The transparent conductive Mg-Ga co-doped Zn O(MGZO) films were prepared by radio-frequency(RF) magnetron sputtering. The influence of substrate temperature on the structural and optoelectrical properties of the films...The transparent conductive Mg-Ga co-doped Zn O(MGZO) films were prepared by radio-frequency(RF) magnetron sputtering. The influence of substrate temperature on the structural and optoelectrical properties of the films is studied. The results show that all the films possess a preferential orientation along the(002) plane. With the increase of substrate temperature, the structure and optoelectrical properties of the films can be changed. When substrate temperature is 300 ℃, the deposited film exhibits the best crystalline quality and optoelectrical properties, with the minimum micro strain of 1.09×10^(-3), the highest average visible transmittance of 82.42%, the lowest resistivity of 1.62×10^(-3) Ω·cm and the highest figure of merit of 3.18×10~3 Ω^(-1)·cm^(-1). The optical bandgaps of the films are observed to be in the range of 3.342—3.545 eV. The refractive index dispersion curves obey the Sellmeier's dispersion model.展开更多
基金supported by the National Natural Science Foundation of China(No.11504436)the Fundamental Research Funds for the Central Universities(Nos.CZP17002 and CZW14019)
文摘The transparent conductive Mg-Ga co-doped Zn O(MGZO) films were prepared by radio-frequency(RF) magnetron sputtering. The influence of substrate temperature on the structural and optoelectrical properties of the films is studied. The results show that all the films possess a preferential orientation along the(002) plane. With the increase of substrate temperature, the structure and optoelectrical properties of the films can be changed. When substrate temperature is 300 ℃, the deposited film exhibits the best crystalline quality and optoelectrical properties, with the minimum micro strain of 1.09×10^(-3), the highest average visible transmittance of 82.42%, the lowest resistivity of 1.62×10^(-3) Ω·cm and the highest figure of merit of 3.18×10~3 Ω^(-1)·cm^(-1). The optical bandgaps of the films are observed to be in the range of 3.342—3.545 eV. The refractive index dispersion curves obey the Sellmeier's dispersion model.
