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13.5 nm Schwarzschild microscope with high magnification and high resolution 被引量:2
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作者 王新 +2 位作者 黄秋实 马爽 王占山 《Chinese Optics Letters》 SCIE EI CAS CSCD 2017年第4期76-80,共5页
A Schwarzschild microscope with a numerical aperture of 0.2 and a magnification of 130 in a 100μm field of view(FOV)is designed and is working at 13.5 nm.Meanwhile,a CCD is used as a detector with a pixel size of 1... A Schwarzschild microscope with a numerical aperture of 0.2 and a magnification of 130 in a 100μm field of view(FOV)is designed and is working at 13.5 nm.Meanwhile,a CCD is used as a detector with a pixel size of 13μm×13μm and imaging area of 13 mm×13 mm.The imaging quality with tolerances of system and errors of mirrors are considered.We obtain that the best on-axes object resolution can be up to about 200 nm,the average value is 230 nm,and the resolution is about 360 nm at 80μm FOV. 展开更多
关键词 mirrors pixel aperture spherical projection exceed multilayer gotten ultraviolet corner
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极紫外正入射光学系统研究进展 被引量:1
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作者 张哲 伊圣振 +4 位作者 黄秋实 李文斌 张众 王占山 《光学精密工程》 EI CAS CSCD 北大核心 2022年第21期2678-2687,共10页
极紫外正入射光学系统广泛应用于生物结构显微成像、等离子体诊断、太阳物理观测和极紫外光刻等领域中,对其开展深入研究具有重要意义。本文对同济大学精密光学工程研究所在极紫外正入射光学系统方面的最新进展进行介绍,列举了应用于超... 极紫外正入射光学系统广泛应用于生物结构显微成像、等离子体诊断、太阳物理观测和极紫外光刻等领域中,对其开展深入研究具有重要意义。本文对同济大学精密光学工程研究所在极紫外正入射光学系统方面的最新进展进行介绍,列举了应用于超热电子诊断、微纳成像、极紫外辐照损伤及Z箍缩等离子体诊断等不同场景中的多套正入射光学系统。这些系统分别在相应的应用中实现了优异的性能表现:毫米级视场内微米级的空间分辨;几十微米级视场内亚微米的超高空间分辨;大数值孔径下的超高能量密度极紫外辐照及多能点多通道的时空间诊断。研究所在极紫外正入射光学系统研究中取得的进展为我国等离子体诊断设备的自主可控及高端制造装备的技术储备提供了有力支持。 展开更多
关键词 极紫外 多层膜 Schwarzschild系统 等离子体诊断 成像系统 聚焦系统
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Wolter-I-like X ray telescope structure using one conical mirror and one quadric mirror 被引量:2
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作者 马爽 王占山 《Chinese Optics Letters》 SCIE EI CAS CSCD 2016年第12期151-155,共5页
Nested multilayer mirrors are commonly used in X ray telescope structure to increase the collecting area. To balance the difficulty and cost of producing these mirrors, Wolter-I structures are replaced with conical Wo... Nested multilayer mirrors are commonly used in X ray telescope structure to increase the collecting area. To balance the difficulty and cost of producing these mirrors, Wolter-I structures are replaced with conical Wolter-I structures, but these can lead to significantly poorer angular resolutions. In this Letter, we consider changing one of the mirror shapes(paraboloid or hyperboloid) of a Wolter-I structure to a conical mirror shape, while the other mirror shape remains a quadric surface-type structure, which can thus ensure the imaging quality. The cone-hyperboloid structure is nested to obtain on-axis angular resolution and off-axis images. 展开更多
关键词 mirror quadric telescope angular producing replaced difficulty collecting multilayer coordinates
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