摘要
对应用于半导体封装设备金丝球邦定机的高速高精度直线电机XY平台进行了控制器设计.设计目标是高速高精度响应,以及在外界干扰和参数不确定性因素影响下的鲁棒性.通过对PI控制器、PDF控制器和PDFF控制器的性能比较,系统选择PDFF控制器作为速度环的控制器,PID控制器作为位置环控制器的双环控制架构.根据降阶的系统模型利用基本CRS算法对控制器各个参数进行优化.仿真和实验结果证明,该控制方案具有良好的响应性能和鲁棒性,加速度可以达到5g,调整时间为4ms以内.
In this paper, design and implementation of a CRS- based high precision motion controller is presented for a high speed linear motor driven XY table in the semiconductor wire bonding application. The aims of this work include high speed and high precision response of the system and its robustness for the external disturbance and the parameters uncertainty. We choose the PDFF controller for the speed loop after the comparison of PI,PDF, PDFF controllers,and the PID controller for the position loop. The optimization of the controller parameters with the CRS based on the reduced order modeling algorithm is presented. The good performance and robustness with the acceleration 5 g and the setting time within 4 ms profile have been shown in the results of the simulation and the experiments.
出处
《机械与电子》
2009年第1期21-24,共4页
Machinery & Electronics
