This paper presents a new class of semiconductor integrated sensor which consists of sensitive components and flip flop circuit. The sensors have high sensitivity and digital output. This paper describes the operatin...This paper presents a new class of semiconductor integrated sensor which consists of sensitive components and flip flop circuit. The sensors have high sensitivity and digital output. This paper describes the operating principle and structure of the sensor. And noise effect on characteristics of the sensor is analysed in detail. The modulated effect of the triangular wave voltage is quantified. As an example, an integrated pressure sensor is introduced and the experimental results agree with the theoretical analyses.展开更多
文摘This paper presents a new class of semiconductor integrated sensor which consists of sensitive components and flip flop circuit. The sensors have high sensitivity and digital output. This paper describes the operating principle and structure of the sensor. And noise effect on characteristics of the sensor is analysed in detail. The modulated effect of the triangular wave voltage is quantified. As an example, an integrated pressure sensor is introduced and the experimental results agree with the theoretical analyses.