摘要
针对三氯氢硅合成、精馏中存在的技术问题进行了改进,并介绍了技改取得的效果。
The technical improvement has been carried out in view of the problems existing in trichlo- rosilane synthesis and rectification. And the effect gained by the technical improvement is introduced.
出处
《氯碱工业》
CAS
2009年第3期30-31,33,共3页
Chlor-Alkali Industry
关键词
三氯氢硅
生产工艺
精馏
氯化氢
干燥
合成工艺
尾气
trichlorosilane
production technology
rectification
chlorine hydride
drying
synthetic process
tail gas
