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高介电常数的栅极电介质LaAlO_3薄膜的性能研究 被引量:16
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作者 于涛 +3 位作者 游彪 胡安 刘治国 《无机材料学报》 SCIE EI CAS CSCD 北大核心 2003年第1期229-232,共4页
在室温下,采用射频磁控溅射法在Si衬底上制备了具有高介电常数的LaAlO3薄膜,这是一种新的栅极电介质材料.在高纯O2中经过15min650℃的高温退火后LaAlO3薄膜仍然不晶化,这种热稳定性有利于减小薄膜的漏电流.本工作研究了LaAlO3薄膜的介... 在室温下,采用射频磁控溅射法在Si衬底上制备了具有高介电常数的LaAlO3薄膜,这是一种新的栅极电介质材料.在高纯O2中经过15min650℃的高温退火后LaAlO3薄膜仍然不晶化,这种热稳定性有利于减小薄膜的漏电流.本工作研究了LaAlO3薄膜的介电性能,其电容等效氧化物厚度为2.33nm,在外加偏压±1V处的漏电流很低,分别为3.73mA/cm2(+1V处)和5.32×10-4mA/cm2(-1V处),两者相差四个数量级.此结果表明,Pt/LaAlO3/Si结构具有良好的单向导电性能. C-V曲线的滞后电压VH=0.09V,界面态密度的值约为8.35×1011cm-2.研究结果表明,在今后的半导体器件的甚大规模集成(ULSI)中,具有高介电常数的LaAlO3薄膜将会是一种极有希望的栅极电介质材料. 展开更多
关键词 栅极电介质材料 介电常数 LaAlO3薄膜 铝酸镧 半导体集成电路
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赝弹性银硫系化合物阻变行为的透射电镜研究 被引量:1
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作者 熊雨薇 李京仓 +6 位作者 谭治远 朱明芸 尹奎波 商尚炀 魏琦 孙立涛 《电子显微学报》 CAS CSCD 北大核心 2021年第6期635-642,共8页
银硫系化合物由于尺寸可缩减性好、擦写速度快、具有多值存储能力等优点,在阻变存储器介质材料研究中受到广泛关注。但随着介质材料尺寸的不断缩小,材料表/界面结构对器件的性能产生的影响尚不明确。因此从微观尺度上揭示阻变介质材料表... 银硫系化合物由于尺寸可缩减性好、擦写速度快、具有多值存储能力等优点,在阻变存储器介质材料研究中受到广泛关注。但随着介质材料尺寸的不断缩小,材料表/界面结构对器件的性能产生的影响尚不明确。因此从微观尺度上揭示阻变介质材料表/界面对性能影响的相关机理至关重要。本文利用脉冲激光沉积制备了Ag_(10)Ge_(15)Te_(75)薄膜,并在透射电子显微镜中构建了以其为介质的阻变存储器,研究了其阻变过程中微观形貌与物相的演化。实验发现,尺寸在20 nm以下的Ag_(10)Ge_(15)Te_(75)薄膜在被电压脉冲熔断后,能够用"冷焊"的方式重新连接并仍保持阻变特性。当给其施加正向电压时,薄膜中生成Ag_(2)Te多晶颗粒。当挤压拉伸薄膜时,Ag_(2)Te多晶颗粒不会消失。当施加反向电压时,Ag_(2)Te多晶颗粒消失。分析认为,Ag_(10)Ge_(15)Te_(75)薄膜的形变属于Coble赝弹性,Ag_(2)Te多晶的生成与电场诱导沉积有关。实验的结果对于构建新型柔性阻变存储器结构具有一定的指导意义。 展开更多
关键词 Ag_(10)Ge_(15)Te_(75) 透射电子显微镜 阻变存储器 赝弹性行为
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Impact of Au Nanocrystal Size and Inter-Nanocrystal Distance on the Storage Characteristics of Memory Devices 被引量:1
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作者 LAN Xue-Xin OU Xin +8 位作者 XU Bo GONG Chang-Jie LI Run YIN Qiao-Nan XIA Yi-Dong YIN Jiang LIU Zhi-Guo LI Ai-Dong YAN Feng 《Chinese Physics Letters》 SCIE CAS CSCD 2013年第12期161-164,共4页
The charge-storage characteristics of charge trapping memory devices containing different sizes of Au nanocrystals(NCs)sandwiched by Al2O3 tunneling and blocking layers are studied.A strong impact of both Au NC size a... The charge-storage characteristics of charge trapping memory devices containing different sizes of Au nanocrystals(NCs)sandwiched by Al2O3 tunneling and blocking layers are studied.A strong impact of both Au NC size and inter-NC distance on the charge trapping capability of the devices is observed.The total surface area of Au NCs associated with Au NC size is supposed to be a key factor in the charge-storage capability,and the device with larger size of Au NCs and a suitable inter-NC distance will possess better charge trapping capability.Variable range hopping as the lateral charge loss mechanism is considered as the main reason for the decrease of the charge trapping capability when Au NCs grow and overlap neighbors. 展开更多
关键词 TRAPPING SIZE CHARGE
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Theoretical Study of Carrier Mobility in Two-Dimensional Tetragonal Carbon Allotrope from Porous Graphene
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作者 高松 向晖 +3 位作者 徐波 殷江 刘治国 《Chinese Physics Letters》 SCIE CAS CSCD 2016年第8期38-40,共3页
The carrier mobility of two-dimensional tetragonal carbon allotrope (T-CA) from porous graphene is investigated by first-principles calculations. T-CA can be constructed from divacancy and Stone-Thrower--Wales defec... The carrier mobility of two-dimensional tetragonal carbon allotrope (T-CA) from porous graphene is investigated by first-principles calculations. T-CA can be constructed from divacancy and Stone-Thrower--Wales defects from graphene. T-CA is a direct semiconductor with a band gap of 0.4 eV at F point. T-CA possesses a high carrier mobility of the order of 104 cm2V-ls-1. As our study demonstrates, T-CA has potential applications for next-generation electronic materials. 展开更多
关键词 of CA Theoretical Study of Carrier Mobility in Two-Dimensional Tetragonal Carbon Allotrope from Porous Graphene in from is
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Bipolar resistance switching in the fully transparent BaSnO_3-based memory device
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作者 张婷 殷江 +3 位作者 赵高峰 张伟风 刘治国 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第8期481-486,共6页
The fully transparent indium-tin-oxide/BaSnO3/F-doped SnO2 devices that show a stable bipolar resistance switching effect are successfully fabricated. In addition to the transmittance being above 87% for visible light... The fully transparent indium-tin-oxide/BaSnO3/F-doped SnO2 devices that show a stable bipolar resistance switching effect are successfully fabricated. In addition to the transmittance being above 87% for visible light, an initial forming process is unnecessary for the production of transparent memory. Fittings to the current-voltage curves reveal the interfacial conduction in the devices. The first-principles calculation indicates that the oxygen vacancies in cubic BaSnO3 will form the defective energy level below the bottom of conduction band. The field-induced resistance change can be explained based on the change of the interracial Schottky barrier, due to the migration of oxygen vacancies in the vicinity of the interface. This work presents a candidate material BaSnO3 for the application of resistive random access memory to transparent electronics. 展开更多
关键词 transparent resistive random access memory resistance switching oxygen vacancy BaSnO3
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The Distinguished Charge-Trapping Capability of the Memory Device with Al2O3-Cu2O Composite as the Charge Storage Layer
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作者 陆建新 欧欣 +9 位作者 蓝学新 曹正义 刘晓杰 卢伟 龚昌杰 徐波 李爱 殷江 刘治国 《Chinese Physics Letters》 SCIE CAS CSCD 2014年第2期146-148,共3页
A memory device Si/Al2O3/Al2O3-Cu2O/Al2O3/Pt is fabricated by using atomic layer deposition and r^magnetron sputtering techniques. The memory device including the composite of Al2O3 and Cu2O as the charge storage laye... A memory device Si/Al2O3/Al2O3-Cu2O/Al2O3/Pt is fabricated by using atomic layer deposition and r^magnetron sputtering techniques. The memory device including the composite of Al2O3 and Cu2O as the charge storage layer shows a distinguished charge trapping capability. At a working voltage of ±11 V a memory window of 9.22 V is obtained. The x-ray photoelectron spectroscopic study shows a shoulder from Cu2+ ions around the peak of Cu1+ ions. It is suggested that the charge-trapping mechanism should be attributed to the defect states formed by the inter-diffusion at the interface of two oxides. 展开更多
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TixSb2Te Thin Films for Phase Change Memory Applications
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作者 唐时宇 李润 +4 位作者 欧欣 许含霓 殷江 刘治国 《Chinese Physics Letters》 SCIE CAS CSCD 2014年第7期222-225,共4页
Sb2 Te films with different Ti contents (TixSb2 Te) are derived via the target-attachment method by using the magnetron sputtering technique. The effects of the Ti content on the phase change characteristics and the... Sb2 Te films with different Ti contents (TixSb2 Te) are derived via the target-attachment method by using the magnetron sputtering technique. The effects of the Ti content on the phase change characteristics and the microstructures are investigated by x-ray diffraction, x-ray photoelectron spectroscopy, scanning electron microscopy and atom force microcopy. Resistance-temperature measurements are carried out to reveal the enhanced crystallization temperature of TixSb2 Te films, indicating a better thermal stability in such films. Both the activation energy and the temperature for 10 y data retention increase with increasing the concentration of Ti. It indicates that the crystallization of the amorphous Sb2 Te film could be suppressed by the introduction of Ti. The improvement of crystallization temperature and the thermal stability of the amorphous Sb2 Te film results from the introduction of Ti in Sb- Te bond that decreases the binding energy of Sb 4d and Te 4d. 展开更多
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GeTe_(4) as a Candidate for Phase Change Memory Application
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作者 LI Run TANG Shi-Yu +5 位作者 BAI Gang YIN Qiao-Nan LAN Xue-Xin XIA Yi-Dong YIN Jiang LIU Zhi-Guo 《Chinese Physics Letters》 SCIE CAS CSCD 2013年第5期169-171,共3页
GeTe_(4) films are deposited by using a dc magnetron sputtering technique, and its structural, thermal and electrical properties are investigated systematically. The prototypical phase-change memory cells are fabricat... GeTe_(4) films are deposited by using a dc magnetron sputtering technique, and its structural, thermal and electrical properties are investigated systematically. The prototypical phase-change memory cells are fabricated by using a focused ion beam and magnetron sputtering techniques. Compared with Ge_(2)Sb_(2)Te_(5), the GeTe_(4) film exhibits a higher crystallization temperature (235℃), better data retention of ten years at 129℃, and larger activation energy (2.94 eV). GeTe4 phase change memory cells with an effective diameter of 1 μm show proper switching speed, low power consumption, and good resistance contrast. The Set and Reset operations are achieved by using a 200-ns 2.0-V pulse and a 30-ns 3.0-V pulse, respectively. The dynamic switching ratio between the OFF and ON states is larger than 1×10^(4). 展开更多
关键词 RESISTANCE operations CRYSTALLIZATION
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