A newly-developed six-degree-of-freedom calibration system for the wind tunnel balances is introduced. The frame of the system, the functions and the operating principle of different parts are presented in detail. The...A newly-developed six-degree-of-freedom calibration system for the wind tunnel balances is introduced. The frame of the system, the functions and the operating principle of different parts are presented in detail. The system is composed of four parts: the automatically loading subsystem, the automatically resetting subsystem, the data-acquisition subsystem and the measurement subsystem. The results of some cell experiments proved that the system can meet the needs of the present calibration task of the balance. Through further improvement, the system can be also used to calibrate other devices with multi degree-of-freedom and measure the minute shifts, such as the guide rail of machine tool and the assembling of large parts and so on.展开更多
Wolter I collector is the best collector for extreme ultraviolet （EUV） lithography, which has a series of nested mirrors. It has high collection efficiency and can obtain more uniform intensity distribution at the i...Wolter I collector is the best collector for extreme ultraviolet （EUV） lithography, which has a series of nested mirrors. It has high collection efficiency and can obtain more uniform intensity distribution at the intermediate focus （IF）. A new design with the calculation sequence from the outer mirror to the inner one on the premise of satisfying the requirements of the collector is introduced. Based on this concept, a computer program is established and the optical parameters of the collector using the program is calculated. The design results indicate that the collector satisfies all the requirements.展开更多
基金This work was supported by the National Natural Science Foundation of China under Grant No. 60278008.
文摘A newly-developed six-degree-of-freedom calibration system for the wind tunnel balances is introduced. The frame of the system, the functions and the operating principle of different parts are presented in detail. The system is composed of four parts: the automatically loading subsystem, the automatically resetting subsystem, the data-acquisition subsystem and the measurement subsystem. The results of some cell experiments proved that the system can meet the needs of the present calibration task of the balance. Through further improvement, the system can be also used to calibrate other devices with multi degree-of-freedom and measure the minute shifts, such as the guide rail of machine tool and the assembling of large parts and so on.
基金supported by the State Key Program ofthe National Natural Science of China (No. 60838005)the Major National Science and Technology SpecialProjects (No. 2008ZX02501)
文摘Wolter I collector is the best collector for extreme ultraviolet （EUV） lithography, which has a series of nested mirrors. It has high collection efficiency and can obtain more uniform intensity distribution at the intermediate focus （IF）. A new design with the calculation sequence from the outer mirror to the inner one on the premise of satisfying the requirements of the collector is introduced. Based on this concept, a computer program is established and the optical parameters of the collector using the program is calculated. The design results indicate that the collector satisfies all the requirements.
