Electron cyclotron resonance （ECR） plasma was applied to enhance the direct current magnetron sputtering to prepare hydrogenated diamond-like carbon （H-DLC） films. For different microwave powers, both argon and hy...Electron cyclotron resonance （ECR） plasma was applied to enhance the direct current magnetron sputtering to prepare hydrogenated diamond-like carbon （H-DLC） films. For different microwave powers, both argon and hydrogen gas are introduced separately as the ECR working gas to investigate the influence of microwave power on the microstructure and electrical property of the H-DLC films deposited on P-type silicon substrates. A series of characterization methods including the Raman spectrum and atomic force microscopy are used. Results show that, within a certain range, the increase in microwave power affects the properties of the thin films, namely the sp3 ratio, the hardness, the nanoparticle size and the resistivity all increase while the roughness decreases with the increase in microwave power. The maximum of resistivity amounts to 1.1×10^9 Ω.cm. At the same time it is found that the influence of microwave power on the properties of H-DLC films is more pronounced when argon gas is applied as the ECR working gas, compared to hydrogen gas.展开更多
A spark generator was employed to assist surface barrier discharge （SBD） in nitrogen at atmospheric pressure. The influence of spark discharge on the SBD electrical behavior is investigated by means of volt-ampere c...A spark generator was employed to assist surface barrier discharge （SBD） in nitrogen at atmospheric pressure. The influence of spark discharge on the SBD electrical behavior is investigated by means of volt-ampere characteristics. Also, the electron density of plasma in the filament of each SBD arrangement is determined by plasma radiation method. It is found that the filaments in spark-assistant SBD are much stronger, while the corresponding mean electron density is much lower. Results show that the spark generator can improve the uniformity of SBD in atmospheric nitrogen in a particular range of applied frequency.展开更多
Diagnosis of the particle number density of plasma plays an important role in the understanding of plasma sources and processing.Regular radiation signals from plasma oscillation in filaments of atmospheric nitrogen d...Diagnosis of the particle number density of plasma plays an important role in the understanding of plasma sources and processing.Regular radiation signals from plasma oscillation in filaments of atmospheric nitrogen discharge,which were excited by the injection of secondary electron beams during the propagation of the streamer,are employed to determine the ion density of plasma and its evolution in the filaments.Results show that the density of N4＋ in a filament of atmospheric nitrogen discharge is of the order of 1013 cm-3.It is also found that the recombination processes play a dominant role in plasma decay,and that the ion density decreases non-monotonically with time during streamer propagation.展开更多
基金supported by Shenzhen Key Laboratory of Sensors Technology Open Fund of China (Nos.SST200908, SST200911)
文摘Electron cyclotron resonance （ECR） plasma was applied to enhance the direct current magnetron sputtering to prepare hydrogenated diamond-like carbon （H-DLC） films. For different microwave powers, both argon and hydrogen gas are introduced separately as the ECR working gas to investigate the influence of microwave power on the microstructure and electrical property of the H-DLC films deposited on P-type silicon substrates. A series of characterization methods including the Raman spectrum and atomic force microscopy are used. Results show that, within a certain range, the increase in microwave power affects the properties of the thin films, namely the sp3 ratio, the hardness, the nanoparticle size and the resistivity all increase while the roughness decreases with the increase in microwave power. The maximum of resistivity amounts to 1.1×10^9 Ω.cm. At the same time it is found that the influence of microwave power on the properties of H-DLC films is more pronounced when argon gas is applied as the ECR working gas, compared to hydrogen gas.
基金supported by the technological project of Shenzhen, China (No.200620)Shenzhen Key Laboratory of Sensors Technology Open Fund of China (Nos.SST200908, SST200911)
文摘A spark generator was employed to assist surface barrier discharge （SBD） in nitrogen at atmospheric pressure. The influence of spark discharge on the SBD electrical behavior is investigated by means of volt-ampere characteristics. Also, the electron density of plasma in the filament of each SBD arrangement is determined by plasma radiation method. It is found that the filaments in spark-assistant SBD are much stronger, while the corresponding mean electron density is much lower. Results show that the spark generator can improve the uniformity of SBD in atmospheric nitrogen in a particular range of applied frequency.
基金supported by the Technological Project of Shenzhen,China(No.JC201005280485A)the Planned S&T Program of Shenzhen,China(No.JC201105170703A)the Foundation of Guangdong Province,China(No.2012LYM0115)
文摘Diagnosis of the particle number density of plasma plays an important role in the understanding of plasma sources and processing.Regular radiation signals from plasma oscillation in filaments of atmospheric nitrogen discharge,which were excited by the injection of secondary electron beams during the propagation of the streamer,are employed to determine the ion density of plasma and its evolution in the filaments.Results show that the density of N4＋ in a filament of atmospheric nitrogen discharge is of the order of 1013 cm-3.It is also found that the recombination processes play a dominant role in plasma decay,and that the ion density decreases non-monotonically with time during streamer propagation.
