An ultrahigh-Q silicon racetrack resonator is proposed and demonstrated with uniform multimode silicon photonic waveguides.It consists of two multimode straight waveguides connected by two multimode waveguide bends(MW...An ultrahigh-Q silicon racetrack resonator is proposed and demonstrated with uniform multimode silicon photonic waveguides.It consists of two multimode straight waveguides connected by two multimode waveguide bends(MWBs).In particular,the MWBs are based on modified Euler curves,and a bent directional coupler is used to achieve the selective mode coupling for the fundamental mode and not exciting the higher-order mode in the racetrack.In this way,the fundamental mode is excited and propagates in the multimode racetrack resonator with ultralow loss and low intermode coupling.Meanwhile,it helps achieve a compact 180°bend to make a compact resonator with a maximized free spectral range(FSR).In this paper,for the chosen 1.6μm wide silicon photonic waveguide,the effective radius Reffof the designed 180°bend is as small as 29μm.The corresponding FSR is about 0.9 nm when choosing 260μm long straight waveguides in the racetrack.The present high-Q resonator is realized with a simple standard single-etching process provided by a multiproject wafer foundry.The fabricated device,which has a measured intrinsic Q-factor as high as 2.3×10~6,is the smallest silicon resonator with a>106Q-factor.展开更多
The disk resonator gyroscope is an attractive candidate for high-performance MEMS gyroscopes.This gyroscope consists of a sensor and readout electronics,and the characteristics of the sensor directly determine the per...The disk resonator gyroscope is an attractive candidate for high-performance MEMS gyroscopes.This gyroscope consists of a sensor and readout electronics,and the characteristics of the sensor directly determine the performance.For the sensor,a high-quality factor and long decaying time constant are the most important characteristics required to achieve high performance.We report a disk resonator gyroscope with a measured quality factor of 510 k and decaying time constant of 74.9 s,which is a record for MEMS silicon disk resonator gyroscopes,to the best of our knowledge.To improve the quality factor of the DRG,the quality factor improvement mechanism is first analyzed,and based on this mechanism two stiffness-mass decoupled methods,i.e.,spoke length distribution optimization and lumped mass configuration design,are proposed and demonstrated.A disk resonator gyroscope prototype is fabricated based on these design strategies,and the sensor itself shows an angle random walk as low as 0.001°/√h,demonstrating true potential to achieve navigation-grade performance.The gyroscope with readout electronics shows an angle random walk of 0.01°/√h and a bias instability of 0.04°/h at room temperature without compensation,revealing that the performance of the gyroscope is severely limited by the readout electronics,which should be further improved.We expect that the quality factor improvement methods can be used in the design of other MEMS gyroscopes and that the newly designed DRG can be further improved to achieve navigation-grade performances for high-end industrial,transportation,aerospace,and automotive applications.展开更多
Photonic sensors that are able to detect and track biochemical molecules offer powerful tools for information acquisition in applications ranging from environmental analysis to medical diagnosis.The ultimate aim of bi...Photonic sensors that are able to detect and track biochemical molecules offer powerful tools for information acquisition in applications ranging from environmental analysis to medical diagnosis.The ultimate aim of biochemical sensing is to achieve both quantitative sensitivity and selectivity.As atomically thick films with remarkable optoelectronic tunability,graphene and its derived materials have shown unique potential as a chemically tunable platform for sensing,thus enabling significant performance enhancement,versatile functionalization and flexible device integration.Here,we demonstrate a partially reduced graphene oxide(prGO)inner-coated and fiber-calibrated Fabry-Perot dye resonator for biochemical detection.Versatile functionalization in the prGO film enables the intracavity fluorescent resonance energy transfer(FRET)to be chemically selective in the visible band.Moreover,by measuring the intermode interference via noise canceled beat notes and locked-in heterodyne detection with Hz-level precision,we achieved individual molecule sensitivity for dopamine,nicotine and single-strand DNA detection.This work combines atomic-layer nanoscience and high-resolution optoelectronics,providing a way toward high-performance biochemical sensors and systems.展开更多
The study of resonant dielectric nanostructures with a high refractive index is a new research direction in the nanoscale optics and metamaterial-inspired nanophotonics.Because of the unique optically induced electric...The study of resonant dielectric nanostructures with a high refractive index is a new research direction in the nanoscale optics and metamaterial-inspired nanophotonics.Because of the unique optically induced electric and magnetic Mie resonances,high-index nanoscale structures are expected to complement or even replace different plasmonic components in a range of potential applications.We study a strong coupling between modes of a single subwavelength high-index dielectric resonator and analyze the mode transformation and Fano resonances when the resonator’s aspect ratio varies.We demonstrate that strong mode coupling results in resonances with high-quality factors,which are related to the physics of bound states in the continuum when the radiative losses are almost suppressed due to the Friedrich–Wintgen scenario of destructive interference.We explain the physics of these states in terms of multipole decomposition,and show that their appearance is accompanied by a drastic change in the far-field radiation pattern.We reveal a fundamental link between the formation of the high-quality resonances and peculiarities of the Fano parameter in the scattering cross-section spectra.Our theoretical findings are confirmed by microwave experiments for the scattering of high-index cylindrical resonators with a tunable aspect ratio.The proposed mechanism of the strong mode coupling in single subwavelength high-index resonators accompanied by resonances with high-quality factors helps to extend substantially functionalities of all-dielectric nanophotonics,which opens horizons for active and passive nanoscale metadevices.展开更多
基金National Major Research and Development Program(2018YFB2200200)China National Funds for Distinguished Young Scientists(61725503)+1 种基金National Natural Science Foundation of China(6191101294,91950205)Natural Science Foundation of Zhejiang Province(LD19F050001,LZ18F050001)。
文摘An ultrahigh-Q silicon racetrack resonator is proposed and demonstrated with uniform multimode silicon photonic waveguides.It consists of two multimode straight waveguides connected by two multimode waveguide bends(MWBs).In particular,the MWBs are based on modified Euler curves,and a bent directional coupler is used to achieve the selective mode coupling for the fundamental mode and not exciting the higher-order mode in the racetrack.In this way,the fundamental mode is excited and propagates in the multimode racetrack resonator with ultralow loss and low intermode coupling.Meanwhile,it helps achieve a compact 180°bend to make a compact resonator with a maximized free spectral range(FSR).In this paper,for the chosen 1.6μm wide silicon photonic waveguide,the effective radius Reffof the designed 180°bend is as small as 29μm.The corresponding FSR is about 0.9 nm when choosing 260μm long straight waveguides in the racetrack.The present high-Q resonator is realized with a simple standard single-etching process provided by a multiproject wafer foundry.The fabricated device,which has a measured intrinsic Q-factor as high as 2.3×10~6,is the smallest silicon resonator with a>106Q-factor.
基金This work was supported by the National Natural Science Foundation of China under Grant 51575521the 2017 Huxiang Provincial Scholar Program.
文摘The disk resonator gyroscope is an attractive candidate for high-performance MEMS gyroscopes.This gyroscope consists of a sensor and readout electronics,and the characteristics of the sensor directly determine the performance.For the sensor,a high-quality factor and long decaying time constant are the most important characteristics required to achieve high performance.We report a disk resonator gyroscope with a measured quality factor of 510 k and decaying time constant of 74.9 s,which is a record for MEMS silicon disk resonator gyroscopes,to the best of our knowledge.To improve the quality factor of the DRG,the quality factor improvement mechanism is first analyzed,and based on this mechanism two stiffness-mass decoupled methods,i.e.,spoke length distribution optimization and lumped mass configuration design,are proposed and demonstrated.A disk resonator gyroscope prototype is fabricated based on these design strategies,and the sensor itself shows an angle random walk as low as 0.001°/√h,demonstrating true potential to achieve navigation-grade performance.The gyroscope with readout electronics shows an angle random walk of 0.01°/√h and a bias instability of 0.04°/h at room temperature without compensation,revealing that the performance of the gyroscope is severely limited by the readout electronics,which should be further improved.We expect that the quality factor improvement methods can be used in the design of other MEMS gyroscopes and that the newly designed DRG can be further improved to achieve navigation-grade performances for high-end industrial,transportation,aerospace,and automotive applications.
基金supported by the Ingeer International Certification Assessment Co.Ltd.(ICAS)support from the National Science Foundation of China(61705032,61975025)+1 种基金the 111 Project(B14039)the National Science Foundation(EFRI-1741707).
文摘Photonic sensors that are able to detect and track biochemical molecules offer powerful tools for information acquisition in applications ranging from environmental analysis to medical diagnosis.The ultimate aim of biochemical sensing is to achieve both quantitative sensitivity and selectivity.As atomically thick films with remarkable optoelectronic tunability,graphene and its derived materials have shown unique potential as a chemically tunable platform for sensing,thus enabling significant performance enhancement,versatile functionalization and flexible device integration.Here,we demonstrate a partially reduced graphene oxide(prGO)inner-coated and fiber-calibrated Fabry-Perot dye resonator for biochemical detection.Versatile functionalization in the prGO film enables the intracavity fluorescent resonance energy transfer(FRET)to be chemically selective in the visible band.Moreover,by measuring the intermode interference via noise canceled beat notes and locked-in heterodyne detection with Hz-level precision,we achieved individual molecule sensitivity for dopamine,nicotine and single-strand DNA detection.This work combines atomic-layer nanoscience and high-resolution optoelectronics,providing a way toward high-performance biochemical sensors and systems.
基金We acknowledge fruitful discussions with H.Atwater,I.V.Shadrivov,P.A.Belov,A.N.Poddubny,A.Polman,and A.Moroz.The numerical calculations were performed with support from the Ministry of Education and Science of the Russian Federation(Project 3.1500.2017/4.6)the Australian Research Council.The experimental study of the cylinder SCS in the microwave frequency range was supported by the Russian Science Foundation(17-79-20379)The analytical calculations with resonant-state expansion method were performed with support from the Russian Science Foundation(17-12-01581)。
文摘The study of resonant dielectric nanostructures with a high refractive index is a new research direction in the nanoscale optics and metamaterial-inspired nanophotonics.Because of the unique optically induced electric and magnetic Mie resonances,high-index nanoscale structures are expected to complement or even replace different plasmonic components in a range of potential applications.We study a strong coupling between modes of a single subwavelength high-index dielectric resonator and analyze the mode transformation and Fano resonances when the resonator’s aspect ratio varies.We demonstrate that strong mode coupling results in resonances with high-quality factors,which are related to the physics of bound states in the continuum when the radiative losses are almost suppressed due to the Friedrich–Wintgen scenario of destructive interference.We explain the physics of these states in terms of multipole decomposition,and show that their appearance is accompanied by a drastic change in the far-field radiation pattern.We reveal a fundamental link between the formation of the high-quality resonances and peculiarities of the Fano parameter in the scattering cross-section spectra.Our theoretical findings are confirmed by microwave experiments for the scattering of high-index cylindrical resonators with a tunable aspect ratio.The proposed mechanism of the strong mode coupling in single subwavelength high-index resonators accompanied by resonances with high-quality factors helps to extend substantially functionalities of all-dielectric nanophotonics,which opens horizons for active and passive nanoscale metadevices.
