An Sb delta doping layer in silicon is grown at the temperature of 300℃ by silicon molecular beam epitaxy and characterized by the small angle x-ray reflectivity measurement using synchrotron radiation beam.The oscil...An Sb delta doping layer in silicon is grown at the temperature of 300℃ by silicon molecular beam epitaxy and characterized by the small angle x-ray reflectivity measurement using synchrotron radiation beam.The oscillations of the reflectivity caused by dopant Sb at Q as large as 14.5 are detected.Simulation of this curve as a whole shows that the total amount of dopant Sb is 0.15 monolayer and is restricted to two atomic layers.An extremely narrow Sb delta doping structure without Sb segregation is thus obtained at the growth temperature of 300℃ as verified by the experiment.展开更多
The impurity-doping in semiconductors is the way to control their electroinc andphoto-electronic properties. The distribution and amount of the dopant affect their physi-cal properties. The development of the molecula...The impurity-doping in semiconductors is the way to control their electroinc andphoto-electronic properties. The distribution and amount of the dopant affect their physi-cal properties. The development of the molecular beam epitaxy (MBE) and other epitaxytechniques has attracted full atttention to new semiconductor materials, such assuperlattices. Recently, δ-doped semiconductors, which can reduce the scattering ofimpurity in two-dimensional electron (hole) systems, have been showing promisingpotentials for scientific researches and techmological applications.展开更多
基金Supported by the National Natural Science Foundation of China under Grant No.69476008the Key Project of the State Commission of Science and Technology of China.
文摘An Sb delta doping layer in silicon is grown at the temperature of 300℃ by silicon molecular beam epitaxy and characterized by the small angle x-ray reflectivity measurement using synchrotron radiation beam.The oscillations of the reflectivity caused by dopant Sb at Q as large as 14.5 are detected.Simulation of this curve as a whole shows that the total amount of dopant Sb is 0.15 monolayer and is restricted to two atomic layers.An extremely narrow Sb delta doping structure without Sb segregation is thus obtained at the growth temperature of 300℃ as verified by the experiment.
基金Project spported partially by the major project "Applications of Experimental Synchrotron Radiation Methods" from Chinese Academy of Sciences.
文摘The impurity-doping in semiconductors is the way to control their electroinc andphoto-electronic properties. The distribution and amount of the dopant affect their physi-cal properties. The development of the molecular beam epitaxy (MBE) and other epitaxytechniques has attracted full atttention to new semiconductor materials, such assuperlattices. Recently, δ-doped semiconductors, which can reduce the scattering ofimpurity in two-dimensional electron (hole) systems, have been showing promisingpotentials for scientific researches and techmological applications.
