℃.展开更多
基金Project(51625404)supported by the National Natural Science Foundation for Distinguished Young Scholar of China
文摘The hot deformation behavior of a Ta-particle reinforced TiAl composite was studied.Ti-48Al-2Cr-2Nb-0.2 W(at.%)/20 vol.%Ta metal matrix composite was fabricated by spark plasma sintering.The deformation behavior was investigated by hot compression tests at the temperature ranging from 1050 to 1200℃ and the strain rate ranging from 1×10-3 to 1 s-1.The constitutive equation containing true strain variables was established.The values of activation energy Q under different strain degrees are between 240 and 280 kJ/mol,which are lower than that of pure TiAl.Based on dynamic material modeling,the processing maps at various strain degrees were established,and the optimized parameters for hot working are 1050-1100℃ and 0.005-0.01 s-1.The microstructural evolution during deformation was characterized,which indicated that the dynamic recrystallization plays an important role in this process.
文摘利用E-t曲线、动电位极化曲线研究了氢氟酸-硝酸体系中溶液主体成分、温度对Ti-6Al-4V腐蚀加工溶解行为和特征的影响,通过测试阳极与阴极反应动力学揭示钛合金腐蚀加工动力学规律。研究结果表明,在该溶液体系中钛合金的腐蚀加工是侵蚀-溶解-钝化循环往复的过程,硝酸的钝化作用与氢氟酸的溶解作用同时存在,当钝化膜的生成速度和钛基体的溶解速度达到动态平衡时,腐蚀速度处于相对稳定的状态。腐蚀加工初期阶段氢氟酸浓度会影响钛合金表面氧化膜的破坏,浓度较低时,氧化膜较难破坏,自腐蚀电位正移;浓度较高时,氧化膜容易被腐蚀溶解,自腐蚀电位负移。氢氟酸浓度和温度增加,反应活化能减少,腐蚀溶解加剧。氢氟酸浓度较低时,温度对加工速度的影响占主导地位;浓度增加到80 m L/L,温度的影响减弱,氢氟酸起主要作用。硝酸的钝化作用在减少总体腐蚀速度的同时可有效改善微观表面的凹凸不平,使微观表面趋于平整。
基金financially supported by the National Natural Science Foundation of China(22378115 and 22078090)the Shanghai Rising-Star Program(21QA1402000)+1 种基金the Natural Science Foundation of Shanghai(21ZR1418100)the Fundamental Research Funds for the Central Universities(JKA01231803)。
文摘Batch-processing wet-etch reactors are the key equipment widely used in chip fabrication,and their performance is largely affected by the internal structure.This work develops a three-dimensional computational fluid dynamics(CFD)model considering heat generation of wet-etching reactions to investigate the fluid flow and heat transfer in the wet-etch reactor.The backflow is observed below and above the wafer region,as the flow resistance in this region is high.The temperature on the upper part of a wafer is higher due to the accumulation of reaction heat,and the average temperature of the side wafer is highest as its convective heat transfer is weakest.Narrowing the gap between wafer and reactor wall can force the etchant to flow in the wafer region and then facilitate the convective heat transfer,leading to better within-wafer and wafer-to-wafer etch uniformities.An inlet angle of 60°balances fluid by-pass and mechanical energy loss,and it yields the best temperature and etch uniformities.The batch with 25wafers has much wider flow channels and much lower flow resistance compared with that with 50wafers,and thus it shows better temperature and etch uniformities.These results and the CFD model should serve to guide the optimal design of batch-processing wet-etch reactors.
文摘An optimized design of laser range finding system using the self-mixing effect in a single-mode verticalcavity surface-emitting laser （VCSEL） is proposed. In order to improve the ranging accuracy and expand dynamic measurement range, we apply difference frequency analog phase-locked loop （PLL） instead of fast Fourier transform （FFT） to process signal, and choose the optimum triangular wave frequency .fm= 500 Hz and small modulation current △Ip p = 0.28 mA to modulate single-mode VCSEL. The experiment results show that, without controlling the laser＇s temperature, the ranging accuracy is better than 2 mm and the measurement dynamic range is as large as 50-500 mm when the sampling time is 0.1 s and the room temperature is 0--55℃.
