A two degrees of freedom （DOF） positioning stage using novel linear ultrasonic motors is presented. The stage mainly consists of two linear ultrasonic motors, linear guides and tables. It can realize the long stroke...A two degrees of freedom （DOF） positioning stage using novel linear ultrasonic motors is presented. The stage mainly consists of two linear ultrasonic motors, linear guides and tables. It can realize the long stroke and reversible controlled motion in two directions. The wheel-shape linear ultrasonic motor applied in the stage utilizes two fourth-bending modes of non-uniform beam in orthogonal directions. Quick response, no backlash, high resolution, power-off self-braking, and long stroke are the attractive characteristics of the linear positioning stage. Experimental results show that z and y-direction tables can reach the destination without overshoot and the error is less than 2μm by using two linear encoders with a resolution of 1 μm. In the open-loop mode, the positioning stage achieves 1μm resolution at 0. 25 ms driving time.展开更多
基金the National Natural Science Foundation of China (50735002)~~
文摘A two degrees of freedom （DOF） positioning stage using novel linear ultrasonic motors is presented. The stage mainly consists of two linear ultrasonic motors, linear guides and tables. It can realize the long stroke and reversible controlled motion in two directions. The wheel-shape linear ultrasonic motor applied in the stage utilizes two fourth-bending modes of non-uniform beam in orthogonal directions. Quick response, no backlash, high resolution, power-off self-braking, and long stroke are the attractive characteristics of the linear positioning stage. Experimental results show that z and y-direction tables can reach the destination without overshoot and the error is less than 2μm by using two linear encoders with a resolution of 1 μm. In the open-loop mode, the positioning stage achieves 1μm resolution at 0. 25 ms driving time.
