Extreme ultraviolet(EUV)source produced by laser-induced discharge plasma(LDP)is a potential technical means in inspection and metrology.A pulsed Nd:YAG laser is focused on a tin plate to produce an initial plasma the...Extreme ultraviolet(EUV)source produced by laser-induced discharge plasma(LDP)is a potential technical means in inspection and metrology.A pulsed Nd:YAG laser is focused on a tin plate to produce an initial plasma thereby triggering a discharge between high-voltage electrodes in a vacuum system.The process of micro-pinch formation during the current rising is recorded by a time-resolved intensified charge couple device camera.The evolution of electron temperature and density of LDP are obtained by optical emission spectrometry.An extreme ultraviolet spectrometer is built up to investigate the EUV spectrum of Sn LDP at 13.5 nm.The laser and discharge parameters such as laser energy,voltage,gap distance,and anode shape can influence the EUV emission.展开更多
Laser-induced discharge plasmas(LDPs) have the potential to be inspection and metrology sources in extreme ultraviolet(EUV) lithography. An LDP EUV source was developed to avoid tin electrode erosion in which a tin po...Laser-induced discharge plasmas(LDPs) have the potential to be inspection and metrology sources in extreme ultraviolet(EUV) lithography. An LDP EUV source was developed to avoid tin electrode erosion in which a tin pool was used as a cathode. A CO2 pulse laser was focused on the liquid tin target surface, and then a breakdown occurred in a very short time. The voltage-current characteristics of the discharge oscillated, lasting for several microseconds, and an RLC fitting model was used to obtain the inductance and resistance. An intensified chargecoupled device(ICCD) camera was used to investigate the dynamics of LDP, which can explain the formation of a discharge channel. The EUV spectra of laser-induced liquid tin discharge plasma were detected by a grazing incident ultraviolet spectrometer, compared with a laser-produced tin droplet plasma EUV spectrum. To explain the EUV spectrum difference of laser-induced liquid tin discharge plasma and laser-produced tin droplet plasma,the collision radiation(CR) model combined with COWAN code was used to fit the experimental EUV spectrum, which can estimate the electron temperature and density of the plasma.展开更多
基金Project supported by the Basic and Applied Basic Research Major Program of Guangdong Province,China(Grant No.2019B030302003).
文摘Extreme ultraviolet(EUV)source produced by laser-induced discharge plasma(LDP)is a potential technical means in inspection and metrology.A pulsed Nd:YAG laser is focused on a tin plate to produce an initial plasma thereby triggering a discharge between high-voltage electrodes in a vacuum system.The process of micro-pinch formation during the current rising is recorded by a time-resolved intensified charge couple device camera.The evolution of electron temperature and density of LDP are obtained by optical emission spectrometry.An extreme ultraviolet spectrometer is built up to investigate the EUV spectrum of Sn LDP at 13.5 nm.The laser and discharge parameters such as laser energy,voltage,gap distance,and anode shape can influence the EUV emission.
文摘Laser-induced discharge plasmas(LDPs) have the potential to be inspection and metrology sources in extreme ultraviolet(EUV) lithography. An LDP EUV source was developed to avoid tin electrode erosion in which a tin pool was used as a cathode. A CO2 pulse laser was focused on the liquid tin target surface, and then a breakdown occurred in a very short time. The voltage-current characteristics of the discharge oscillated, lasting for several microseconds, and an RLC fitting model was used to obtain the inductance and resistance. An intensified chargecoupled device(ICCD) camera was used to investigate the dynamics of LDP, which can explain the formation of a discharge channel. The EUV spectra of laser-induced liquid tin discharge plasma were detected by a grazing incident ultraviolet spectrometer, compared with a laser-produced tin droplet plasma EUV spectrum. To explain the EUV spectrum difference of laser-induced liquid tin discharge plasma and laser-produced tin droplet plasma,the collision radiation(CR) model combined with COWAN code was used to fit the experimental EUV spectrum, which can estimate the electron temperature and density of the plasma.
